公开(公告)号：CA2323683A1

公开(公告)日：2001-05-30

申请号：CA2323683

申请日：2000-10-18

Applicant: LUCENT TECHNOLOGIES INC

Inventor： BRUCE ALLAN JAMES ,  GLEBOV ALEXEI ,  SHMULOVICH JOSEPH ,  XIE YA-HONG

IPC: G02B6/12 ,  G02B6/122 ,  G02B6/13

Abstract: A process for fabricating a silica-based optical device on a silicon substrate is disclosed. The device has a cladding formed in a silicon substrate. The device also has an active region, and that active region is formed on the cladding. The cladding is fabricated by forming a region of porous silicon in the silicon substrate. The porous silicon is then oxidized and densified. After densification, the active region of the device is formed on the cladding.

公开(公告)号：CA2323683C

公开(公告)日：2006-06-06

申请号：CA2323683

申请日：2000-10-18

Applicant: LUCENT TECHNOLOGIES INC

Inventor： BRUCE ALLAN JAMES ,  SHMULOVICH JOSEPH ,  XIE YA-HONG ,  GLEBOV ALEXEI

IPC: G02B6/13 ,  G02B6/12 ,  G02B6/122

Abstract: A process for fabricating a silica-based optical device on a silicon substra te is disclosed. The device has a cladding formed in a silicon substrate. The devi ce also has an active region, and that active region is formed on the cladding. The cladding is fabricated by forming a region of porous silicon in the silicon substrate . The porous silicon is then oxidized and densified. After densification, the acti ve region of the device is formed on the cladding.