公开(公告)号：MY143881A

公开(公告)日：2011-07-15

申请号：MYPI20071932

申请日：2007-11-07

Applicant: MIMOS BERHAD

Inventor： BUYONG MUHAMAD RAMDZAN ,  ZAIN AZLINA MOHD ,  MOHAMAD SITI AISHAH ,  SYONO MOHD ISMAHADI ,  WAH LEE HING ,  KASJOO SHAHRIR RIZAL

IPC: B81C1/00

Abstract: FABRICATION METHOD OF A MICROMECHANICAL DEVICE 5 A METHOD FOR FABRICATING A MICROMECHANICAL DEVICE COMPRISES THE STEPS OF PROVIDING A SUBSTRATE HAVING A FIRST DIELECTRIC LAYER ON TOP SURFACE OF SAID SUBSTRATE, A BOTTOM CONDUCTIVE LAYER ON TOP SURFACE OF SAID FIRST DIELECTRIC LAYER, A SECOND DIELECTRIC LAYER ON SAID BOTTOM CONDUCTIVE LAYER, A 0 SACRIFICIAL LAYER ON SAID SECOND DIELECTRIC LAYER, A THIRD DIELECTRIC LAYER ON SAID SACRIFICIAL LAYER, AND A TOP CONDUCTIVE LAYER ON SAID THIRD DIELECTRIC LAYER, ETCHING A PLURALITY OF HOLES AT SAID TOP CONDUCTIVE LAYER, THEN AT SAID THIRD DIELECTRIC LAYER AND SAID SACRIFICIAL LAYER, AND SEALING 5 SAID ETCHED HOLES OF SAID TOP CONDUCTIVE LAYER AND THIRD DIELECTRIC LAYER BY DEPOSITING A FOURTH DIELECTRIC LAYER ON TOP OF SAID TOP CONDUCTIVE LAYER. MOST ILLUSTRATIVE DIAGRAM: