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公开(公告)号：WO2006053221A3
公开(公告)日：2007-03-01
申请号：PCT/US2005040937
申请日：2005-11-11
Applicant: LEXMARK INT INC
Inventor： ANDERSON FRANK E , CORNELL ROBERT W , HUBER DANIEL L
CPC classification number: B41J2/14129 , B41J2/1404 , B41J2/1412 , B41J2002/14387 , Y10T29/49083
Abstract: A micro-fluid ejection device for ultra-small droplet ejection and method of making a micro-fluid ejection device. The micro-fluid ejection device includes a semiconductor substrate containing a plurality of thermal ejection actuators disposed thereon. Each of the thermal ejection actuators includes a resistive layer and a protective layer for protecting a surface of the resistive layer. The resistive layer and the protective layer together define an actuator stack thickness. The actuator stack thickness ranges from about 500 to about 2000 Angstroms and provides an ejection energy per unit volume of from about 10 to about 20 gigajoules per cubic meter. A nozzle plate is attached to the semiconductor substrate to provide the micro-fluid ejection device.
Abstract translation: 用于超小液滴喷射的微流体喷射装置和制造微流体喷射装置的方法。 微流体喷射装置包括含有多个设置在其上的热喷射致动器的半导体基板。 每个热喷射致动器包括电阻层和用于保护电阻层的表面的保护层。 电阻层和保护层一起限定致动器堆叠厚度。 致动器堆叠厚度范围为约500至约2000埃，并且每单位体积提供约10至约20千兆焦耳/立方米的喷射能量。 喷嘴板附接到半导体衬底以提供微流体喷射装置。
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公开(公告)号：WO2006033737A3
公开(公告)日：2007-05-10
申请号：PCT/US2005029552
申请日：2005-08-19
Applicant: LEXMARK INT INC
Inventor： CORNELL ROBERT W
IPC: B41J2/015 , B41J2/04 , B41J2/05 , B41J29/38 , B41J29/393
CPC classification number: B41J2/04555 , B41J2/04565 , B41J2/04585 , B41J2/04591 , B41J2/14427 , B41J2202/03
Abstract: The present invention is directed to printing a pattern, such as an image or other indicia, onto a surface, and more specifically to printing a pattern onto a surface utilizing at least one microelectromechanical system (MEMS) actuator. The present invention in exemplary form makes use of Joule heating to actuate a beam that is capable of displacing ink from a chamber and onto a surface of a print medium. The invention includes methods for designing, fabricating, and operating a MEMS actuator in accordance with the teachings discussed herein.
Abstract translation: 本发明涉及将图案（例如图像或其他标记）印刷在表面上，更具体地说是利用至少一个微机电系统（MEMS）致动器将图案印刷在表面上。 以示例性形式的本发明利用焦耳加热致动能够将油墨从腔室移动到打印介质的表面上的光束。 本发明包括根据本文讨论的教导来设计，制造和操作MEMS致动器的方法。
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公开(公告)号：WO2006026333A3
公开(公告)日：2006-12-07
申请号：PCT/US2005030198
申请日：2005-08-25
Applicant: LEXMARK INT INC
Inventor： ANDERSON FRANK E , BELL BYRON V , CORNELL ROBERT W , GUAN YIMIN
IPC: B41J2/05
CPC classification number: B41J2/1603 , B41J2/14129 , B41J2/1628 , B41J2/164 , Y10T29/49401
Abstract: A micro-fluid ejection device structure and method therefor having improved low energy design. The devices includes a semiconductor substrate and an insulating layer deposited on the semiconductor substrate. A plurality of heater resistors are formed on the insulating layer from a resistive layer selected from the group consisting of TaAI, Ta2N, TaAI(O,N), TaA1Si, Ti(N,O), WSi(O,N), TaA1N, and TaAI/TaA1N. A sacrificial layer selected from an oxidizable metal and having a thickness ranging from about 500 to about 5000 Angstroms is deposited on the plurality of heater resistors. Electrodes are formed on the sacrificial layer from a first metal conductive layer to provide anode and cathode connections to the plurality of heater resistors. The sacrificial layer is oxidized in a plasma oxidation process to provide a fluid contact layer on the plurality of heater resistors.
