IR COx sensor and integrated circuit comprising the same
    1.
    发明公开
    IR COx sensor and integrated circuit comprising the same 审中-公开
    红外COX-传感器和信号衰减器

    公开(公告)号:EP2743677A1

    公开(公告)日:2014-06-18

    申请号:EP12197184.0

    申请日:2012-12-14

    Applicant: NXP B.V.

    Abstract: An infrared CO x sensor (10) is disclosed comprising an infrared source (14), an infrared detector (16) and an optical path between the infrared source and the infrared detector exposed to the environment of said sensor, wherein the optical path comprises a CO x -binding medium (20, 20'), said medium being substantially transparent to infrared radiation having a wave number in the range of 2,000-2,500 cm -1 .

    Abstract translation: 公开了一种红外CO x传感器(10),其包括红外源(14),红外检测器(16)和暴露于所述传感器的环境的红外源和红外检测器之间的光路,其中光路包括 CO x-结合介质(20,20'),所述介质对于波数在2,000-2,500cm -1范围内的红外辐射基本上是透明的。

    Semiconductor device having au-cu electrodes and method of manufacturing semiconductor device
    2.
    发明公开
    Semiconductor device having au-cu electrodes and method of manufacturing semiconductor device 有权
    Halbleitervorrichtung mit Au-Cu-Elektroden und Verfahren zur Herstellung der Halbleitervorrichtung

    公开(公告)号:EP2557420A1

    公开(公告)日:2013-02-13

    申请号:EP11177457.6

    申请日:2011-08-12

    Applicant: NXP B.V.

    CPC classification number: G01N27/4145 G01N27/3275 H01L29/66

    Abstract: A method of manufacturing a biosensor semiconductor device is disclosed, in which copper electrodes at the major surface of the semiconductor devices are modified to form Au-Cu alloy electrodes. The modification is effected by depositing, typically by sputtering, a gold layer over the device, and then thermally treating the device to promote interdiffusion between the gold and the electrode copper and to alloy them. The alloyed gold-copper is removed from the surface of the device typically by CMP, leaving the exposed electrodes. Since the gold-copper alloy is harder than gold, the CMP process window is wider than would be the case of pure gold; moreover, since the electrode copper has been converted to a gold-copper alloy, it is more corrosion resistant than a conventional copper electrode. The electrodes are thus better compatible with further processing into a biosensor device than is the case with conventional copper electrodes, and the process windows are wider than for gold capped copper electrodes.
    A biosensor semiconductor device having Au-Cu alloy electrodes is also disclosed.

    Abstract translation: 公开了一种制造生物传感器半导体器件的方法,其中在半导体器件的主表面处的铜电极被改性以形成Au-Cu合金电极。 通过在器件上通常溅射金层,然后热处理器件以促进金和电极铜之间的相互扩散并使它们合金来实现该修改。 合金化的金 - 铜通常通过CMP从器件的表面去除,留下暴露的电极。 由于金铜合金比金更硬,CMP工艺窗口比纯金更宽; 此外,由于电极铜已经被转化为金 - 铜合金,因此比常规的铜电极更耐腐蚀。 因此,与常规铜电极的情况相比,电极与生物传感器装置的进一步处理更好地兼容,并且处理窗口比金盖铜电极宽。 还公开了具有Au-Cu合金电极的生物传感器半导体器件。

    Integrated circuit with CO2 sensor, composition and manufacturing method of such an IC
    3.
    发明公开
    Integrated circuit with CO2 sensor, composition and manufacturing method of such an IC 有权
    制造这种集成电路的一种集成电路,包括CO 2传感器,组合物和方法

    公开(公告)号:EP2853889A1

    公开(公告)日:2015-04-01

    申请号:EP13186140.3

    申请日:2013-09-26

    Applicant: NXP B.V.

    Abstract: Disclosed is an integrated circuit (100) comprising a semiconductor substrate (110) carrying a plurality of circuit elements (111); and a carbon dioxide sensor (120) over said semiconductor substrate, said sensor comprising a pair of electrodes (122, 124) laterally separated from each other; and a carbon dioxide (CO 2 ) permeable polymer matrix (128) at least partially covering the pair of electrodes, said matrix encapsulating a liquid (126) comprising an organic alcohol and an organic amidine or guanidine base. A composition for forming such a CO 2 sensor on the IC and a method of manufacturing such an IC are also disclosed.

    Abstract translation: 公开的是包括承载电路元件的多个(111)的半导体衬底(110)的集成电路(100); 和二氧化碳传感器(120)在所述半导体衬底,所述传感器包括电极(122,124)彼此横向分离的对; 和二氧化碳(CO 2)渗透性聚合物基质(128)至少部分地覆盖所述一对电极,所述基质包含包封在有机脒或胍碱有机醇的和液体(126)的。 一种用于形成寻求在IC在CO 2传感器,并且在IC检查制造的方法,因此是游离缺失盘组合物。

    Electrochemical sensor device
    4.
    发明公开
    Electrochemical sensor device 审中-公开
    Elektrochemische Sensorvorrichtung

    公开(公告)号:EP2759832A1

    公开(公告)日:2014-07-30

    申请号:EP13152411.8

    申请日:2013-01-23

    Applicant: NXP B.V.

