公开(公告)号：MY173981A

公开(公告)日：2020-03-02

申请号：MYPI2010700033

申请日：2010-05-26

Applicant: MIMOS BERHAD

Inventor： MUHAMAD RAMDZAN BUYONG ,  MOHSEN NABIPOOR ,  DANIEL BIEN CHIA SHENG ,  AZLINA MOHD ZAIN ,  SITI AISHAH MOHAMAD BAHARUDDIN ,  RAHIMAH MOHD SAMAN ,  ABDUL GHANI OTHAMAN

Abstract: A novel humidity sensor is described. The capacitive humidity sensor comprises at least two pairs of electrode contact pads (24) spaced apart; and a moisture sensitive film (26) formed around the electrode contact pads. The sensor is characterized in that, at least a pair of metals (28) connect the electrode contact pads to form a pair of 1-shaped electrodes of a capacitor, wherein the capacitance measured changes according to humidity. Another sensor embodiment can be formed with contact pads exposed at two side of the moisture sensitive film. A method of fabricating the sensor is also described.