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公开(公告)号:CA2359710A1
公开(公告)日:2000-07-20
申请号:CA2359710
申请日:2000-01-12
Applicant: MICROCOATING TECHNOLOGIES INC
Inventor: HWANG TZYY-JIUAN JAN , SHOUP SHARA S , LIN WEN-YI , DESHPANDE GIRISH , COUSINS DONALD H , HUNT ANDREW T
IPC: C30B29/22 , B01D71/02 , H01B20060101 , H01B1/00 , H01G4/06 , H01G4/33 , H01L21/20 , H01L39/24 , H01L49/02 , H01M8/02
Abstract: Epitaxial thin films for use as buffer layers for high temperature superconductors, electrolytes in solid oxide fuel cells (SOFC), gas separati on membranes or dielectric material in electronic devices, are disclosed. By using CCVD, CACVD or any other suitable deposition process, epitaxial films having pore-free, ideal grain boundaries, and dense structure can be formed. Several different types of materials are disclosed for use as buffer layers in high temperature superconductors. In addition, the use of epitaxial thin fil ms for electrolytes and electrode formation in SOFCs results in densification f or pore-free and ideal grain boundary/interface microstructure. Gas separation membranes for the production of oxygen and hydrogen are also disclosed. Thes e semipermeable membranes are formed by high-quality, dense, gas-tight, pinhol e free sub-micro scale layers of mixed-conducting oxides on porous ceramic substrates. Epitaxial thin films as dielectric material in capacitors are al so taught herein. Capacitors are utilized according to their capacitance values which are dependent on their physical structure and dielectric permittivity. The epitaxial thin films of the current invention form low-loss dielectric layers with extremely high permittivity. This high permittivity allows for t he formation of capacitors that can have their capacitance adjusted by applying a DC bias between their electrodes.
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公开(公告)号:AU774828B2
公开(公告)日:2004-07-08
申请号:AU4165600
申请日:2000-01-12
Applicant: MICROCOATING TECHNOLOGIES INC
Inventor: HUNT ANDREW T , DESHPANDE GIRISH , COUSINS DONALD , HWANG TZYY-JIUAN JAN , LIN WEN-YI , SHOUP SHARA S
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公开(公告)号:CA2359710C
公开(公告)日:2008-09-02
申请号:CA2359710
申请日:2000-01-12
Applicant: MICROCOATING TECHNOLOGIES INC
Inventor: HWANG TZYY-JIUAN JAN , DESHPANDE GIRISH , HUNT ANDREW T , COUSINS DONALD H , LIN WEN-YI , SHOUP SHARA S
IPC: C30B29/22 , H01L49/02 , B01D71/02 , C30B29/32 , H01B20060101 , H01B1/00 , H01G4/06 , H01G4/33 , H01L21/20 , H01L39/24 , H01M8/02 , H01M8/10
Abstract: Epitaxial thin films for use as buffer layers for high temperature superconductors, electrolytes in solid oxide fuel cells (SOFC), gas separation membranes or dielectric material in electronic devices, are disclosed. By using CCVD, CACVD or any other suitable deposition process, epitaxial films having pore-free, ideal grain boundaries, and dense structure can be formed. Several different types of materials are disclosed for use as buffer layers in high temperature superconductors. In addition, the use of epitaxial thin films for electrolytes and electrode formation in SOFCs results in densification for pore-free and ideal grain boundary/interface microstructure. Gas separation membranes for the production of oxygen and hydrogen are also disclosed. These semipermeable membranes are formed by high-quality, dense, gas-tight, pinhole free sub-micro scale layers of mixed-conducting oxides on porous ceramic substrates. Epitaxial thin films as dielectric material in capacitors are also taught herein. Capacitors are utilized according to their capacitance values which are dependent on their physical structure and dielectric permittivity. The epitaxial thin films of the current invention form low-loss dielectric layers with extremely high permittivity. This high permittivity allows for the formation of capacitors that can have their capacitance adjusted by applying a DC bias between their electrodes.
