公开(公告)号：MY173981A

公开(公告)日：2020-03-02

申请号：MYPI2010700033

申请日：2010-05-26

Applicant: MIMOS BERHAD

Inventor： MUHAMAD RAMDZAN BUYONG ,  MOHSEN NABIPOOR ,  DANIEL BIEN CHIA SHENG ,  AZLINA MOHD ZAIN ,  SITI AISHAH MOHAMAD BAHARUDDIN ,  RAHIMAH MOHD SAMAN ,  ABDUL GHANI OTHAMAN

Abstract: A novel humidity sensor is described. The capacitive humidity sensor comprises at least two pairs of electrode contact pads (24) spaced apart; and a moisture sensitive film (26) formed around the electrode contact pads. The sensor is characterized in that, at least a pair of metals (28) connect the electrode contact pads to form a pair of 1-shaped electrodes of a capacitor, wherein the capacitance measured changes according to humidity. Another sensor embodiment can be formed with contact pads exposed at two side of the moisture sensitive film. A method of fabricating the sensor is also described.

公开(公告)号：MY173650A

公开(公告)日：2020-02-13

申请号：MYPI2010005362

申请日：2010-11-15

Applicant: MIMOS BERHAD

Inventor： MUHAMAD RAMDZAN BUYONG ,  SITI AISHAH MOHAMAD BADARUDDIN ,  RAHIMAH MOHD SAMAN ,  ABDUL GHANI OTHAMAN ,  DANIEL BIEN CHIA SHENG ,  AZLINA BINTI MOHD ZAIN ,  MOHSEN NABIPOOR

Abstract: The present invention relates to a sensor for determining humidity. A humidity sensor (30) comprises of a substrate (32); a bottom membrane (34) positioned above the substrate (32) and a top membrane (36) positioned above the bottom membrane (34) forming a dielectric layer (38); and a plurality of inter-digitated electrodes (40) with changing capacitance in accordance to change in humidity detected by the dielectric layer (38) embedded to the top membrane (36) wherein a plurality of trenches (42) are embedded to the bottom membrane (34) or to the substrate (32) thereby increasing area of exposure to humidity. The present invention also relates to a method for fabricating a humidity sensor.