公开(公告)号：JP2002311042A

公开(公告)日：2002-10-23

申请号：JP2002017546

申请日：2002-01-25

Applicant: KOREA RES INST OF STANDARDS &

Inventor： SEONG DAE JIN ,  SHIN YONG-HYEON ,  KIM JUNG-HYUNG ,  LIM JONG YEON ,  JUNG KWANG HWA

IPC: G01P5/12 ,  G01F1/00 ,  G01F1/684 ,  G01F1/698 ,  G01M9/06 ,  G01P5/08

Abstract: PROBLEM TO BE SOLVED: To provide a measuring instrument for gas flow velocity distribution for visually displaying spatial distribution of a gas flow velocity. SOLUTION: The measuring instrument is so structured that a thin wire is arranged one-dimensionally or two-dimensionally by applying a principle of CTA(Constant Temperature Anemometer) and Pirani gauge for determining a flow velocity by quantity of an electric current flowing in order to maintain a metal thin wire at a constant temperature, then the flow velocity is measured by scanning vertically to a direction of the flow velocity and sensing an electric change of the thin wire on a scanned surface, the flow velocity is collected, and the flow velocity distribution is detected and is visualized. Therefore, quantitative distribution measurement of the gas flow velocity can be conducted and the instrument can be applied to a semiconductor manufacturing process requiring gas injection of equal distribution.

公开(公告)号：KR101148082B1

公开(公告)日：2012-05-24

申请号：KR20100113220

申请日：2010-11-15

Applicant: KOREA RES INST OF STANDARDS

Inventor： YOU SHIN JAE ,  KIM JUNG HYUNG ,  KIM DAE WOONG ,  SEONG DAE JIN ,  SHIN YONG HYEON

IPC: H05H1/24 ,  H05H1/32

CPC classification number: H01J37/32825 ,  A61L2/14 ,  H05H1/24 ,  H05H3/04 ,  H05H7/14

Abstract: PURPOSE: An apparatus for generating plasma and a method thereof are provided to supply a small vacuum chamber using atmospheric pressure plasma by using metal tunneling of an electronic beam. CONSTITUTION: An apparatus for generating plasma includes a vacuum container(110) and an electron emission unit(120) generating electronics inside the vacuum container. The apparatus for generating plasma includes an acceleration part(130) accelerating an emitted electronics in the electron emission unit inside the vacuum container and a metal foil(140) tunneling accelerated electronics. The electronics tunneling the metal foil forms plasma outside the vacuum container. The vacuum container is able to be formed into metal or a dielectric.

Abstract translation: 目的：提供一种用于产生等离子体的装置及其方法，以通过使用电子束的金属隧道来提供使用大气压等离子体的小型真空室。 构成：用于产生等离子体的装置包括在真空容器内产生电子装置的真空容器（110）和电子发射单元（120）。 用于产生等离子体的装置包括加速部分（130），其加速真空容器内部的电子发射单元中的发射电子元件，以及金属箔（140），其加速电路。 穿过金属箔的电子器件在真空容器外部形成等离子体。 真空容器能够形成金属或电介质。