公开(公告)号：WO0171781A3

公开(公告)日：2002-02-28

申请号：PCT/US0109544

申请日：2001-03-22

Applicant: MKS INSTR INC

Inventor： HOLCOMB GARRY ,  GU YOUFAN ,  STAFFORD JAMES ,  MUELLER JAMES ,  WADE STACY

IPC: H01L21/00 ,  H01L21/677

CPC classification number: H01L21/67748 ,  H01L21/67201 ,  H01L21/67253 ,  Y10S414/139

Abstract: Transducer (10) apparatus and method combining both an absolute pressure sensor (20) for sensing absolute pressure in the load lock chamber (60) and a differential pressure sensor (30) for sensing a pressure difference between ambient atmospheric pressure and pressure in a load lock chamber (60) and provides control signals for opening an interior door (62) from the load lock chamber (60) into a vacuum processing chamber (70) and for opening an exterior door (64) between ambient atmosphere and the load lock chamber (60). The transducer (10) can also produce signals to control transition from slow to fast vacuum pump-down of load lock chamber (60) pressure at a predetermined pressure set point.

Abstract translation: 传感器（10）装置和方法组合用于感测负载锁定室（60）中的绝对压力的绝对压力传感器（20）和差压传感器（30），用于感测环境大气压力和负载压力之间的压力差 锁定室（60），并且提供用于将内门（62）从负载锁定室（60）打开到真空处理室（70）中并且用于打开环境大气和负载锁定室之间的外门（64）的控制信号 （60）。 换能器（10）还可以产生信号以控制在预定压力设定点处从负载锁定室（60）压力的慢速到快速真空泵送的转变。

公开(公告)号：AU4943601A

公开(公告)日：2001-10-03

申请号：AU4943601

申请日：2001-03-22

Applicant: MKS INSTR INC

Inventor： HOLCOMB GARRY ,  GU YOUFAN ,  STAFFORD JAMES ,  MUELLER JAMES ,  WADE STACY

IPC: H01L21/00 ,  H01L21/677

Abstract: A pirani absolute pressure sensor for sensing absolute pressure in a load lock in a range from 100 to 10 -4 torr and a differential pressure sensor for sensing a pressure difference between ambient atmospheric pressure and pressure in the load lock chamber are combined together in a module with a manifold and common circuit components to provide a pressure transducer that is capable of producing not only analog output for absolute pressure measurements, but also control signals at settable absolute and differential pressure values for opening interior and exterior doors of a load lock used to shuttle wafers and other devices into and out of a vacuum processing chamber. The transducer can also produce signals to control transition from slow to fast vacuum pumping of the load lock chamber at a settable threshold pressure.