公开(公告)号：WO2009065740A1

公开(公告)日：2009-05-28

申请号：PCT/EP2008/065082

申请日：2008-11-06

Applicant: LAMBDA-X ,  BEGHUIN, Didier ,  JOANNES, Didier

Inventor： BEGHUIN, Didier ,  JOANNES, Didier

IPC: G01N21/956 ,  G01B11/25 ,  G01M11/02

CPC classification number: G01N21/95623 ,  G01B11/25 ,  G01M11/0264 ,  G01M11/0278

Abstract: The present invention relates to a Fourier transform deflectometry system (1) and method for the optical inspection of a phase and amplitude object (2) placed in an optical path between a grating (3) and an imaging system (4), at a distance h of said grating 3. The grating (3) forms a contrast-based periodic pattern with spatial frequencies μ 0 , v 0 in, respectively, orthogonal axes x,y in an image plane, and the imaging system (4) comprises an objective (5) and an imaging sensor (6) comprising a plurality of photosensitive elements. Spatial frequencies μ 0 , v 0 are equal or lower than the Nyquist frequencies of the imaging system in the respective x and y axes. According to the method of the invention, a first image of said pattern, distorted by the phase and amplitude object (2), is first captured through the objective (5) by the imaging sensor (6). Then, a Fourier transform of said first image in a spatial frequency domain is calculated, at least one first- or higher-order spectrum of said Fourier transform is selected and shifted in said frequency domain, so as to substantially place it at a central frequency of said Fourier transform, and a reverse Fourier transform of said at least one shifted first- or higher-order spectrum of said Fourier transform is performed so as to obtain a complex function g(x,y)=l(x,y)eiφ(x,y), wherein l(x,y) is an intensity and φ(x,y) a phase linked to optical deflection angles θ x , θ y in, respectively, the directions of the x and y axes, in the following form: φ(x,y)=- 2ττh(μ 0 tanθ x +v 0 tanθ y ).

Abstract translation: 本发明涉及一种傅里叶变换偏转测量系统（1）和方法，用于对放置在光栅（3）和成像系统（4）之间的光路中的相位和幅度对象（2）进行光学检测， 光栅（3）在图像平面中分别形成空间频率μ0，v0 in的正交轴x，y的基于对比度的周期性图案，并且成像系统（4）包括物镜（5） ）和包括多个感光元件的成像传感器（6）。 空间频率μ0，v0等于或低于成像系统在相应x和y轴上的奈奎斯特频率。 根据本发明的方法，通过成像传感器（6）首先通过物镜（5）捕获由相位和幅度物体（2）失真的所述图案的第一图像。 然后，计算空间频域中的所述第一图像的傅里叶变换，选择所述傅立叶变换的至少一个第一或更高阶频谱，并在所述频域中移位，以便基本上将其置于中心频率 并且执行所述傅里叶变换的所述至少一个移位的第一或更高阶光谱的逆傅立叶变换，以便获得复函数g（x，y）= 1（x，y）eif （x，y），其中l（x，y）是强度，f（x，y）分别与光偏转角θx，θyin相关联的x和y轴方向的相位， 以下形式：f（x，y）= - 2tth（μ0tan？x + v0tan？y）。

公开(公告)号：WO2014114768A1

公开(公告)日：2014-07-31

申请号：PCT/EP2014/051438

申请日：2014-01-24

Applicant: LAMBDA-X

Inventor： BEGHUIN, Didier

IPC: G01J3/453 ,  G01J3/02

CPC classification number: G01J3/2823 ,  G01J3/0208 ,  G01J3/0224 ,  G01J3/45 ,  G01J3/4537

Abstract: Described herein is a hyperspectral imaging system (500) in which a polarising beam splitter (510), a Wollaston prism (520), an optical system (530), and a plane mirror (540) are arranged on an optical axis (550) of the imaging system (500). An imaging detector (560) is provided on which radiation is focussed by an imaging lens (570). The Wollaston prism (520) is imaged on itself by the optical system (530) and the plane mirror (540) so that translation of the Wollaston prism (520) in a direction parallel to a virtual split plane of the prism effectively provides an optical path length difference that is the same for all points in the object field.

