公开(公告)号：DE69524539T2

公开(公告)日：2002-07-04

申请号：DE69524539

申请日：1995-10-23

Applicant: MOTOROLA INC

Inventor： RISTIC LJUBISA ,  KOURY DANIEL ,  SCHMIESING JOHN E ,  GUTTERIDGE RONALD J ,  HUGHES HENRY G

IPC: G01D5/24 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  H01L23/06 ,  G01D3/028

Abstract: An enclosure (8) for an electronic device (26) such as, for example, an accelerometer. The enclosure (8) includes a conductive semiconductor substrate (12) underlying the electronic device (26), a conductive cap (16) overlying the electronic device (26), and a power supply (25) having one or more outputs (27,29) each with a substantially fixed potential wherein one output is electrically coupled to the conductive semiconductor substrate (12) and another output to the conductive cap (16). In a preferred embodiment, substrate (12) and cap (16) are coupled to the same power supply output (27). This coupling substantially eliminates the adverse effects of parasitic capacitances of the substrate (12) and cap (16) to reduce measurement error and EMI when a capacitive accelerometer is used as the electronic device (26).

公开(公告)号：DE69524539D1

公开(公告)日：2002-01-24

申请号：DE69524539

申请日：1995-10-23

Applicant: MOTOROLA INC

Inventor： RISTIC LJUBISA ,  KOURY DANIEL ,  SCHMIESING JOHN E ,  GUTTERIDGE RONALD J ,  HUGHES HENRY G

IPC: G01D5/24 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  H01L23/06 ,  G01D3/028

Abstract: An enclosure (8) for an electronic device (26) such as, for example, an accelerometer. The enclosure (8) includes a conductive semiconductor substrate (12) underlying the electronic device (26), a conductive cap (16) overlying the electronic device (26), and a power supply (25) having one or more outputs (27,29) each with a substantially fixed potential wherein one output is electrically coupled to the conductive semiconductor substrate (12) and another output to the conductive cap (16). In a preferred embodiment, substrate (12) and cap (16) are coupled to the same power supply output (27). This coupling substantially eliminates the adverse effects of parasitic capacitances of the substrate (12) and cap (16) to reduce measurement error and EMI when a capacitive accelerometer is used as the electronic device (26).