公开(公告)号：US20030209076A1

公开(公告)日：2003-11-13

申请号：US10409421

申请日：2003-04-08

Applicant: Institute of microelectronics

Inventor： Yubo Miao ,  Ranganathan Nagarajan ,  Uppili Sridhar ,  Rakesh Kumar ,  Qinxin Zhang

IPC: G01P015/125

CPC classification number: G01P15/125 ,  B81B3/0051 ,  B81B2201/0235 ,  B81B2203/053 ,  G01P15/0802 ,  G01P2015/0814 ,  Y10T29/49005

Abstract: An accelerometer design is described. It operates by measuring a change in capacitance when one plate is fixed and one is mobile (free to accelerate). Unlike prior art designs where such changes are caused by variations in the plate separation distance, in the design of the present invention the plate separation distance is fixed, it being the effective plate area that changes with acceleration. A key feature is that the basic unit is a pair of capacitors. The fixed plates in each case are at the same relative height but the mobile plates are offset relative to the fixed plates, one mobile plate somewhat higher than its fixed plate with the other mobile plate being somewhat lower. Then, when the mobile plates move (in the same direction), one capacitor increases in value while the other decreases by the same amount. This differential design renders the device insensitive to sources of systematic error such as temperature changes. A process for manufacturing the design is described.

Abstract translation: 描述加速度计设计。 它通过测量一个板固定并且一个是移动的（自由加速）时的电容变化来操作。 不同于现有技术设计，其中这种变化是由板间隔距离的变化引起的，在本发明的设计中，板间隔距离是固定的，它是加速度变化的有效板面积。 一个关键的特征是基本单元是一对电容器。 每种情况下的固定板具有相同的相对高度，但是移动板相对于固定板偏移，一个移动板稍微高于其固定板，另一个移动板稍低。 然后，当移动板移动（沿相同方向）时，一个电容器的值增加，而另一个电容器减少相同的量。 该差分设计使设备对温度变化等系统误差源不敏感。 描述了用于制造设计的过程。

公开(公告)号：US20030218227A1

公开(公告)日：2003-11-27

申请号：US10154279

申请日：2002-05-23

Applicant: Institute of Microelectronics.

Inventor： Janak Singh ,  Uppili Sridhar ,  Ranganathan Nagarajan ,  Quanbo Zou

IPC: H01L031/0232

CPC classification number: B81C1/00142 ,  B81B2201/042 ,  G02B26/0841

Abstract: Design of a micro-mirror switching device and its fabrication in single crystal silicon are described. The device is composed of three main elements: silicon mirror plate with metal-mirror, secondary actuator, and hinge/spring mechanism to integrate the mirror plate with the actuator. p-n junction is first formed on p-type silicon. Trenches are then etched in n-silicon to define the device element boundaries and filled with silicon dioxide. Three layers of sacrificial oxide and two structural poly-silicon layers are deposited and patterned to form device elements. Novel release processes, consisting of backside electrochemical etching in potassium-hydroxide, reactive ion etching to expose oxide-filled trenches from the bottom, and hydrofluoric acid etching of sacrificial oxide layers and oxide in silicon trenches, form the silicon blocks; those that are not attached to structural poly-silicon are sacrificed and those that are attached are left in place to hold together the switching device elements.

Abstract translation: 描述了微镜开关器件的设计及其在单晶硅中的制造。 该装置由三个主要元件组成：具有金属镜的硅镜板，二次致动器和用于将镜板与致动器集成的铰链/弹簧机构。 p-n结首先在p型硅上形成。 然后在n硅中蚀刻沟槽以限定器件元件边界并填充二氧化硅。 沉积和图案化三层牺牲氧化物和两个结构多晶硅层以形成器件元件。 由氢氧化钾中的背面电化学蚀刻，从底部暴露氧化物填充的沟槽的反应离子蚀刻和硅沟槽中的牺牲氧化物层和氧化物的氢氟酸蚀刻组成的新型释放过程形成硅块; 牺牲未附着于结构多晶硅的那些，并且将附着的那些留在适当位置以将开关元件元件保持在一起。

公开(公告)号：US20030008286A1

公开(公告)日：2003-01-09

申请号：US09898124

申请日：2001-07-05

Applicant: Institute of Microelectronics

Inventor： Quanbo Zou ,  Uppili Sridhar

IPC: C12P019/34 ,  C12M001/22 ,  C12M001/00 ,  C12Q001/68 ,  C12M001/34

CPC classification number: B01L3/50851 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00804 ,  B01J2219/00819 ,  B01J2219/00873 ,  B01J2219/00961 ,  B01L7/52 ,  B01L7/54 ,  B01L9/523 ,  B01L2300/0819 ,  B01L2300/1805 ,  F28F13/00

Abstract: It is often desirable to be able to perform an array of micro-chemical reactions simultaneously but with each reaction proceeding at a different temperature and/or for a different time. A classic example is the polymerase chain reaction associated with DNA analysis. In the present invention, this is achieved by means of an apparatus made up of a chip of plastic, or similar low cost material, containing an array of reaction chambers. After all chambers have been filled with reagents, the chip is pressed up against a substrate, typically a printed circuit board, there being a set of temperature balancing blocks between the chip and the substrate. Individually controlled heaters and sensors located between the blocks and the substrate allow each chamber to follow its own individual thermal protocol while being well thermally isolated from all other chambers and the substrate. The latter rests on a large heat sink to avoid temperature drift over time. A process for manufacturing the apparatus is also disclosed.

Abstract translation: 通常期望能够同时执行微量化学反应的阵列，但是每个反应在不同的温度和/或不同的时间进行。 典型的例子是与DNA分析相关的聚合酶链反应。 在本发明中，这通过由包含反应室阵列的塑料芯片或类似的低成本材料构成的装置来实现。 在所有的室已经充满试剂之后，芯片被压靠在基板（通常是印刷电路板）上，在芯片和基板之间存在一组温度平衡块。 位于块体和衬底之间的单独控制的加热器和传感器允许每个腔室遵循其各自的热协议，同时与所有其它腔室和衬底良好地热隔离。 后者放在大型散热器上，以避免温度随时间漂移。 还公开了一种制造该装置的方法。

公开(公告)号：US20020115200A1

公开(公告)日：2002-08-22

申请号：US09785588

申请日：2001-02-16

Applicant: Institute of Microelectronics

Inventor： Quanbo Zou ,  Uppili Sridhar ,  Yu Chen ,  Tit Meng Lim ,  Emmanuel Selvanayagam Zachariah ,  Tie Yan

IPC: C12M001/40

CPC classification number: B01L3/5027 ,  B01L3/5025 ,  B01L7/52 ,  B01L2200/147 ,  B01L2300/0816 ,  B01L2300/0877 ,  B01L2300/1827 ,  B01L2300/1883 ,  B01L2400/0487 ,  B01L2400/0688

Abstract: The invention describes a thermal cycler which permits simultaneous treatment of multiple individual samples in independent thermal protocols, so as to implement large numbers of DNA experiments simultaneously in a short time. The chamber is thermally isolated from its surroundings, heat flow in and out of the unit being limited to one or two specific heat transfer areas. All heating elements are located within these transfer areas and at least one temperature sensor per heating element is positioned close by. Fluid bearing channels that facilitate sending fluid into, and removing fluid from, the chamber are provided. The chambers may be manufactured as integrated arrays to form units in which each cycler chamber has independent temperature and fluid flow control. Two embodiments of the invention are described together with a process for manufacturing them.

Abstract translation: 本发明描述了一种热循环仪，其允许在独立热方案中同时处理多个单个样品，从而在短时间内同时实现大量的DNA实验。 该室与其周围热隔离，进出单元的热流限于一个或两个特定的传热区域。 所有加热元件位于这些转移区域内，每个加热元件至少有一个温度传感器靠近。 提供了便于将流体输送到腔室中并从腔室中除去流体的流体轴承通道。 腔室可以被制成集成阵列以形成其中每个循环器腔具有独立温度和流体流量控制的单元。 本发明的两个实施例与其制造方法一起被描述。

公开(公告)号：US20020160582A1

公开(公告)日：2002-10-31

申请号：US09841940

申请日：2001-04-26

Applicant: Institute of Microelectronics

Inventor： Yu Chen ,  Quanbo Zou ,  Uppili Sridhar ,  Pang Dow Foo

IPC: H01L021/30 ,  H01L021/46 ,  H01L021/469 ,  H01L021/76

CPC classification number: B81C3/001 ,  C08J5/124 ,  C09J183/04 ,  H01L21/2007

Abstract: A method for forming bonds between similar and dissimilar material surfaces, particularly the surfaces of silicon wafers having various devices disposed thereon, wherein such bonds can be formed at room temperature and do not require the application of high pressures or voltages. The bonding material is polydimethylsiloxane, which is transparent and bio-compatible.

Abstract translation: 在类似和异种材料表面之间形成粘合的方法，特别是其上设置有各种装置的硅晶片的表面，其中这种键可以在室温下形成，并且不需要施加高压或高压。 粘合材料是聚二甲基硅氧烷，其是透明的和生物相容的。