OPTICAL SWITCHING MATRIX AND ITS MANUFACTURING METHOD

    公开(公告)号:JP2004004713A

    公开(公告)日:2004-01-08

    申请号:JP2003100764

    申请日:2003-04-03

    Applicant: MEMSCAP

    Abstract: PROBLEM TO BE SOLVED: To provide an optical switching matrix in which the insertion loss with respect to a propagating beam is reduced. SOLUTION: The optical switching matrix includes at least one set of input optical fibers (12) and at least one set of output optical fibers (14), which are arranged so as to be perpendicular each other, a set of movable mirrors (5, 13), which are arranged at the cross points of the directions defined by a plurality of optical fibers, and a set of channels and a set of channels formed between the mirrors. Another set of mirrors are formed on a first wafer (2); the first wafer is covered with a second wafer (21); a plurality of channels (38) are formed between protruded parts (34) under the second substrate wafer; and the protruded parts are provided with housings (33), in which the movable mirrors can be moved. COPYRIGHT: (C)2004,JPO

    Variable optical attenuator and a matrix of such attenuators, comprises a mobile structure and a coupling device linked to a detector for a higher precision control

    公开(公告)号:FR2837578A3

    公开(公告)日:2003-09-26

    申请号:FR0203441

    申请日:2002-03-20

    Applicant: MEMSCAP

    Abstract: The attenuator is designed to be connected to input and output optical fibres (8,9), respectively, and comprises an integrated optical component (2) which includes input and output waveguides (11,12) to which the input and output optical fibres (8,9) are connected by the intermediary of interface ports (6,7), respectively, a micro-electromechanical component (3) including an input waveguide (11) for transmitting all or a part of it to the output waveguide (12), and a collimator (4) with lenses (15,16,17). The integrated optical component (2) also comprises a coupling device in the form of two proximal sections (24,26) of waveguides which allows to direct a fraction of the signal passing in the output waveguide (12) to a detector (30) mounted on or in the microelectromechanical component (3). The detector is associated with a system for controlling the displacement of the mobile structure by an actuator (23). The rate of coupling between the output waveguide (12) and a supplementary waveguide (25) is about 1-5%. The extremity of the supplementary waveguide (25) ends in a supplementary interface port (19) which is positioned with respect to the detector (30). A matrix of optical attenuators is claimed and is in the form of an association of attenuators wherein the integrated optical components of each attenuator form a part of a global integrated optical component, and the microelectromechanical components of each attenuator form a part of a global microelectromechanical component.

    Matrix of optical switches
    4.
    发明专利

    公开(公告)号:FR2838527A1

    公开(公告)日:2003-10-17

    申请号:FR0204514

    申请日:2002-04-11

    Applicant: MEMSCAP

    Abstract: The matrix comprises a set of cells each having a reflecting structure (12,14) so that it can reflect a beam issued from one side (20) of the matrix in the direction of an adjacent side. The reflecting structures have different orientations within the matrix, and each reflecting structure is orientated in parallel to the bisector (11) of a corner (16) of the matrix nearer the relevant mirror. The matrix is designed to accommodate a set of input fibres and a set of output fibres, for functioning as an optical mixer, that is an optical cross connect (OXC). The matrix is designed so to accommodate two sets of input fibres and two sets of output fibres, for functioning as an extraction/insertion multiplexer, that is an odd-drop multiplexer (ADM). The matrix comprises four rows and four columns, and 16 differently orientated mirrors in groups. The four mirrors situated near the corner (16) are parallel to the bisector (11), and the orientations of other mirrors are determined with respect to the bisectors of other corners, that is the common bisector (11) of corners (16,17) and the common bisector (12) of corners (18,19). Two input fibres (E1, E2) are placed on the side (20) and the other two input fibres (E3, E4) are placed on the opposite side (21). Two output fibres (S1, S2) are placed on the side (22), and the other two output fibres (S3, S4) are placed on the opposite side. The matrix has a symmetry with respect to the midpoint (25). In the case of a beam (28) the optical path is substantially equal to 3 times the step (p) of each cell, and for a beam (29) it is substantially equal to 5 times the step (p). The difference between the maximum and the minimum optical paths is 2 times the step, compared to the value of 6 for the prior art matrix.

    MATRICE DE COMMUTATEURS OPTIQUES ET PROCEDE DE FABRICATION D'UNE TELLE MATRICE

    公开(公告)号:CA2423210A1

    公开(公告)日:2003-10-11

    申请号:CA2423210

    申请日:2003-03-20

    Applicant: MEMSCAP

    Abstract: Matrice de commutateurs optiques, réalisée à partir d'un substrat à base de matériau semi-conducteur ou diélectrique, comportant : - au moins un ensemble de fibres optiques d'entrée (12) et au moins un ensemble de fibres optiques de sortie (14) orientés sensiblement perpendiculairement l'un par rapport à l'autre, - un ensemble de miroirs mobiles (5,13) disposés aux intersections des directions définies par les différentes fibres optiques, chaque miroir (13) étant apte à se déplacer pour assurer la réflexion d'un faisceau issu d'une fibre optique d'entrée à destination d'une fibre optique de sortie, - un ensemble de canaux définis entre les miroirs, et à l'intérieur desquels se propagent les différents faisceaux avant et après avoir rencontré les miroirs, caractérisée en ce que : - l'ensemble de miroirs est réalisé sur une première galette de substrat (2), ladite première galette étant recouverte d'une seconde galette de substrat (20), - les différents canaux (38) sont formés entre des zones en excroissance (34) présentes sous la seconde galette de substrat, lesdites zones en excroissance comportant des logements (33) à l'intérieur desquels peuvent se déplacer les miroirs mobiles.

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