公开(公告)号：MY161431A

公开(公告)日：2017-04-14

申请号：MYPI2013003677

申请日：2013-10-07

Applicant: MIMOS BERHAD

Inventor： MAZLIN BIN MAN ,  MOHAMMAD FAIRUZ BIN AMIR ,  MUHAMAD RAMDZAN BUYONG ,  ZALIHA BINTI MOHAMAD ,  AZLINA BINTI MOHD ZAIN

IPC: C11D7/32 ,  C11D11/00 ,  H01L21/02 ,  H01L21/306 ,  H01L21/3213 ,  H01L21/60

Abstract: THE PRESENT INVENTION RELATES TO A METHOD FOR ELIMINATING ALUMINIUM SURFACE DEFECTS ON LARGE EXPOSED METAL COMPRISING: CONDUCTING A POST PAD ETCHING TREATMENT (100) ON THE METAL; COLD-RINSING THE METAL (200); AND DRYING THE METAL (300) USING NITROGEN; CHARACTERIZED IN THAT THE STEPS OF CONDUCTING A POST PAD ETCHING TREATMENT (100) ON THE METAL, COLD-RINSING THE METAL (200); AND DRYING THE METAL (300) USING NITROGEN INVOLVE CHEMICAL-FREE SOLVENT. THE PRESENT INVENTION IS ADVANTAGEOUS AS IT IS EFFECTIVE IN ELIMINATING THE WHITE HAZE EFFECT. THE ADVANTAGE OF USE OF DEIONIZED (DI) WATER ONLY CLEANING METHOD IS THAT IT IS MORE ENVIRONMENT-FRIENDLY. MOST ILLUSTRATIVE