公开(公告)号：WO2009031769A3

公开(公告)日：2009-05-07

申请号：PCT/KR2008004799

申请日：2008-08-19

Applicant: KOREA RES INST OF STANDARDS ,  KIM JAE-WAN ,  EOM TAE-BONG ,  KIM JONG-AHN ,  KANG CHU-SHIK

Inventor： KIM JAE-WAN ,  EOM TAE-BONG ,  KIM JONG-AHN ,  KANG CHU-SHIK

IPC: H01S3/10

CPC classification number: H01S5/0687 ,  H01S5/005 ,  H01S5/0078 ,  H01S5/06804 ,  H01S5/0683

Abstract: A frequency- stabilized laser apparatus and a method for stabilizing the frequency of a laser are disclosed. A semiconductor laser emits a beam. An external reflector has a resonance frequency and feeds back the emitted beam to the semiconductor laser if the frequency of the emitted beam is equal to the resonance frequency. An interference signal generator generates an interference signal for detecting the wavelength of the emitted beam and a controller detects the wavelength of the beam from the generated interference signal. According to the frequency- stabilized laser apparatus and the method for stabilizing the frequency of the laser, it is possible to stabilize the frequency of the beam emitted from the semiconductor laser and output the beam having the stable frequency for a long period of time.

Abstract translation: 公开了一种频率稳定的激光装置和用于稳定激光器频率的方法。 半导体激光器发射光束。 如果发射光束的频率等于谐振频率，则外部反射器具有谐振频率并将发射的光束反馈到半导体激光器。 干扰信号发生器产生用于检测发射波束的波长的干扰信号，并且控制器根据所产生的干扰信号来检测波束的波长。 根据频率稳定的激光装置和稳定激光器的频率的方法，可以稳定从半导体激光器发射的光束的频率并输出长时间具有稳定频率的光束。

公开(公告)号：WO2011162566A3

公开(公告)日：2012-05-03

申请号：PCT/KR2011004616

申请日：2011-06-24

Applicant: KOREA RES INST OF STANDARDS ,  JIN JONG HAN ,  KIM JAE WAN ,  KIM JONG AHN ,  KANG CHU-SHIK

Inventor： JIN JONG HAN ,  KIM JAE WAN ,  KIM JONG AHN ,  KANG CHU-SHIK

IPC: G01B11/22 ,  G01B9/02 ,  G01B11/08 ,  G01N21/45

CPC classification number: G01B11/22 ,  G01B9/02008 ,  G01B11/12 ,  G01B2210/56 ,  G01N21/9501 ,  G01N2021/95653

Abstract: The present invention pertains to a device and a method for measuring a via hole of a silicon wafer, wherein it is possible to precisely measure the depth of the via hole without damaging the wafer. Broadband infrared light is radiated to a silicon wafer which has a superior light transmission property, so that the depth of the via hole may be measured from the light which is reflected from each boundary surface of the wafer and the interference signal of reference light. The via hole measuring device according to the present invention includes: a light source unit for generating broadband infrared light; and an interferometer for radiating the light generated from the light source unit to a silicon wafer, so as to measure the depth of a via hole formed on the wafer according to the spectrum period of the interference signal of the light, which is reflected from the silicon wafer.

Abstract translation: 本发明涉及用于测量硅晶片的通孔的装置和方法，其中可以精确地测量通孔的深度而不损坏晶片。 宽带红外光被照射到具有优异的透光性的硅晶片，从而可以从从晶片的每个边界面反射的光和参考光的干涉信号测量通孔的深度。 根据本发明的通孔测量装置包括：用于产生宽带红外光的光源单元; 以及干涉仪，用于将从光源单元产生的光发射到硅晶片，以便根据光的干涉信号的光谱周期来测量形成在晶片上的通孔的深度，该距离从 硅晶片。

公开(公告)号：WO2013172561A3

公开(公告)日：2014-01-03

申请号：PCT/KR2013003469

申请日：2013-04-23

Applicant: KOREA RES INST OF STANDARDS

Inventor： KIM JONG-AHN ,  KIM JAE-WAN ,  EOM TAE-BONG ,  KANG CHU-SHIK ,  JIN JONG-HAN

IPC: G01D5/26 ,  G01D5/244

CPC classification number: G01D5/34707 ,  G01D5/2455 ,  G01D5/34746 ,  G01D5/34776 ,  G01D5/34792

Abstract: The present invention provides an absolute position measurement method, absolute position measurement device, and scale. The scale includes a scale pattern formed by replacing repetitively arranged pseudo-random codes with a sequence of N-stage linear feedback transition resisters by using a first symbol having a first width and representing a first state and a second symbol having the first width and representing a second state. The first symbol is divided into two or more first symbol areas, the second symbol is divided into two or more second symbol areas, and there is at least one overlap area having the same structure due to the overlap of the first symbol and the second symbol.

Abstract translation: 本发明提供绝对位置测量方法，绝对位置测量装置和刻度。 缩放比例包括通过使用具有第一宽度并表示第一状态的第一符号和具有第一宽度的第二符号代替重复排列的伪随机码与N级线性反馈转换电阻序列而形成的比例模式， 第二个状态 第一符号被划分为两个或更多个第一符号区域，第二符号被划分为两个或更多个第二符号区域，并且由于第一符号和第二符号的重叠而存在具有相同结构的至少一个重叠区域 。