公开(公告)号：JP2000208743A

公开(公告)日：2000-07-28

申请号：JP2000006223

申请日：2000-01-12

Applicant: LUCENT TECHNOLOGIES INC

Inventor： ALERS GLENN B ,  SEINGUMUU CHOI ,  MERCHANT SAILESH M ,  ROY PRADIP K

IPC: H01G13/00 ,  H01L21/3205 ,  H01L21/321 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8242 ,  H01L27/04 ,  H01L27/108

Abstract: PROBLEM TO BE SOLVED: To provide a high dielectric constant and quality with less insulation leakage so that reduction of an insulating layer by the metal of an electrode is prevented, by allowing a capacitor to comprise a substantially flat upper side surface, so formed as to be substantially the same plane as adjoining upper side surface part of an insulating layer. SOLUTION: An electrolytic capacitor 24 comprises a substantially flat upper side surface, so formed as to be substantially the same plane with the upper side surface part of an adjoining third insulating (dielectric) layer 42. The end of a lower side metal electrode 44 and that of a capacitor insulating (dielectric) layer 46 are terminated at the upper side surface of a capacitor. The capacitor insulating layer 46 has a permittivity almost equal to 25 or above which attains a desired capacitor characteristics. An upper side electrode comprises a conductive metal layer 48 and a conductive metal layer 50. The conductive metal layer 48 functions as a barrier layer as well, preventing a metal from the metal conductive layer 50, for example, copper from diffusing in the insulating layer 46.