Abstract translation: 一种具有改进的低能量设计的微流体喷射装置结构及其方法。 这些器件包括沉积在半导体衬底上的半导体衬底和绝缘层。 在绝缘层上形成多个加热电阻，该电阻层选自TaAI，Ta2N，TaAl（O，N），TaAlSi，Ti（N，O），WSi（O，N），TaAlN， 和TaAI / TaA1N。 选自可氧化金属并且具有约500至约5000埃的厚度的牺牲层沉积在多个加热电阻器上。 电极从第一金属导电层形成在牺牲层上，以提供与多个加热电阻器的阳极和阴极连接。 牺牲层在等离子体氧化过程中被氧化以在多个加热电阻器上提供流体接触层。
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公开(公告)号：WO2004087425A3
公开(公告)日：2006-06-22
申请号：PCT/US2004009480
申请日：2004-03-29
Applicant: LEXMARK INT INC
Inventor： CORNELL ROBERT W
CPC classification number: B41J2/1412
Abstract: An improved ink jet printer ejector including a substantially hexagonal-donut shaped thin film resistor having a first end, a second end opposite the first end, a major axis having a first length, and a minor axis having a second length less than the first length. The major axis extends between the first end and the second end thereof. Electrical conductors are attached to the first end and to the second end of the resistor for activating the ink ejector on command from the ink jet printer. Hexagonl-donut shaped thin film resistors exhibit improved heating characteristics and lower power consumption than conventional heater resistors.
Abstract translation: 一种改进的喷墨打印机喷射器，其包括基本上六边形的环形薄膜电阻器，其具有第一端，与第一端相对的第二端，具有第一长度的长轴和具有小于第一长度的第二长度的短轴 。 长轴在其第一端和第二端之间延伸。 电导体连接到电阻器的第一端和第二端，用于根据喷墨打印机的命令启动墨水喷射器。 六角形环形薄膜电阻器比常规加热电阻器具有更好的加热特性和更低的功耗。
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公开(公告)号：WO2005021266B1
公开(公告)日：2005-05-19
申请号：PCT/US2004022823
申请日：2004-07-15
Applicant: LEXMARK INT INC
Inventor： ANDERSON FRANK E , BELL BYRON V , COOK PAUL A , CORNELL ROBERT W , PARISH GEORGE K , SULLIVAN CARL E
CPC classification number: B41J2/17556 , B41J2/14129 , B41J2/17506 , B41J2/17513 , B41J2202/03 , B41J2202/13
Abstract: An ink jet printer including a printer cartridge containing a printhead attached to a cartridge carriage for translation of the cartridge across a print media. The printer also includes an off carriage ink supply, a printer microprocessor, and a combined ink fill tube and electrical connection cable connected between the cartridge and the off carriage ink supply for providing refill ink to the ink cartridge and control of the carriage and printhead. Improvements to the printer enable low cost, high quality printing to be achieved.
