公开(公告)号：WO2009078923A3

公开(公告)日：2009-09-17

申请号：PCT/US2008013466

申请日：2008-12-18

Applicant: LAM RES CORP ,  LARSON DEAN JAY ,  STEVENSON TOM ,  WANG VICTOR

Inventor： LARSON DEAN JAY ,  STEVENSON TOM ,  WANG VICTOR

IPC: H01L21/3065 ,  H01L21/205

CPC classification number: H01L21/67069 ,  B32B37/12 ,  H01L21/67103 ,  H01L21/68757 ,  Y10T156/10 ,  Y10T156/1062 ,  Y10T428/31504

Abstract: A bonded assembly to reduce particle contamination in a semiconductor vacuum chamber such as a plasma processing apparatus is provided, including an elastomeric sheet adhesive bond between mating surfaces of a component and a support member to accommodate thermal stresses. The elastomeric sheet comprises a silicone adhesive to withstand a high shear strain of =800% at a temperature range between room temperature and 300°C such as heat curable high molecular weight dimethyl silicone with optional fillers. The sheet form has bond thickness control for parallelism of bonded surfaces. The sheet adhesive may be cut into pre-form shapes to conform to regularly or irregularly shaped features, maximize surface contact area with mating parts, and can be installed into cavities. Installation can be manually, manually with installation tooling, or with automated machinery. Composite layers of sheet adhesive having different physical properties can be laminated or coplanar.

Abstract translation: 提供了一种用于减少诸如等离子体处理装置的半导体真空室中的颗粒污染的粘合组件，包括在部件的配合表面和支撑构件之间的弹性片粘合剂粘合以适应热应力。 弹性体片材包括硅氧烷粘合剂，以在室温和300℃之间的温度范围内承受= 800％的高剪切应变，例如可热固化的高分子量二甲基硅氧烷和任选的填料。 片材形式具有用于粘结表面平行度的粘结厚度控制。 片状粘合剂可以被切割成预成型形状以符合规则或不规则形状的特征，使与配合部件的表面接触面积最大化，并且可以安装到空腔中。 安装可以手动，手动安装工具或自动化机械。 具有不同物理性质的片状粘合剂的复合层可以层压或共面。

公开(公告)号：SG175649A1

公开(公告)日：2011-11-28

申请号：SG2011075975

申请日：2007-10-10

Applicant: LAM RES CORP

Inventor： LARSON DEAN J ,  BROWN DANIEL ,  COMENDANT KEITH ,  WANG VICTOR

Abstract: An electrode assembly and method of centering an outer ring around an electrode assembly in a plasma reaction chamber used in semiconductor substrate processing. The method includes positioning the outer ring around an outer surface of a backing member of the electrode assembly, and inserting at least one centering element between the outer ring and the backing member. The centering element can be a plurality of spring-loaded centering elements received in a cavity on the outer surface of the backing member, the centering elements having a first end adapted to contact the outer ring and a second end adapted to receive a spring. The outer ring surrounds an outer surface of the backing member, such that the plurality of spring-loaded centering elements are positioned between the outer surface of the backing member and an inner surface of the outer ring.Figure 7

