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1.发明申请
公开(公告)号：WO0231458A3
公开(公告)日：2002-08-01
申请号：PCT/US0131521
申请日：2001-10-10
Applicant: MKS INSTR INC
Inventor： QUIGLEY CLAUDIA J , LAHEY KERRY S , MATHEW SANTHI E , MAXWELL J ROBERT JR , MINDLIN LEONID , POULIN JAMES M , ST PAUL GARDY
CPC classification number: G01L19/04
Abstract: A heater is disclosed for use with pressure transducers. The disclosed heater includes a first heating element and a second heating element. The first heating element is characterized by a first electrical resistance. The second heating element is characterized by a second electrical resistance. In preferred embodiments, the first electrical resistance is different than the second electrical resistance. The disclosed heater can be used to accurately heat a pressure transducer to at least four different operating temperatures by selectively (a) connecting the first heating element to the transducer temperature control circuitry, (b) connecting the second heating element to the transducer temperature control circuitry, (c) connecting the fist and second heating elements in series with the transducer temperature control circuitry, or (d) connecting the first and second heating elements in parallel with the transducer temperature control circuitry.
Abstract translation: 公开了一种与压力传感器一起使用的加热器。 所公开的加热器包括第一加热元件和第二加热元件。 第一加热元件的特征在于第一电阻。 第二加热元件的特征在于第二电阻。 在优选实施例中，第一电阻与第二电阻不同。 所公开的加热器可以用于通过选择性地（a）将第一加热元件连接到换能器温度控制电路，（b）将第二加热元件连接到换能器温度控制电路，来将压力换能器精确地加热到至少四个不同的操作温度 （c）将第一和第二加热元件与换能器温度控制电路串联连接，或（d）将第一和第二加热元件与换能器温度控制电路并联连接。
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2.发明申请
公开(公告)号：WO2004112097A3
公开(公告)日：2006-01-26
申请号：PCT/US2004018578
申请日：2004-06-14
Applicant: MKS INSTR INC , POULIN JAMES M , CLARK WILLIAM R
Inventor： POULIN JAMES M , CLARK WILLIAM R
IPC: B24B37/005 , F16K37/00 , H01L20060101 , B24B5/00
CPC classification number: B24B37/005 , Y10T137/8359
Abstract: A pneumatic control system (100) including at least one flow control line (140a, 140b, 140c) having a connecting line (142) connectable to a fluid line (20a, 20b, 20c) of a pneumatically operated machine (18), a vacuum line (146) connectable to a vacuum source (32), a vacuum valve (144) controlling flow between the connecting line (142) and the vacuum line (146), a pressure line (106) connectable to a source of fluid under pressure (34), and a pressure valve (50) controlling flow between the connecting line (142) and the pressure line (106). A pressure manifold (102) defines the pressure line (106) and a first portion of the connection line, and supports the pressure valve (50), and a vacuum manifold (104) defines the vacuum line (146) and a second portion of the connecting line, and supports the vacuum valve (144). The vacuum manifold (104) is adapted for replacement independently of the pressure manifold (102).
Abstract translation: 一种气动控制系统（100），包括至少一个具有可连接到气动机械（18）的流体管线（20a，20b，20c）的连接管线（142）的流量控制管线（140a，140b，140c） 可连接到真空源（32）的真空管线（146），控制连接管线（142）和真空管线（146）之间的流动的真空阀（144），连接到流体源 压力（34）和控制连接管线（142）和压力管线（106）之间的流动的压力阀（50）。 压力歧管（102）限定压力管线（106）和连接管线的第一部分，并且支撑压力阀（50），真空歧管（104）限定真空管线（146），第二部分 连接线，并支撑真空阀（144）。 真空歧管（104）适于独立于压力歧管（102）进行更换。
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公开(公告)号：GB2441456A
公开(公告)日：2008-03-05
申请号：GB0723036
申请日：2006-04-25
Applicant: MKS INSTR INC
Inventor： POULIN JAMES M , MELLO KEITH F
Abstract: A pressure transducer assembly including a sensor enclosure, a pressure sensor received in the sensor enclosure, a tube connected to the pressure sensor and extending out of the sensor enclosure for connection to a source of fluid, an electronics circuit board electrically connected to the pressure sensor, and an electronics enclosure containing the electronics board and secured to the sensor enclosure. The electronics enclosure includes an external housing constructed of thermally conductive material, and a heat transfer plate constructed of thermally conductive material. The heat transfer plate is in physical contact with heat-generating elements of the electronics circuit board and in physical contact with the external housing, such that heat from the heat-generating elements can be dissipated through the external housing. This arrangement allows the circuit board to remain cool even as the sensor is heated.