Abstract translation: 这里描述的是在光轴（550）上布置偏振分束器（510），渥拉斯顿棱镜（520），光学系统（530）和平面镜（540）的高光谱成像系统（500） 的成像系统（500）。 提供了一种成像检测器（560），辐射被成像透镜（570）聚焦在该成像检测器上。 Wollaston棱镜（520）通过光学系统（530）和平面镜（540）在其自身上成像，使得Wollaston棱镜（520）在平行于棱镜的虚拟剖面的方向上的平移有效地提供光学 对象字段中所有点的路径长度差是相同的。

公开(公告)号：EP2948745A1

公开(公告)日：2015-12-02

申请号：EP14701529.1

申请日：2014-01-24

Applicant: Lambda-X

Inventor： BEGHUIN, Didier

IPC: G01J3/453 ,  G01J3/02

CPC classification number: G01J3/2823 ,  G01J3/0208 ,  G01J3/0224 ,  G01J3/45 ,  G01J3/4537

Abstract: Described herein is a hyperspectral imaging system (500) in which a polarising beam splitter (510), a Wollaston prism (520), an optical system (530), and a plane mirror (540) are arranged on an optical axis (550) of the imaging system (500). An imaging detector (560) is provided on which radiation is focussed by an imaging lens (570). The Wollaston prism (520) is imaged on itself by the optical system (530) and the plane mirror (540) so that translation of the Wollaston prism (520) in a direction parallel to a virtual split plane of the prism effectively provides an optical path length difference that is the same for all points in the object field.

Abstract translation: 这里描述的是一种超光谱成像系统，其中偏振分束器，沃拉斯顿棱镜，光学系统和平面镜被布置在成像系统的光轴上。 提供了一种成像检测器，辐射由成像透镜聚焦在该成像检测器上。 Wollaston棱镜通过光学系统和平面镜自身成像，使得Wollaston棱镜在平行于棱镜的虚拟剖面的方向上的平移有效地提供了光路长度差异，其对于 对象字段。

公开(公告)号：EP2212681B1

公开(公告)日：2013-12-25

申请号：EP08852427.7

申请日：2008-11-06

Applicant: Lambda-X

Inventor： BEGHUIN, Didier ,  JOANNES, Luc

IPC: G01N21/956 ,  G01B11/25 ,  G01M11/02

CPC classification number: G01N21/95623 ,  G01B11/25 ,  G01M11/0264 ,  G01M11/0278

Abstract: The present invention relates to a Fourier transform deflectometry system 1 and method for the optical inspection of a phase and amplitude object 2 placed in an optical path between a grating 3 and an imaging system 4, at a distance h of said grating 3. The grating 3 forms a contrast-based periodic pattern with spatial frequencies µ 0 , v 0 in, respectively, orthogonal axes x,y in an image plane, and the imaging system 4 comprises an objective 5 and an imaging sensor 6 comprising a plurality of photosensitive elements. According to the method of the invention, a first image of said pattern, distorted by the phase and amplitude object 2, is first captured through the objective 5 by the imaging sensor 6. Then, a Fourier transform of said first image in a spatial frequency domain is calculated, at least one first- or higher-order spectrum of said Fourier transform is selected and shifted in said frequency domain, so as to substantially place it at a central frequency of said Fourier transform, and a reverse Fourier transform of said at least one shifted first- or higher-order spectrum of said Fourier transform is performed so as to obtain a complex function g(x,y)=I(x,y)e iÕp(x,y) , wherein I(x,y) is an intensity and Õ(x,y) a phase linked to optical deflection angles ¸ x , ¸ y in, respectively, the directions of the x and y axes, in the following form: Õ(x,y)=-2Àh(µ 0 tan¸ x +v 0 tan¸ y ).

Abstract translation: 本发明涉及一种傅里叶变换折射系统1和方法，用于光栅3和成像系统4之间的光路中放置的相位和幅度物体2的光学检查，光栅3的距离为h。光栅 3在图像平面中分别形成具有空间频率μ0，v 0正交轴x，y的基于对比度的周期性图案，并且成像系统4包括物镜5和成像传感器6，成像传感器6包括多个光敏元件 。 根据本发明的方法，首先通过成像传感器6通过物镜5捕获由相位和幅度物体2失真的所述图案的第一图像。然后，以空间频率对所述第一图像进行傅里叶变换 计算所述傅立叶变换的至少一个一阶或更高阶谱，并且在所述频域中移动所述傅立叶变换的至少一个一阶或更高阶谱，以便将其基本上置于所述傅立叶变换的中心频率处，并且所述傅里叶变换的傅立叶逆变换 （x，y）= I（x，y），其中I（x，y）= I ）是一个强度和Õ（x，y）a相，它们分别与x和y轴方向上的光学偏转角x，y y相关联，形式如下：Õ（x，y）= - 2 - h （μ0 tan？x + v 0 tan？y）。