Abstract translation: 一种喷墨打印机，其包括打印机墨盒，所述打印机墨盒包含附接到墨盒托架的打印头，用于使墨盒在打印介质上平移。 该打印机还包括一个托架墨水源，一个打印机微处理器以及连接在墨盒和托架墨水源之间的组合墨水填充管和电连接电缆，用于向墨盒提供填充墨水并控制墨盒和打印头。 对打印机的改进可实现低成本，高质量的打印。
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Patent Agency Ranking
公开(公告)号：WO2006033738B1
公开(公告)日：2007-05-18
申请号：PCT/US2005029553
申请日：2005-08-19
Applicant: LEXMARK INT INC
Inventor： CORNELL ROBERT W , GOIN RICHARD L , POWERS JAMES H
CPC classification number: B41J2/1645 , B41J2/1404 , B41J2/1603 , B41J2/1623 , B41J2/1631 , B41J2/1634 , B41J2202/11
Abstract: A micro-fluid ejection head structure having multiple arrays of fluid ejection actuators. The structure includes a semiconductor substrate having a first array of fluid ejection actuators for ejecting a first fluid therefrom, and a second array of fluid ejection actuators for ejecting a second fluid therefrom. The first array of fluid ejection actuators is disposed in a first location on the substrate, and the second array of fluid ejection actuators is disposed in a second location on the substrate. A thick film layer having a thickness is attached adjacent the semiconductor substrate. The thick film layer has fluid flow channels formed therein solely for the first array of fluid ejection actuators. A nozzle plate is attached to the thick film layer opposite the semiconductor substrate. The nozzle plate has fluid flow channels formed therein for both the first array of fluid ejection actuators and the second array of fluid ejection actuators.
Abstract translation: 具有多个流体喷射致动器阵列的微流体喷射头结构。 该结构包括半导体衬底，该半导体衬底具有用于从其喷射第一流体的第一流体喷射致动器阵列和用于从其喷射第二流体的第二流体喷射致动器阵列。 流体喷射致动器的第一阵列设置在基板上的第一位置中，流体喷射致动器的第二阵列设置在基板上的第二位置中。 具有厚度的厚膜层附着在半导体衬底附近。 厚膜层仅在流体喷射致动器的第一阵列中形成有流体流动通道。 喷嘴板连接到与半导体衬底相对的厚膜层上。 喷嘴板具有形成在其中的流体流动通道，用于第一排流体喷射致动器和第二排流体喷射致动器。
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公开(公告)号：WO2006033738A3
公开(公告)日：2007-04-12
申请号：PCT/US2005029553
申请日：2005-08-19
Applicant: LEXMARK INT INC
Inventor： CORNELL ROBERT W , GOIN RICHARD L , POWERS JAMES H
CPC classification number: B41J2/1645 , B41J2/1404 , B41J2/1603 , B41J2/1623 , B41J2/1631 , B41J2/1634 , B41J2202/11
Abstract: A micro-fluid ejection head structure having multiple arrays of fluid ejection actuators. The structure includes a semiconductor substrate having a first array of fluid ejection actuators for ejecting a first fluid therefrom, and a second array of fluid ejection actuators for ejecting a second fluid therefrom. The first array of fluid ejection actuators is disposed in a first location on the substrate, and the second array of fluid ejection actuators is disposed in a second location on the substrate. A thick film layer having a thickness is attached adjacent the semiconductor substrate. The thick film layer has fluid flow channels formed therein solely for the first array of fluid ejection actuators. A nozzle plate is attached to the thick film layer opposite the semiconductor substrate. The nozzle plate has fluid flow channels formed therein for both the first array of fluid ejection actuators and the second array of fluid ejection actuators.
Abstract translation: 具有多个流体喷射致动器阵列的微流体喷射头结构。 该结构包括具有用于从其喷射第一流体的第一流体喷射致动器阵列的半导体衬底，以及用于从其喷射第二流体的第二流体喷射致动器阵列。 流体喷射致动器的第一阵列设置在基板上的第一位置，并且流体喷射致动器的第二阵列设置在基板上的第二位置。 具有厚度的厚膜层附着在半导体衬底附近。 厚膜层仅在第一阵列的流体喷射致动器中形成流体流动通道。 喷嘴板附着在与半导体衬底相对的厚膜层上。 喷嘴板具有形成在其中的流体流动通道，用于流体喷射致动器的第一阵列和流体喷射致动器的第二阵列。
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公开(公告)号：WO2005069947A3
公开(公告)日：2006-10-12
申请号：PCT/US2005001809
申请日：2005-01-20
Applicant: LEXMARK INT INC
Inventor： BELL BYRON V , CORNELL ROBERT W , GUAN YIMIN , PARISH GEORGE K
CPC classification number: B41J2/14129 , B41J2202/03 , Y10T29/49082 , Y10T29/49098 , Y10T29/49099 , Y10T29/49163 , Y10T29/49346 , Y10T29/49401
Abstract: A semiconductor substrate for a micro-fluid ejection head. The substrate includes a plurality of fluid ejection actuators disposed on the substrate. Each of the fluid ejection actuators includes a thin heater stack comprising a thin film heater and one or more protective layers adjacent the heater. The thin film heater is made of a tantalum-aluminum-nitride thin film material having a nano-crystalline structure consisting essentially of A1N, TaN, and TaA1 alloys, and has a sheet resistance ranging from about 30 to about 100 ohms per square. The thin film material contains from about 30 to about 70 atomic% tantalum, from about 10 to about 40 atomic% aluminum and from about 5 to about 30 atomic% nitrogen.
