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公开(公告)号：SE324186B
公开(公告)日：1970-05-25
申请号：SE397467
申请日：1967-03-21
Applicant: MATSUSHITA ELECTRONICS CORP
IPC: H01L21/306 , C23F1/02 , H01L21/00 , H01L21/033 , H01L21/316 , H01L23/29 , H01L7/50
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