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公开(公告)号：GB2441678A
公开(公告)日：2008-03-12
申请号：GB0723035
申请日：2006-06-23
Applicant: MKS INSTR INC
Inventor： MILLER CRAIG E , POULIN JAMES M
Abstract: A transducer assembly including a sensor housing, a heater shell located in the sensor housing, a heater operatively coupled to the heater shell, a sensor received in the heater shell, and an electronics assembly positioned within the sensor housing, outside of the heater shell, and adapted to receive signals from the sensor. The assembly also includes a mounting plate (400) positioned within the sensor housing, outside of the heater shell. The mounting plate (400) has arms (402) extending therefrom and at least one attachment point (404) where the electronics assembly is secured to the mounting plate (400). The arms (402) are secured to the sensor housing, and the mounting plate (400) includes apertures (406) adjacent to the arms (402) for impeding thermal conduction between the arms (402) and the attachment point (404).
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公开(公告)号：DE112006001129T5
公开(公告)日：2008-03-27
申请号：DE112006001129
申请日：2006-04-25
Applicant: MKS INSTR INC
Inventor： POULIN JAMES M , MELLO KEITH F
Abstract: A pressure transducer assembly including a sensor enclosure, a pressure sensor received in the sensor enclosure, a tube connected to the pressure sensor and extending out of the sensor enclosure for connection to a source of fluid, an electronics circuit board electrically connected to the pressure sensor, and an electronics enclosure containing the electronics board and secured to the sensor enclosure. The electronics enclosure includes an external housing constructed of thermally conductive material, and a heat transfer plate constructed of thermally conductive material. The heat transfer plate is in physical contact with heat-generating elements of the electronics circuit board and in physical contact with the external housing, such that heat from the heat-generating elements can be dissipated through the external housing. This arrangement allows the circuit board to remain cool even as the sensor is heated.
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Patent Agency Ranking
公开(公告)号：DE112006001662B4
公开(公告)日：2015-08-20
申请号：DE112006001662
申请日：2006-06-23
Applicant: MKS INSTR INC
Inventor： MILLER CRAIG E , POULIN JAMES M
Abstract: Druckwandler-Baugruppe mit: einem Sensor-Gehäuse; einem Heizmantel, der sich in dem Sensor-Gehäuse befindet; einer Heizeinrichtung, die betriebsmäßig mit dem Heizmantel gekoppelt ist; einem Sensor, der in dem Heizmantel aufgenommen wird; einer Elektronik-Baugruppe, die innerhalb des Sensor-Gehäuses und außerhalb des Heizmantels angeordnet und zum Empfang von Signalen von dem Sensor ausgebildet ist; und einer Befestigungsplatte, die im Inneren des Sensor-Gehäuses außerhalb des Heizmantels angeordnet ist, wobei die Befestigungsplatte Arme, die sich von dieser aus erstrecken, und zumindest einen Befestigungpunkt aufweist, an dem die Elektronik-Baugruppe an der Befestigungsplatte befestigt ist, wobei die Arme an dem Sensor-Gehäuse befestigt sind und die Befestigungsplatte Öffnungen benachbart zu den Armen zur Behinderung einer Wärmeleitung zwischen den Armen und dem Befestigungspunkt einschließt.
