公开(公告)号：EP2324344A4

公开(公告)日：2014-12-17

申请号：EP09813278

申请日：2009-09-03

Applicant: MIMOS BERHAD

Inventor： SULAIMAN SURAYA ,  TAMSIR AGUS SANTOSO ,  MANUT AZRIF ,  ALIAS DZUZLINDAH MUHAMAD ,  ZAIN AZLINA MOHD

IPC: G01N27/22 ,  G01N27/02 ,  G01N33/18 ,  H01L21/28

CPC classification number: G01N27/223 ,  G01N27/225

公开(公告)号：MY143881A

公开(公告)日：2011-07-15

申请号：MYPI20071932

申请日：2007-11-07

Applicant: MIMOS BERHAD

Inventor： BUYONG MUHAMAD RAMDZAN ,  ZAIN AZLINA MOHD ,  MOHAMAD SITI AISHAH ,  SYONO MOHD ISMAHADI ,  WAH LEE HING ,  KASJOO SHAHRIR RIZAL

IPC: B81C1/00

Abstract: FABRICATION METHOD OF A MICROMECHANICAL DEVICE 5 A METHOD FOR FABRICATING A MICROMECHANICAL DEVICE COMPRISES THE STEPS OF PROVIDING A SUBSTRATE HAVING A FIRST DIELECTRIC LAYER ON TOP SURFACE OF SAID SUBSTRATE, A BOTTOM CONDUCTIVE LAYER ON TOP SURFACE OF SAID FIRST DIELECTRIC LAYER, A SECOND DIELECTRIC LAYER ON SAID BOTTOM CONDUCTIVE LAYER, A 0 SACRIFICIAL LAYER ON SAID SECOND DIELECTRIC LAYER, A THIRD DIELECTRIC LAYER ON SAID SACRIFICIAL LAYER, AND A TOP CONDUCTIVE LAYER ON SAID THIRD DIELECTRIC LAYER, ETCHING A PLURALITY OF HOLES AT SAID TOP CONDUCTIVE LAYER, THEN AT SAID THIRD DIELECTRIC LAYER AND SAID SACRIFICIAL LAYER, AND SEALING 5 SAID ETCHED HOLES OF SAID TOP CONDUCTIVE LAYER AND THIRD DIELECTRIC LAYER BY DEPOSITING A FOURTH DIELECTRIC LAYER ON TOP OF SAID TOP CONDUCTIVE LAYER. MOST ILLUSTRATIVE DIAGRAM:

公开(公告)号：MY147700A

公开(公告)日：2013-01-15

申请号：MYPI20083507

申请日：2008-09-10

Applicant: MIMOS BERHAD

Inventor： SULAIMAN SURAYA ,  TAMSIR AGUS SANTOSO DR ,  MANUT AZRIF ,  ALIAS DZUZLINDAH MUHAMAD ,  ZAIN AZLINA MOHD

IPC: G01N27/22

Abstract: THE PRESENT INVENTION RELATES TO CAPACITIVE SENSORS FOR MEASURING HUMIDITY AND MOISTURE AND TO AN IMPROVED PROCESS FOR MAKING THE SAME. THE FABRICATION PROCESS FOR A CAPACITIVE SENSOR HAVING A MULTI-LAYER ELECTRODES FOR MEASURING HUMIDITY AND MOISTURE COMPRISING DISPOSING THE MULTI-LAYER INTERDIGITATED ELECTRODES (2, 9) IN A MULTI-LAYER POLYIMIDES (5, 6, 7); PROVIDING A PLURALITY OF TRENCHES (12) ON THE SURFACE OF THE ELECTRODE BY LIFT OFF PROCESS; AND COVERING THE SENSOR WITH PHOTOSENSITIVE NEGATIVE POLYIMIDE.

公开(公告)号：MY146156A

公开(公告)日：2012-06-29

申请号：MYPI20072172

申请日：2007-12-05

Applicant: MIMOS BERHAD

Inventor： BUYONG MUHAMAD RAMDZAN ,  ZAIN AZLINA MOHD ,  SYONO MOHD ISMAHADI ,  WAH LEE HING

IPC: H01L21/08

Abstract: A METHOD OF PACKAGING A MICROMECHANICAL WAFER WITH A DIELECTRIC LAYER (23) OVER SAID MICROMECHANICAL WAFER USING A SPINNING TECHNIQUE. THE DIELECTRIC LAYER (23) IS THEN HEATED (25) TO REMOVE WATER AND CURED (26) THE LAYER OF THE MICROMECHANICAL DEVICE TO PROVIDE A PROTECTIVE COATING TO THE MICROMECHANICAL DEVICE. THE MICROMECHANICAL DEVICE IS THEN FURTHER ENCAPSULATED (30) WITH A PLASTIC MATERIAL.

公开(公告)号：WO2010030162A3

公开(公告)日：2010-05-14

申请号：PCT/MY2009000135

申请日：2009-09-03

Applicant: MIMOS BERHAD ,  SULAIMAN SURAYA ,  TAMSIR AGUS SANTOSO ,  MANUT AZRIF ,  ALIAS DZUZLINDAH MUHAMAD ,  ZAIN AZLINA MOHD

Inventor： SULAIMAN SURAYA ,  TAMSIR AGUS SANTOSO ,  MANUT AZRIF ,  ALIAS DZUZLINDAH MUHAMAD ,  ZAIN AZLINA MOHD

IPC: G01N27/22 ,  G01N27/02 ,  G01N33/18 ,  H01L21/28

CPC classification number: G01N27/223 ,  G01N27/225

Abstract: The present invention relates to capacitive sensors for measuring humidity and moisture and to an improved process for making the same. The fabrication process for a capacitive sensor having a multi-layer electrodes for measuring humidity and moisture comprising disposing the multi-layer interdigitated electrodes in a multi-layer polyimides; providing a plurality of trenches on the surface of the electrode by lift off process; and covering the sensor with photosensitive negative polyimide.

Abstract translation: 本发明涉及用于测量湿度和湿度的电容传感器及其制造方法。 具有用于测量湿度和湿度的多层电极的电容传感器的制造过程包括将多层交叉电极设置在多层聚酰亚胺中; 通过剥离工艺在电极的表面上提供多个沟槽; 并用感光负聚酰亚胺覆盖传感器。