公开(公告)号：EP2948745B1

公开(公告)日：2016-05-04

申请号：EP14701529.1

申请日：2014-01-24

Applicant: Lambda-X

Inventor： BEGHUIN, Didier

IPC: G01J3/28 ,  G01J3/453 ,  G01J3/02

CPC classification number: G01J3/2823 ,  G01J3/0208 ,  G01J3/0224 ,  G01J3/45 ,  G01J3/4537

公开(公告)号：EP3959508A1

公开(公告)日：2022-03-02

申请号：EP20720073.4

申请日：2020-04-24

Applicant: Lambda-X

Inventor： ANTOINE, Philippe ,  BEGHUIN, Didier ,  JOANNES, Luc

IPC: G01N21/45 ,  G02B27/54 ,  G01M11/02

公开(公告)号：EP2212681A1

公开(公告)日：2010-08-04

申请号：EP08852427.7

申请日：2008-11-06

Applicant: Lambda-X

Inventor： BEGHUIN, Didier ,  JOANNES, Luc

IPC: G01N21/956 ,  G01B11/25 ,  G01M11/02

CPC classification number: G01N21/95623 ,  G01B11/25 ,  G01M11/0264 ,  G01M11/0278

Abstract: The present invention relates to a Fourier transform deflectometry system (1) and method for the optical inspection of a phase and amplitude object (2) placed in an optical path between a grating (3) and an imaging system (4), at a distance h of said grating 3. The grating (3) forms a contrast-based periodic pattern with spatial frequencies μ0, v0 in, respectively, orthogonal axes x,y in an image plane, and the imaging system (4) comprises an objective (5) and an imaging sensor (6) comprising a plurality of photosensitive elements. Spatial frequencies μ0, v0 are equal or lower than the Nyquist frequencies of the imaging system in the respective x and y axes. According to the method of the invention, a first image of said pattern, distorted by the phase and amplitude object (2), is first captured through the objective (5) by the imaging sensor (6). Then, a Fourier transform of said first image in a spatial frequency domain is calculated, at least one first- or higher-order spectrum of said Fourier transform is selected and shifted in said frequency domain, so as to substantially place it at a central frequency of said Fourier transform, and a reverse Fourier transform of said at least one shifted first- or higher-order spectrum of said Fourier transform is performed so as to obtain a complex function g(x,y)=l(x,y)eiφ(x,y), wherein l(x,y) is an intensity and φ(x,y) a phase linked to optical deflection angles ϑx, ϑy in, respectively, the directions of the x and y axes, in the following form: φ(x,y)=- 2ττh(μ0tanϑx+v0tanϑy).

Abstract translation: 本发明涉及一种傅里叶变换折射系统（1）和用于光学检查放置在光栅（3）和成像系统（4）之间的光路中的相位和振幅物体（2）的方法， 所述光栅3形成基于对比度的周期性图案，所述周期性图案分别在图像平面中具有正交轴x，y，并且所述成像系统（4）包括物镜（5） ）和包括多个光敏元件的成像传感器（6）。 空间频率μ0，v0等于或低于成像系统在各个x轴和y轴上的奈奎斯特频率。 根据本发明的方法，首先通过成像传感器（6）通过物镜（5）捕获由相位和幅度物体（2）失真的所述图案的第一图像。 然后，计算空间频率域中的所述第一图像的傅里叶变换，选择所述傅立叶变换的至少一个一阶或更高阶谱并在所述频域中移位，从而基本上将其置于中心频率 并且对所述傅立叶变换的所述至少一个移位的一阶或更高阶谱进行傅里叶逆变换以便获得复函数g（x，y）= 1（x，y）eiφ （x，y），其中l（x，y）是分别与x和y轴的方向相关联的光学偏转角度θx，θv，y的强度和φ（x，y） 以下面的形式：φ（x，y）=-2ττh（μ0tan＆thetav; x + v0tan＆thetav; y）。