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公开(公告)号：DE112004000757T5
公开(公告)日：2006-06-29
申请号：DE112004000757
申请日：2004-06-14
Applicant: MKS INSTR INC
Inventor： POULIN JAMES M , CLARK WILLIAM R
IPC: G05B24/04 , B24B37/005 , F16K37/00 , H01L20060101
Abstract: A pneumatic control system including at least one flow control line having a connecting line connectable to a fluid line of a pneumatically operated machine, a vacuum line connectable to a vacuum source, a vacuum valve controlling flow between the connecting line and the vacuum line, a pressure line connectable to a source of fluid under pressure, and a pressure valve controlling flow between the connecting line and the pressure line. A pressure manifold defines the pressure line and a first portion of the connection line, and supports the pressure valve, and a vacuum manifold defines the vacuum line and a second portion of the connecting line, and supports the vacuum valve. The vacuum manifold is adapted for replacement independently of the pressure manifold.
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公开(公告)号：GB2418632A
公开(公告)日：2006-04-05
申请号：GB0522787
申请日：2004-06-14
Applicant: MKS INSTR INC
Inventor： POULIN JAMES M , CLARK WILLIAM R
IPC: H01L21/683 , B24B37/005 , F16K37/00 , H01L20060101
Abstract: A pneumatic control system (100) including at least one flow control line (140a, 140b, 140c) having a connecting line (142) connectable to a fluid line (20a, 20b, 20c) of a pneumatically operated machine (18), a vacuum line (146) connectable to a vacuum source (32), a vacuum valve (144) controlling flow between the connecting line (142) and the vacuum line (146), a pressure line (106) connectable to a source of fluid under pressure (34), and a pressure valve (50) controlling flow between the connecting line (142) and the pressure line (106). A pressure manifold (102) defines the pressure line (106) and a first portion of the connection line, and supports the pressure valve (50), and a vacuum manifold (104) defines the vacuum line (146) and a second portion of the connecting line, and supports the vacuum valve (144). The vacuum manifold (104) is adapted for replacement independently of the pressure manifold (102).
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公开(公告)号：GB2441678B
公开(公告)日：2009-10-21
申请号：GB0723035
申请日：2006-06-23
Applicant: MKS INSTR INC
Inventor： MILLER CRAIG E , POULIN JAMES M
Abstract: A transducer assembly including a sensor housing, a heater shell located in the sensor housing, a heater operatively coupled to the heater shell, a sensor received in the heater shell, and an electronics assembly positioned within the sensor housing, outside of the heater shell, and adapted to receive signals from the sensor. The assembly also includes a mounting plate positioned within the sensor housing, outside of the heater shell. The mounting plate has arms extending therefrom and at least one attachment point where the electronics assembly is secured to the mounting plate. The arms are secured to the sensor housing, and the mounting plate includes apertures adjacent to the arms for impeding thermal conduction between the arms and the attachment point.
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公开(公告)号：DE112006001662T5
公开(公告)日：2008-05-15
申请号：DE112006001662
申请日：2006-06-23
Applicant: MKS INSTR INC
Inventor： MILLER CRAIG E , POULIN JAMES M
Abstract: A transducer assembly including a sensor housing, a heater shell located in the sensor housing, a heater operatively coupled to the heater shell, a sensor received in the heater shell, and an electronics assembly positioned within the sensor housing, outside of the heater shell, and adapted to receive signals from the sensor. The assembly also includes a mounting plate positioned within the sensor housing, outside of the heater shell. The mounting plate has arms extending therefrom and at least one attachment point where the electronics assembly is secured to the mounting plate. The arms are secured to the sensor housing, and the mounting plate includes apertures adjacent to the arms for impeding thermal conduction between the arms and the attachment point.
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