公开(公告)号：KR20090025828A

公开(公告)日：2009-03-11

申请号：KR20070090963

申请日：2007-09-07

Applicant: KOREA RES INST OF STANDARDS

Inventor： HONG SEUNG SOO ,  KIM JIN TAE ,  SHIN YONG HYEON

IPC: G01F25/00

CPC classification number: G01F25/0007 ,  G01F1/76 ,  G01F3/221

Abstract: A calibration/test device and method of a mass flowmeter equipped on a vacuum system are provided to improve efficiency of quality control by calibrating/testing the mass flowmeter with comparing it with a reference mass flowmeter attached to a mobile correction device. A calibration/test device of a mass flowmeter equipped on a vacuum system comprises a vacuum valve(14) and a mass flowmeter valve(16) to be corrected, which are serially installed in a pipeline, a connection port(18) connecting the vacuum valve and the mass flowmeter valve, and a mobile mass flowmeter correction device(100) connected to the connection port. The mobile mass flowmeter correction device includes a vacuum chamber(110) connected to the connection port, a chamber valve(114) connecting the vacuum chamber and the connection port, a reference mass flowmeter(116) connecting the chamber valve and the connection port, a reference mass flowmeter valve(118) regulating the gas flux, an air escape(120) exhausting the gas, a gate valve(122) connected between the vacuum chamber and the air escape, and a measuring unit measuring the physical properties of the gas flowing within the vacuum chamber.

Abstract translation: 提供了配备在真空系统上的质量流量计的校准/测试装置和方法，以通过与连接到移动校正装置的参考质量流量计进行比较来校准/测试质量流量计来提高质量控制的效率。 配备在真空系统上的质量流量计的校准/测试装置包括串联安装在管道中的真空阀（14）和待校正的质量流量计阀（16），连接真空的连接口（18） 阀和质量流量计阀，以及连接到连接端口的移动质量流量计校正装置（100）。 移动质量流量计校正装置包括连接到连接端口的真空室（110），连接真空室和连接口的室阀（114），连接室阀和连接口的参考质量流量计（116） 调节气体通量的参考质量流量计阀（118），排出气体的排气口（120），连接在真空室和排气口之间的闸阀（122）以及测量气体物理性质的测量单元 在真空室内流动。