公开(公告)号：WO2004055855A3

公开(公告)日：2005-01-06

申请号：PCT/US0338617

申请日：2003-12-04

Applicant: LAM RES CORP ,  LARSON DEAN J ,  KADKHODAYAN BABAK ,  WU DI ,  TAKESHITA KENJI ,  YEN BI-MING ,  SU XINGCAI ,  DENTY WILLIAM M JR ,  LOEWENHARDT PETER

Inventor： LARSON DEAN J ,  KADKHODAYAN BABAK ,  WU DI ,  TAKESHITA KENJI ,  YEN BI-MING ,  SU XINGCAI ,  DENTY WILLIAM M JR ,  LOEWENHARDT PETER

IPC: C23F1/00 ,  G05D7/06 ,  H01J37/00 ,  H01J37/32 ,  H01L21/306 ,  H01L21/311

CPC classification number: G05D7/0664 ,  H01J37/3244 ,  H01L21/31116

Abstract: An apparatus for providing different gases to different zones of a processing chamber comprises a gas supply (1880) for providing an etching gas flow; a flow splitter (1831, 1836 - 1840) in fluid connection with the gas supply for splitting the etching gas flow from the gas supply into a plurality of legs (1812, 1814, 1833, 1834) and a tuning gas system (1860- 1862, 1865 - 1868) in fluid connection to at least one of the legs of the plurality of legs (1812, 1814).

Abstract translation: 用于向处理室的不同区域提供不同气体的装置包括用于提供蚀刻气体流的气体供应源（1880） 与气体供应流体连接的分流器（1831,1836-1840），用于将来自气体供应的蚀刻气体流分解成多个腿部（1812,1814,1833,1834）和调节气体系统（1860-1862） ，1865-1868）与所述多个腿部（1812,1814）中的至少一个腿流体连接。

公开(公告)号：WO2004055855B1

公开(公告)日：2005-03-17

申请号：PCT/US0338617

申请日：2003-12-04

Applicant: LAM RES CORP ,  LARSON DEAN J ,  KADKHODAYAN BABAK ,  WU DI ,  TAKESHITA KENJI ,  YEN BI-MING ,  SU XINGCAI ,  DENTY WILLIAM M JR ,  LOEWENHARDT PETER

Inventor： LARSON DEAN J ,  KADKHODAYAN BABAK ,  WU DI ,  TAKESHITA KENJI ,  YEN BI-MING ,  SU XINGCAI ,  DENTY WILLIAM M JR ,  LOEWENHARDT PETER

IPC: C23F1/00 ,  G05D7/06 ,  H01J37/00 ,  H01J37/32 ,  H01L21/306 ,  H01L21/311

CPC classification number: G05D7/0664 ,  H01J37/3244 ,  H01L21/31116

Abstract: An apparatus for providing different gases to different zones of a processing chamber comprises a gas supply (1880) for providing an etching gas flow; a flow splitter (1831, 1836 - 1840) in fluid connection with the gas supply for splitting the etching gas flow from the gas supply into a plurality of legs (1812, 1814, 1833, 1834) and a tuning gas system (1860- 1862, 1865 - 1868) in fluid connection to at least one of the legs of the plurality of legs (1812, 1814).

Abstract translation: 用于向处理室的不同区域提供不同气体的装置包括用于提供蚀刻气体流的气体供应装置（1880） 与气体供应流体连接的分流器（1831,1836-1840），用于将来自气体供应源的蚀刻气流分成多个支路（1812,1814,1833,1834）和调谐气体系统（1860-1862） ，1865至1868）流体连接至所述多个腿（1812,1814）中的至少一个腿。

公开(公告)号：AU2003293396A1

公开(公告)日：2004-07-09

申请号：AU2003293396

申请日：2003-12-04

Applicant: LAM RES CORP

Inventor： LARSON DEAN J ,  KADKHODAYAN BABAK ,  WU DI ,  TAKESHITA KENJI ,  YEN BI-MING ,  SU XINGCAI ,  DENTY WILLIAM M JR ,  LOEWENHARDT PETER

IPC: C23F1/00 ,  G05D7/06 ,  H01J37/00 ,  H01J37/32 ,  H01L21/306 ,  H01L21/311

Abstract: An apparatus for providing a gas from a gas supply to at least two different zones in a process chamber is provided. A flow divider provides a fluid connection to the gas supply, where the flow divider splits gas flow from the gas supply into a plurality of legs. A master leg is in fluid connection with the flow divider, where the master leg comprises a master fixed orifice. A first slave leg is in fluid connection with the flow divider and in parallel with the master leg, where the first slave leg comprises a first slave leg valve and a first slave leg fixed orifice.

公开(公告)号：AU2003293396A8

公开(公告)日：2004-07-09

申请号：AU2003293396

申请日：2003-12-04

Applicant: LAM RES CORP

Inventor： LARSON DEAN J ,  DENTY WILLIAM M JR ,  TAKESHITA KENJI ,  SU XINGCAI ,  YEN BI-MING ,  KADKHODAYAN BABAK ,  WU DI ,  LOEWENHARDT PETER

IPC: C23F1/00 ,  G05D7/06 ,  H01J37/00 ,  H01J37/32 ,  H01L21/306 ,  H01L21/311

Abstract: An apparatus for providing a gas from a gas supply to at least two different zones in a process chamber is provided. A flow divider provides a fluid connection to the gas supply, where the flow divider splits gas flow from the gas supply into a plurality of legs. A master leg is in fluid connection with the flow divider, where the master leg comprises a master fixed orifice. A first slave leg is in fluid connection with the flow divider and in parallel with the master leg, where the first slave leg comprises a first slave leg valve and a first slave leg fixed orifice.