Optical device formed on a substrate with thermal isolation regions formed therein
    1.
    发明公开
    Optical device formed on a substrate with thermal isolation regions formed therein 有权
    Auf einem Substrat mit thermisch isolierenden Bereichen geformte optische Vorrichtung

    公开(公告)号:EP1069455A1

    公开(公告)日:2001-01-17

    申请号:EP00305569.6

    申请日:2000-07-03

    Abstract: An optical device comprising a waveguide with a heating element (25) thereon that is formed on a silicon substrate (20) is disclosed. The waveguide (10) is formed on a region of porous silicon (15) formed in the silicon substrate. The porous silicon region provides greater resistance to the flow of heat than the silicon substrate on which the device is formed. Optionally, the porous silicon region also provides greater resistance to the flow of heat than the waveguide.

    Abstract translation: 公开了一种光学装置,其包括形成在硅衬底(20)上的其上具有加热元件(25)的波导。 波导(10)形成在形成在硅衬底中的多孔硅(15)的区域上。 与其上形成器件的硅衬底相比,多孔硅区提供比热流更大的阻力。 任选地,多孔硅区域还提供比波导更大的热流动阻力。

    Optical time-division-multiplex system
    2.
    发明公开
    Optical time-division-multiplex system 审中-公开
    光时分解复用装置

    公开(公告)号:EP0971500A3

    公开(公告)日:2005-12-07

    申请号:EP99304472.6

    申请日:1999-06-08

    CPC classification number: H04J14/08

    Abstract: In a time-division-multiplex system, a relatively high-rate optical signal stream comprising multiple interleaved signal sequences is applied to one end of an elongated waveguide that includes multiple photodetectors disposed along the longitudinal extent of the waveguide. Probe pulses at a relatively low rate are applied to the other end of the waveguide in a synchronized fashion to cause two-photon non-linear absorption in successive respective photodetectors as each propagating probe pulse overlaps successive different signals of each sequence. In that way, electrical output signals are provided from each photodetector at the relatively low probe-pulse rate.

    A process for fabricating a silica-based optical device on a silicon substrate
    3.
    发明公开
    A process for fabricating a silica-based optical device on a silicon substrate 审中-公开
    一种用于在硅衬底上生产光学氧化物成分的硅处理

    公开(公告)号:EP1107026A2

    公开(公告)日:2001-06-13

    申请号:EP00310296.9

    申请日:2000-11-20

    CPC classification number: G02B6/122 G02B6/13 G02B2006/12061

    Abstract: A process for fabricating a silica-based optical device on a silicon substrate (15) is disclosed. The device has a cladding (12) formed in a silicon substrate. The device also has an active region (10) and that active region is formed on the cladding. The cladding is fabricated by forming a region of porous silicon in the silicon substrate. The porous silicon is then oxidized and densified. After densification, the active region of the device is formed on the cladding.

    Abstract translation: 一种用于在硅衬底上的二氧化硅系的光学装置的制造过程(15)是圆盘游离缺失。 该装置具有在硅衬底中形成的包层(12)。 因此,该装置具有以有源区(10)和没有有源区上包层形成。 包层是通过在硅衬底上形成多孔硅的区域制成。 然后在多孔硅氧化和致密化。 致密化后,将器件的有源区中形成上包层。

    Article comprising a planar optical waveguide amplifier, and method of making same
    4.
    发明公开
    Article comprising a planar optical waveguide amplifier, and method of making same 无效
    Vorrichtung mit planarem optischenWellenleiterverstärkerund dessen Herstellungsverfahren

    公开(公告)号:EP1030413A1

    公开(公告)日:2000-08-23

    申请号:EP00301026.1

    申请日:2000-02-09

    Abstract: In a planar optical waveguide amplifier according to our invention, a first and a second planar waveguide are in contact with each other, with the second planar waveguide comprising a rare earth doped planar waveguide. The second planar waveguide is tapered to facilitate substantially adiabatic coupling of electromagnetic radiation of a first wavelength, e.g., signal radiation of about 1.5µm, from the first planar waveguide to the second planar waveguide. Adiabatic coupling of pump radiation from the first to the second planar waveguide is also contemplated. The tapers typically have 100:1 or more length-to-thickness ratio. The planar optical waveguide amplifier is advantageously used in optical waveguide communication systems.

    Abstract translation: 在根据本发明的平面光波导放大器中,第一和第二平面波导彼此接触,第二平面波导包括稀土掺杂的平面波导。 第二平面波导是锥形的,以促进第一波长的电磁辐射(例如约1.5μm的信号辐射)从第一平面波导到第二平面波导的绝热耦合。 也考虑了从第一平面波导到第二平面波导的泵浦辐射的绝热耦合。 锥度通常具有100:1或更长的长度与厚度之比。 平面光波导放大器有利地用于光波导通信系统中。

    Method of making semiconductor devices by patterning a wafer having a non-planar surface
    5.
    发明公开
    Method of making semiconductor devices by patterning a wafer having a non-planar surface 失效
    一种用于通过与非平面表面的磁盘上施加图案制造半导体器件过程

    公开(公告)号:EP0803905A2

    公开(公告)日:1997-10-29

    申请号:EP97302564.6

    申请日:1997-04-15

    CPC classification number: H01L21/76838 H01L21/02164 H01L21/0273 H01L21/312

    Abstract: In accordance with a specific deposition/etching sequence, a multi-layer metallization system is formed on the non-planar top surface of a semiconductor wafer. In an electrophoretic deposition step, a conformal uniform-thickness layer of a resist material is then formed on the top surface of the metallization system. In turn, the layer of resist material is lithographically patterned to provide an etch-mask for defining features in the underlying metallization system.

    Abstract translation: 在与特定的沉积/蚀刻序列雅舞蹈,多层金属化系统,形成在半导体晶片的非平面顶表面上。 在电泳沉积步骤中,抗蚀剂材料的共形均匀厚度的层之后,形成该金属化系统的顶表面上。接着,抗蚀剂材料的层被光刻图案化,以提供蚀刻掩模限定在特征 下面的金属化系统。

    Optical time-division-multiplex system
    6.
    发明公开
    Optical time-division-multiplex system 审中-公开
    Optische Zeitmultiplexvorrichtung

    公开(公告)号:EP0971500A2

    公开(公告)日:2000-01-12

    申请号:EP99304472.6

    申请日:1999-06-08

    CPC classification number: H04J14/08

    Abstract: In a time-division-multiplex system, a relatively high-rate optical signal stream comprising multiple interleaved signal sequences is applied to one end of an elongated waveguide that includes multiple photodetectors disposed along the longitudinal extent of the waveguide. Probe pulses at a relatively low rate are applied to the other end of the waveguide in a synchronized fashion to cause two-photon non-linear absorption in successive respective photodetectors as each propagating probe pulse overlaps successive different signals of each sequence. In that way, electrical output signals are provided from each photodetector at the relatively low probe-pulse rate.

    Abstract translation: 在时分复用系统中,将包括多个交错信号序列的相对高速率的光信号流施加到细长波导的一端,该波长包括沿着波导的纵向延伸部布置的多个光电探测器。 以相对较低的速率的探针脉冲以同步方式施加到波导的另一端,以在连续的各个光电检测器中引起双光子非线性吸收,因为每个传播的探针脉冲与每个序列的连续的不同信号重叠。 以这种方式,以相对低的探针脉冲速率从每个光电检测器提供电输出信号。

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