Abstract translation: 一种用于微流体喷射头的半导体衬底。 衬底包括设置在衬底上的多个流体喷射致动器。 每个流体喷射致动器包括薄加热器堆叠，其包括薄膜加热器和与加热器相邻的一个或多个保护层。 薄膜加热器由具有主要由AlN，TaN和TaAl合金组成的纳米晶体结构的钽 - 氮化铝薄膜材料制成，并且具有约30至约100欧姆/平方的薄层电阻。 薄膜材料含有约30至约70原子％的钽，约10至约40原子％的铝和约5至约30原子％的氮。
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公开(公告)号：WO2007005379A3
公开(公告)日：2009-04-16
申请号：PCT/US2006024829
申请日：2006-06-23
Applicant: LEXMARK INT INC , BELL BYRON V , CORNELL ROBERT W , GUAN YIMIN , JOYNER BURTON L
Inventor： BELL BYRON V , CORNELL ROBERT W , GUAN YIMIN , JOYNER BURTON L
IPC: B41J2/05
CPC classification number: B41J2/14129
Abstract: The present disclosure is directed to a micro-fluid ejection head for a microfluid ejection device. The head includes a semiconductor substrate, a fluid ejection actuator supported by the semiconductor substrate, a nozzle member containing nozzle holes attached to the substrate for expelling droplets of fluid from one or more nozzle holes in the nozzle member upon activation of the ejection actuator. The substrate further includes a thermal insulating barrier layer between the semiconductor substrate and the fluid ejection actuator. The thermal insulating barrier layer includes a porous, substantially impermeable material having a thermal conductivity of less than about 1 W/m-K.
Abstract translation: 本公开涉及用于微流体喷射装置的微流体喷射头。 头部包括半导体衬底，由半导体衬底支撑的流体喷射致动器，喷嘴构件，其包含附接到衬底的喷嘴孔，用于在激活喷射致动器时从喷嘴构件中的一个或多个喷嘴孔排出流体液滴。 衬底还包括在半导体衬底和流体喷射致动器之间的绝热阻挡层。 绝热阻隔层包括具有小于约1W / m-K的热导率的多孔的基本上不可渗透的材料。
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公开(公告)号：WO2005021266A2
公开(公告)日：2005-03-10
申请号：PCT/US2004022823
申请日：2004-07-15
Applicant: LEXMARK INT INC
Inventor： ANDERSON FRANK E , BELL BYRON V , COOK PAUL A , CORNELL ROBERT W , PARISH GEORGE K , SULLIVAN CARL E
CPC classification number: B41J2/17556 , B41J2/14129 , B41J2/17506 , B41J2/17513 , B41J2202/03 , B41J2202/13
Abstract: An ink jet printer including a printer cartridge containing a printhead attached to a cartridge carriage for translation of the cartridge across a print media. The printer also includes an off carriage ink supply, a printer microprocessor, and a combined ink fill tube and electrical connection cable connected between the cartridge and the off carriage ink supply for providing refill ink to the ink cartridge and control of the carriage and printhead. Improvements to the printer enable low cost, high quality printing to be achieved.
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