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公开(公告)号:IL156217A
公开(公告)日:2004-12-15
申请号:IL15621799
申请日:1999-04-18
Applicant: MORTON INT INC , MICROCOATING TECHNOLOGIES INC
Inventor: HUNT ANDREW T , HWANG TZYY JIUAN , HONG SHAO , THOMAS JOE , LIN WEN-YI , SHOUP SHARA S , LUTEN HENRY A , MCENTYRE JOHN ERIC , CARPENTER RICHARD W , BOTTOMLEY STEPHEN E , HENDRIK MICHELLE
IPC: C23C20060101 , C23C16/40 , H01L1/20
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公开(公告)号:IL129493A
公开(公告)日:2004-12-15
申请号:IL12949399
申请日:1999-04-18
Applicant: MORTON INT INC , MICROCOATING TECHNOLOGIES INC
Inventor: HUNT ANDREW T , HWANG TZYY JIUAN , HONG SHAO , THOMAS JOE , LIN WEN-YI , SHOUP SHARA S , LUTTEN HENRY A , MCENTYRE JOHN ERIC , CARPENTER RICHARD W , BOTTOMLEY STEPHEN E , HENDRICK MICHELLE
IPC: C23C16/40 , C23C16/453 , H01C7/00 , H01C17/20 , H01C17/24 , H01L21/02 , H05K1/16 , H05K3/06 , H01L1/102
Abstract: The invention is directed to thin film resistors which may be embedded in multi-layer printed circuit boards. The invention is also directed to structures for forming such thin film resistors and to methods for forming such structures, including the use of combustion chemical vapor deposition. The invention is also directed to chemical precursor solutions by which resistive materials can be deposited on a substrate by combustion chemical vapor deposition techniques.
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公开(公告)号:CA2267492C
公开(公告)日:2003-09-23
申请号:CA2267492
申请日:1999-03-29
Applicant: MORTON INT INC , MICROCOATING TECHNOLOGIES INC
Inventor: LIN WEN-YI , SHOUP SHARA S , THOMAS JOE , HENDRICK MICHELLE , HUNT ANDREW T , HWANG TZYY JIUAN , SHAO HONG , LUTEN HENRY A , BOTTOMLEY STEPHEN E , CARPENTER RICHARD W , MCENTYRE JOHN ERIC
IPC: C23C16/40 , C23C16/453 , H01C7/00 , H01C17/20 , H01C17/24 , H01L21/02 , H05K1/16 , H05K3/06 , H01C17/075
Abstract: The invention is directed to thin film resistors which may be embedded in multi-layer printed circuit boards. The invention is also directed to structures for forming such thin film resistors and to methods for forming such structures, including the use of combustion chemical vapor deposition. The invention is also directed to chemical precursor solutions by which resistive materials can be deposited on a substrate by combustion chemical vapor deposition techniques.
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公开(公告)号:BR9901357A
公开(公告)日:2001-03-20
申请号:BR9901357
申请日:1999-04-28
Applicant: MORTON INT INC , MICROCOATING TECHNOLOGIES INC
Inventor: HUNT ANDREW T , HWANG TZYY JIUAN , SHAO HONG , THOMAS JOE , LIN WEN-YI , SHOUP SHARA S , LUTEN HENRY A , MCENTYRE JOHN ERIC , CARPENTER RICHARD W , BOTTOMLEY STEPHEN E , HENDRICK MICHELLE
IPC: C23C16/40 , C23C16/453 , H01C7/00 , H01C17/20 , H01C17/24 , H01L21/02 , H05K1/16 , H05K3/06 , H01C17/14 , C23C16/00
Abstract: The invention is directed to thin film resistors which may be embedded in multi-layer printed circuit boards. The invention is also directed to structures for forming such thin film resistors and to methods for forming such structures, including the use of combustion chemical vapor deposition. The invention is also directed to chemical precursor solutions by which resistive materials can be deposited on a substrate by combustion chemical vapor deposition techniques.