公开(公告)号：MY166000A

公开(公告)日：2018-05-21

申请号：MYPI2010002812

申请日：2008-12-17

Applicant: LAM RES CORP

Inventor： LARSON DEAN JAY ,  STEVENSON TOM ,  WANG VICTOR

IPC: B23P17/04 ,  B23P19/00 ,  C23C16/455 ,  C23C16/50 ,  C23C16/505 ,  C23C16/509 ,  C23F1/00 ,  H01L21/306 ,  H01S4/00

Abstract: A SHOWERHEAD ELECTRODE FOR A PLASMA PROCESSING APPARATUS INCLUDES AN ELASTOMERIC SHEET ADHESIVE BOND BETWEEN MATING SURFACES OF AN ELECTRODE AND A BACKING MEMBER TO ACCOMMODATE STRESSES GENERATED DURING TEMPERATURE CYCLING DUE TO MISMATCH IN COEFFICIENTS OF THERMAL EXPANSION. THE ELASTOMERIC SHEET COMPRISES A THERMALLY CONDUCTIVE SILICONE ADHESIVE ABLE TO WITHSTAND A HIGH SHEAR STRAIN OF ≥300% IN A TEMPERATURE RANGE OF ROOM TEMPERATURE TO 3000C SUCH AS HEAT CURABLE HIGH MOLECULAR WEIGHT DIMETHYL SILICONE WITH FILLERS. THE SHEET FORM ADHESIVE HAS BOND THICKNESS CONTROL FOR PARALLELISM OF BONDED SURFACES OVER LARGE AREAS. THE SHEET ADHESIVE MAY BE CAST OR DIE CUT INTO PREFORM SHAPES THAT CAN CONFORM TO IRREGULARLY SHAPED FEATURES, MAXIMIZE SURFACE CONTACT AREA WITH MATING ELECTRODE SURFACES, AND INSTALLED INTO CAVITIES OF THE MATING ASSEMBLY. INSTALLATION CAN BE MANUALLY, MANUALLY WITH INSTALLATION TOOLING, OR WITH AUTOMATED MACHINERY. COMPOSITE LAYERS OF SHEET ADHESIVE HAVING DIFFERENT PHYSICAL PROPERTIES CAN BE LAMINATED OR COPLANAR.

公开(公告)号：SG10201407723PA

公开(公告)日：2014-12-30

申请号：SG10201407723P

申请日：2008-12-17

Applicant: LAM RES CORP

Inventor： LARSON DEAN JAY ,  STEVENSON TOM ,  WANG VICTOR

Abstract: A COMPOSITE SHOWERHEAD ELECTRODE ASSEMBLY FOR A A showerhead electrode for a plasma processing apparatus includes an elastomeric sheet adhesive bond between mating surfaces of an electrode and a backing member to accommodate stresses generated during temperature cycling due to mismatch in coefficients of thermal expansion. The elastomeric sheet comprises a thermally conductive silicone adhesive able to withstand a high shear strain of 300% in a ≥ temperature range of room temperature to 3000C such as heat curable high molecular weight dimethyl silicone with fillers. The sheet form adhesive has bond thickness control for parallelism of bonded surfaces over large areas. The sheet adhesive may be cast or die cut into pre-form shapes that can conform to irregularly shaped features, maximize surface contact area with mating electrode surfaces, and installed into cavities of the mating assembly. Installation can be manually, manually with installation tooling, or with automated machinery. Composite layers of sheet adhesive having different physical properties can be laminated or coplanar. Figure 1 - 29 -

公开(公告)号：SG187387A1

公开(公告)日：2013-02-28

申请号：SG2012093456

申请日：2008-12-18

Applicant: LAM RES CORP

Inventor： LARSON DEAN JAY ,  STEVENSON TOM ,  WANG VICTOR

Abstract: A bonded assembly to reduce particle contamination in a semiconductor vacuum chamber such as a plasma processing apparatus is provided, including an elastomeric sheet adhesive bond between mating surfaces of a component and a support member to accommodate thermal stresses. The elastomeric sheet comprises a silicone adhesive to withstand a high shear strain of =800% at a temperature range between room temperature and 300°C such as heat curable high molecular weight dimethyl silicone with optional fillers. The sheet form has bond thickness control for parallelism of bonded surfaces. The sheet adhesive may be cut into pre-form shapes to conform to regularly or irregularly shaped features, maximize surface contact area with mating parts, and can be installed into cavities. Installation can be manually, manually with installation tooling, or with automated machinery. Composite layers of sheet adhesive having different physical properties can be laminated or coplanar.Figure 1A

公开(公告)号：SG187386A1

公开(公告)日：2013-02-28

申请号：SG2012093449

申请日：2008-12-17

Applicant: LAM RES CORP

Inventor： LARSON DEAN JAY ,  STEVENSON TOM ,  WANG VICTOR

Abstract: A showerhead electrode for a plasma processing apparatus includes an elastomeric sheet adhesive bond between mating surfaces of an electrode and a backing member to accommodate stresses generated during temperature cycling due to mismatch in coefficients of thermal expansion. The elastomeric sheet comprises a thermally conductive silicone adhesive able to withstand a high shear strain of 300% in a temperature range of room temperature to 3000C such as heat curable high molecular weight dimethyl silicone with fillers. The sheet form adhesive has bond thickness control for parallelism of bonded surfaces over large areas. The sheet adhesive may be cast or die cut into pre-form shapes that can conform to irregularly shaped features, maximize surface contact area with mating electrode surfaces, and installed into cavities of the mating assembly. Installation can be manually, manually with installation tooling, or with automated machinery. Composite layers of sheet adhesive having different physical properties can be laminated or coplanar.Figure 1