公开(公告)号：JP2000208730A

公开(公告)日：2000-07-28

申请号：JP2000004299

申请日：2000-01-13

Applicant: LUCENT TECHNOLOGIES INC

Inventor： SAMIA CHAADORII ,  SANDER SRINIVASAN CHETTLER ,  NEISU RAYADI ,  ROY PRADIP K ,  HEMU M VAIDEA

IPC: H01L21/02 ,  H01L21/8242 ,  H01L27/108

Abstract: PROBLEM TO BE SOLVED: To provide a capacity of an integrated circuit including a plug having a gradient. SOLUTION: The capacity of an integrated circuit contains a first dielectric substance layer 42 which is arranged adjacent to a substrate 24 and is provided with a groove therein and a metallic plug 32, which includes an upper part extending upward in the groove and a lower part arranged in the first dielectric substance layer 42. The lower part has a width having gradient increasing in the direction of the substrate, thereby fixing the metallic plug 32 in the dielectric substance layer 42. The upper part is preferably provided having a gradient as well. Furthermore, a second dielectric substance layer 38 is adjacent to the metallic plug 32 and is provided with an upper electrode 40 thereon.