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公开(公告)号:SG68713A1
公开(公告)日:1999-11-16
申请号:SG1999001670
申请日:1999-04-14
Applicant: MICROCOATING TECHNOLOGIES INC , MORTON INT INC
Inventor: HUNT ANDREW T , HWANG TZYY JIUAN , SHAO HONG , THOMAS JOE , LIN WEN-YI , SHOUP SHARA S , LUTEN HENRY A , MCENTRYRE JOHN ERIC , CARPENTER RICHARD W , BOTTOMLEY STEPHEN E , HENDRICK MICHELLE
IPC: C23C16/40 , C23C16/453 , H01C7/00 , H01C17/20 , H01C17/24 , H01L21/02 , H05K1/16 , H05K3/06 , H01L49/02 , H01C1/012
Abstract: The invention is directed to thin film resistors which may be embedded in multi-layer printed circuit boards. The invention is also directed to structures for forming such thin film resistors and to methods for forming such structures, including the use of combustion chemical vapor deposition. The invention is also directed to chemical precursor solutions by which resistive materials can be deposited on a substrate by combustion chemical vapor deposition techniques.
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公开(公告)号:WO0042621A2
公开(公告)日:2000-07-20
申请号:PCT/US0000824
申请日:2000-01-12
Applicant: MICROCOATING TECHNOLOGIES INC , HUNT ANDREW T , DESHPANDE GIRISH , COUSINS DONALD , HWANG TZYY JIUAN JAN , LIN WEN YI , SHOUP SHARA S
Inventor: HUNT ANDREW T , DESHPANDE GIRISH , COUSINS DONALD , HWANG TZYY-JIUAN JAN , LIN WEN-YI , SHOUP SHARA S
IPC: C30B29/22 , B01D71/02 , H01B20060101 , H01B1/00 , H01G4/06 , H01G4/33 , H01L21/20 , H01L39/24 , H01L49/02 , H01M8/02 , H01B
CPC classification number: H01L39/2461
Abstract: Epitaxial thin films for use as buffer layers for high temperature superconductors, electrolytes in solid oxide fuel cells (SOFC), gas separation membranes or dielectric material in electronic devices, are disclosed. By using CCVD, CACVD or any other suitable deposition process, epitaxial films having pore-free, ideal grain boundaries, and dense structure can be formed. Several different types of materials are disclosed for use as buffer layers in high temperature superconductors. In addition, the use of epitaxial thin films for electrolytes and electrode formation in SOFCs results in densification for pore-free and ideal grain boundary/interface microstructure. Gas separation membranes for the production of oxygen and hydrogen are also disclosed. These semipermeable membranes are formed by high-quality, dense, gas-tight, pinhole free sub-micro scale layers of mixed-conducting oxides on porous ceramic substrates. Epitaxial thin films as dielectric material in capacitors are also taught herein. Capacitors are utilized according to their capacitance values which are dependent on their physical structure and dielectric permittivity. The epitaxial thin films of the current invention form low-loss dielectric layers with extremely high permittivity. This high permittivity allows for the formation of capacitors that can have their capacitance adjusted by applying a DC bias between their electrodes.
Abstract translation: 公开了用作高温超导体的缓冲层的外延薄膜,固体氧化物燃料电池(SOFC)中的电解质,电子装置中的气体分离膜或介电材料。 通过使用CCVD,CACVD或任何其它合适的沉积工艺,可以形成具有无孔,理想晶界和致密结构的外延膜。 公开了几种不同类型的材料用作高温超导体中的缓冲层。 此外,在SOFC中使用电解质外延薄膜和电极形成导致无孔和理想的晶界/界面微观结构的致密化。 还公开了用于生产氧气和氢气的气体分离膜。 这些半透膜由多孔陶瓷基板上的高质量,致密,气密,无针孔的微小尺度的混合导电氧化物层形成。 本文还介绍了作为电容器中的介电材料的外延薄膜。 根据电容值的物理结构和介电常数,使用电容器。 本发明的外延薄膜形成具有极高介电常数的低损耗介电层。 这种高介电常数允许形成可以通过在它们的电极之间施加直流偏压来调整其电容的电容器。
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