公开(公告)号：WO0231458A3

公开(公告)日：2002-08-01

申请号：PCT/US0131521

申请日：2001-10-10

Applicant: MKS INSTR INC

Inventor： QUIGLEY CLAUDIA J ,  LAHEY KERRY S ,  MATHEW SANTHI E ,  MAXWELL J ROBERT JR ,  MINDLIN LEONID ,  POULIN JAMES M ,  ST PAUL GARDY

IPC: G01L9/12 ,  G01L19/04 ,  H05B3/20

CPC classification number: G01L19/04

Abstract: A heater is disclosed for use with pressure transducers. The disclosed heater includes a first heating element and a second heating element. The first heating element is characterized by a first electrical resistance. The second heating element is characterized by a second electrical resistance. In preferred embodiments, the first electrical resistance is different than the second electrical resistance. The disclosed heater can be used to accurately heat a pressure transducer to at least four different operating temperatures by selectively (a) connecting the first heating element to the transducer temperature control circuitry, (b) connecting the second heating element to the transducer temperature control circuitry, (c) connecting the fist and second heating elements in series with the transducer temperature control circuitry, or (d) connecting the first and second heating elements in parallel with the transducer temperature control circuitry.

Abstract translation: 公开了一种与压力传感器一起使用的加热器。 所公开的加热器包括第一加热元件和第二加热元件。 第一加热元件的特征在于第一电阻。 第二加热元件的特征在于第二电阻。 在优选实施例中，第一电阻与第二电阻不同。 所公开的加热器可以用于通过选择性地（a）将第一加热元件连接到换能器温度控制电路，（b）将第二加热元件连接到换能器温度控制电路，来将压力换能器精确地加热到至少四个不同的操作温度 （c）将第一和第二加热元件与换能器温度控制电路串联连接，或（d）将第一和第二加热元件与换能器温度控制电路并联连接。

公开(公告)号：WO2008021178A3

公开(公告)日：2008-05-22

申请号：PCT/US2007017708

申请日：2007-08-09

Applicant: MKS INSTR INC ,  MAIORANA PHILIP J ,  MATHEW SANTHI E

Inventor： MAIORANA PHILIP J ,  MATHEW SANTHI E

IPC: G01L9/12

CPC classification number: G01L9/12

Abstract: A system and method are described for maintaining power dissipation substantially constant across the sensor interface board of a capacitance pressure transducer. A shorted diaphragm level detector detects a shorting of the diaphragm onto one or more reference electrodes. A power dissipating resistor is placed near the oscillator that drives the capacitance detecting circuit in the capacitance pressure transducer. The resistor is switched across a power supply when the shorting is detected, causing current to flow through the resistor so that power can be added in an amount sufficient to maintain power dissipation by the oscillator substantially constant when the diaphragm shorts.

Abstract translation: 描述了一种用于在电容式压力传感器的传感器接口板上保持功率消耗基本恒定的系统和方法。 短路光阑水平检测器检测到光阑在一个或多个参考电极上的短路。 功率耗散电阻放置在振荡器附近，驱动电容式压力传感器中的电容检测电路。 当检测到短路时，电阻器在电源上切换，导致电流流过电阻器，使得当隔膜短路时，能够以足以维持振荡器的功率消耗的功率基本上恒定的功率被加入。

公开(公告)号：DE112007001835T5

公开(公告)日：2009-06-18

申请号：DE112007001835

申请日：2007-08-09

Applicant: MKS INSTR INC

Inventor： MAIORANA PHILIP J ,  MATHEW SANTHI E

IPC: G01L9/12

Abstract: A system and method are described for maintaining power dissipation substantially constant across the sensor interface board of a capacitance pressure transducer. A shorted diaphragm level detector detects a shorting of the diaphragm onto one or more reference electrodes. A power dissipating resistor is placed near the oscillator that drives the capacitance detecting circuit in the capacitance pressure transducer. The resistor is switched across a power supply when the shorting is detected, causing current to flow through the resistor so that power can be added in an amount sufficient to maintain power dissipation by the oscillator substantially constant when the diaphragm shorts.

公开(公告)号：GB2454130A

公开(公告)日：2009-04-29

申请号：GB0902096

申请日：2007-08-09

Applicant: MKS INSTR INC

Inventor： MAIORANA PHILIP J ,  MATHEW SANTHI E

IPC: G01L9/12

Abstract: A system and method are described for maintaining power dissipation substantially constant across the sensor interface board of a capacitance pressure transducer. A shorted diaphragm level detector detects a shorting of the diaphragm onto one or more reference electrodes. A power dissipating resistor is placed near the oscillator that drives the capacitance detecting circuit in the capacitance pressure transducer. The resistor is switched across a power supply when the shorting is detected, causing current to flow through the resistor so that power can be added in an amount sufficient to maintain power dissipation by the oscillator substantially constant when the diaphragm shorts.

公开(公告)号：DE112007001835B4

公开(公告)日：2018-05-09

申请号：DE112007001835

申请日：2007-08-09

Applicant: MKS INSTR INC

Inventor： MAIORANA PHILIP J ,  MATHEW SANTHI E

IPC: G01L9/12 ,  G01L19/04

Abstract: System zum Steuern und / oder Regeln des Leistungsumsatzes in einem kapazitiven Druckwandler mit einer Kapazitätsdetektionsschaltung, die dafür ausgelegt ist, eine Änderung der Kapazität zwischen einem Diaphragma und einer Referenzelektrode zu detektieren, wobei das System umfasst:einen Kurzschlussdiaphragmapegeldetektor, der dafür ausgelegt ist, ein Kurzschließen des Diaphragmas auf die Referenzelektrode zu detektieren; undeinen Schalter, der dafür ausgelegt ist zu veranlassen, dass ein Strom durch einen Widerstand übertragen wird, wenn das Kurzschließen des Diaphragmas detektiert worden ist, wodurch der Leistungsumsatz in dem kapazitiven Druckwandler konstant bleibt, wenn das Diaphragma kurzschließt.

公开(公告)号：GB2454130B

公开(公告)日：2011-05-25

申请号：GB0902096

申请日：2007-08-09

Applicant: MKS INSTR INC

Inventor： MAIORANA PHILIP J ,  MATHEW SANTHI E

IPC: G01L9/12

Abstract: A system and method are described for maintaining power dissipation substantially constant across the sensor interface board of a capacitance pressure transducer. A shorted diaphragm level detector detects a shorting of the diaphragm onto one or more reference electrodes. A power dissipating resistor is placed near the oscillator that drives the capacitance detecting circuit in the capacitance pressure transducer. The resistor is switched across a power supply when the shorting is detected, causing current to flow through the resistor so that power can be added in an amount sufficient to maintain power dissipation by the oscillator substantially constant when the diaphragm shorts.