公开(公告)号：FR2849217A1

公开(公告)日：2004-06-25

申请号：FR0216499

申请日：2002-12-23

Applicant: MEMSCAP

Inventor： KHALIL DIAA ,  BASHIR AYMEN H ,  OSMAN AHMED H ,  KATILA PEKKA ,  EISSA MORSHED AHMED H ,  SAADANY BASSAM

IPC: G02B6/26 ,  G02B26/02 ,  B81B7/02 ,  G02B6/35

Abstract: The variable optical attenuator (1) is based on micro mechanical structures and has two moving walls (5,6) between optical fibres (3,4). The wall stops (7,8) are sloped with respect to the movement direction so as to form a V notch when approaching the optical fibres.

公开(公告)号：FR2841995A1

公开(公告)日：2004-01-09

申请号：FR0208373

申请日：2002-07-04

Applicant: MEMSCAP

Inventor： DEHAN CHRISTOPHE ,  KATILA PEKKA ,  HELIN PHILIPPE

IPC: G02B6/26 ,  G02B26/02 ,  B81B7/02 ,  G02B6/35

Abstract: The variable optical attenuator (1) comprises a microelectromechanical structure implemented on a substrate (2), including at least one shutter (31,33,34) whose position can be varied by an actuator with a mobile part (10) combined with the shutters in the form of beams with notches so that the shutter (31) interacts with a light beam (6) propagating from an input optical fibre (3) towards an output optical fibre (4). The mobile part (10) of the actuator can be displaced rotationally around an axis (11) perpendicular to the plane of the substrate, and the axis (11) is also an axis of rotational symmetry of the mobile part. The shutters are laid out in the thickness of the mobile part so to interact with the light beam (6) which propagates substantially in parallel with the rotational axis of the mobile part. The mobile part (10) of the actuator comprises several, in particular 3, zones (27) which cooperate with complementary zones (28) stationary with respect to the substrate, and the zones are distributed in angle around the rotational axis (11). In particular, the zones (27) are of electrostatic combs matching complementary combs of the stationary zones (28). The mobile part (10) is linked to a fixed central platform (24) situated at the center of gravity of the mobile part, and an application of a polarization voltage to the pairs of combs (27,28) causes a rotational motion including slight bending of beams (23) so that the shutter (31) intercepts the light beam (6) at the level of angular notch section. The middle beams (23) joined to the central platform (24) also serve to return the mobile part to its stationary position. The attenuator (claimed) functions by transmission, or by reflection when the shutter (31) comprises a reflecting part.

公开(公告)号：FR2839060A3

公开(公告)日：2003-10-31

申请号：FR0205455

申请日：2002-04-30

Applicant: MEMSCAP

Inventor： KATILA PEKKA

IPC: B81B3/00 ,  B81B7/02 ,  G02B6/26 ,  G02B6/35 ,  G02B26/02

Abstract: The variable optical attenuator (1) comprises the micro-electro-mechanical (MEM) structures implemented on a substrate (9) including the input and output channels (2,3) aligned along an axis (7) and designed to receive the input and output optical fibres (4,5), respectively, and a shutter (10) which can be translated in a controlled manner in a space between the input and output channels (2,3) perpendicular to the axis (7) by an actuator (6) constituted of two matching combs (13,14). The face (20) of the shutter (10) on the side of the input channel has an inclination of about 45 degrees with respect to the direction of displacement of the shutter along its beam (11) axis (15). The two faces (20,21) of the shutter (10) situated on the sides of the input and output channels (2,3), respectively, have non-null inclinations with respect to the direction of displacement of the shutter, the two faces are symmetric with respect to the axis of displacement, and the inclination is preferentially about 45 degrees. The input light beam (30) from the core (8) of the input fibre (4) reaches the shutter (10), but only a light beam fraction (31) reaches the output fibre (5). The other light beam fraction (32) is reflected from the face (20) of the shutter and is propagated outside the space between the channels (2,3).

公开(公告)号：FR2837578A3

公开(公告)日：2003-09-26

申请号：FR0203441

申请日：2002-03-20

Applicant: MEMSCAP

Inventor： KATILA PEKKA ,  KHALIL DIAA ,  SAADANY BASSAM ,  BASHIR AYMEN

IPC: G02B6/26 ,  G02B26/02 ,  B81B7/02 ,  H04B10/12

Abstract: The attenuator is designed to be connected to input and output optical fibres (8,9), respectively, and comprises an integrated optical component (2) which includes input and output waveguides (11,12) to which the input and output optical fibres (8,9) are connected by the intermediary of interface ports (6,7), respectively, a micro-electromechanical component (3) including an input waveguide (11) for transmitting all or a part of it to the output waveguide (12), and a collimator (4) with lenses (15,16,17). The integrated optical component (2) also comprises a coupling device in the form of two proximal sections (24,26) of waveguides which allows to direct a fraction of the signal passing in the output waveguide (12) to a detector (30) mounted on or in the microelectromechanical component (3). The detector is associated with a system for controlling the displacement of the mobile structure by an actuator (23). The rate of coupling between the output waveguide (12) and a supplementary waveguide (25) is about 1-5%. The extremity of the supplementary waveguide (25) ends in a supplementary interface port (19) which is positioned with respect to the detector (30). A matrix of optical attenuators is claimed and is in the form of an association of attenuators wherein the integrated optical components of each attenuator form a part of a global integrated optical component, and the microelectromechanical components of each attenuator form a part of a global microelectromechanical component.

公开(公告)号：FR2835929A1

公开(公告)日：2003-08-15

申请号：FR0201833

申请日：2002-02-14

Applicant: MEMSCAP

Inventor： KATILA PEKKA

IPC: G02B6/26 ,  G02B6/35 ,  G02B26/02

Abstract: The variable optical attenuator has two channels (2,3) with a fibre optic input (4) and output (5). There is a moving structure with a face (13) facing a reflecting channel. Part of the light energy from the input is reflected towards the output. A driver (9) moves a moving structure (6) progressively. A portion (12) of the reflecting surface has a curvature in the input/output plane.