公开(公告)号：WO0231458A3

公开(公告)日：2002-08-01

申请号：PCT/US0131521

申请日：2001-10-10

Applicant: MKS INSTR INC

Inventor： QUIGLEY CLAUDIA J ,  LAHEY KERRY S ,  MATHEW SANTHI E ,  MAXWELL J ROBERT JR ,  MINDLIN LEONID ,  POULIN JAMES M ,  ST PAUL GARDY

IPC: G01L9/12 ,  G01L19/04 ,  H05B3/20

CPC classification number: G01L19/04

Abstract: A heater is disclosed for use with pressure transducers. The disclosed heater includes a first heating element and a second heating element. The first heating element is characterized by a first electrical resistance. The second heating element is characterized by a second electrical resistance. In preferred embodiments, the first electrical resistance is different than the second electrical resistance. The disclosed heater can be used to accurately heat a pressure transducer to at least four different operating temperatures by selectively (a) connecting the first heating element to the transducer temperature control circuitry, (b) connecting the second heating element to the transducer temperature control circuitry, (c) connecting the fist and second heating elements in series with the transducer temperature control circuitry, or (d) connecting the first and second heating elements in parallel with the transducer temperature control circuitry.

Abstract translation: 公开了一种与压力传感器一起使用的加热器。 所公开的加热器包括第一加热元件和第二加热元件。 第一加热元件的特征在于第一电阻。 第二加热元件的特征在于第二电阻。 在优选实施例中，第一电阻与第二电阻不同。 所公开的加热器可以用于通过选择性地（a）将第一加热元件连接到换能器温度控制电路，（b）将第二加热元件连接到换能器温度控制电路，来将压力换能器精确地加热到至少四个不同的操作温度 （c）将第一和第二加热元件与换能器温度控制电路串联连接，或（d）将第一和第二加热元件与换能器温度控制电路并联连接。