    Abstract: There is disclosed an electrochemical sensor device (10) comprising: an integrated electrochemical sensor element (12) having: a substrate (20); first (16) and second (18) electrodes formed on the upper surface of the substrate (20); and an electrolyte layer (19) formed on the first (16) and second (18) electrodes so as to electrically contact both the first (16) and second (18) electrodes; and a sensor integrated circuit (14) electrically connected to the first (16) and second (18) electrodes of the integrated electrochemical sensor element (12). The integrated electrochemical sensor element (12) and the sensor integrated circuit (14) are provided in a single package.

    Abstract translation: 公开了一种电化学传感器装置(10),包括:集成的电化学传感器元件(12),具有:基底(20); 形成在基板(20)的上表面上的第一(16)和第二(18)电极; 和形成在第一电极(16)和第二电极(18)上的电解质层(19),以便电接触第一电极(16)和第二电极(18); 以及电连接到所述集成电化学传感器元件(12)的所述第一(16)和第二(18)电极的传感器集成电路(14)。 集成电化学传感器元件(12)和传感器集成电路(14)设置在单个封装中。

    Detection of an acidic (CO2, SO2) or basic (NH3) gas by monitoring a dielectric relaxation of a reaction product (for example of a zwitterion) of an acid-base reaction of the gas with a chemical compound (like DBU) using an integrated circuit
    5.
    发明公开
    Detection of an acidic (CO2, SO2) or basic (NH3) gas by monitoring a dielectric relaxation of a reaction product (for example of a zwitterion) of an acid-base reaction of the gas with a chemical compound (like DBU) using an integrated circuit 审中-公开
    酸性(CO2,SO2)的检测或碱性(NH 3)气体通过使用集成电路观察反应产物的介电弛豫(例如,两性离子)的气体与化学物质(如DBU)的酸/碱反应

    公开(公告)号:EP2743691A1

    公开(公告)日:2014-06-18

    申请号:EP12197186.5

    申请日:2012-12-14

    Applicant: NXP B.V.

    Abstract: An integrated circuit arrangement (100) is disclosed comprising a substrate (210); and a gas such as a CO 2 sensor comprising spatially separated electrodes including at least an excitation electrode (132) and a sensing electrode (142); a volume (120) in contact with said pair of electrodes, said volume including a chemical compound for forming a reaction product with said gas in an acid-base reaction; a signal generator (212) conductively coupled to the excitation electrode and adapted to provide the excitation electrode with a microwave signal; and a signal detector (214) conductively coupled to the sensing electrode and adapted to detect a change in said microwave signal caused by a permittivity change in said volume, said permittivity change being caused by said reaction product. A device comprising such an IC arrangement and a method of sensing the presence of a gas using such an IC arrangement are also disclosed.

    Abstract translation: 集成电路装置(100)的底物是游离缺失盘,包括一(210); 和试验作为CO 2传感器,包括在空间上的气体分离的电极包括激励电极(132)和感测(142)的至少电极; 在与所述一对电极,所述体积包括用于进行酸 - 碱反应形成与所述气体的反应产物的化学化合物的接触的体积(120); 一个信号发生器(212),导电地耦合到所述激励电极和angepasst提供一种具有微波信号的激励电极; 并导电地耦合到所述感测电极和angepasst检测在由介电常数的变化引起的所述微波信号的变化的信号检测器(214)所述容积,说介电常数变化由所述反应产物引起的。 因此,包括寻求IC装置和感测使用搜索到IC装置中的气体的存在的方法的装置是游离缺失盘。

    Combination sensor for pressure sensing and determining the composition of a gas
    6.
    发明公开
    Combination sensor for pressure sensing and determining the composition of a gas 审中-公开
    Kombinationssensor zur Druckmessung und feststellung der Zusammensetzung eines gas

    公开(公告)号:EP2957905A1

    公开(公告)日:2015-12-23

    申请号:EP15172516.5

    申请日:2015-06-17

    Applicant: NXP B.V.

    Abstract: One example discloses a combination sensor, comprising: a pressure sensor having an actuator which has a first resonant frequency; a cavity, coupled to the pressure sensor and able to receive a substance; wherein the cavity, in an absence of the substance, has a second resonant frequency in response to excitation by the actuator; wherein the cavity, in a presence of the substance, has a third resonant frequency in response to excitation by the actuator; wherein the first resonant frequency differs from the second and third resonant frequencies; and a sensor circuit which outputs a substance detected signal in response to the third resonant frequency in the cavity.

    Abstract translation: 一个实例公开了一种组合传感器,包括:压力传感器,具有具有第一谐振频率的致动器; 耦合到压力传感器并且能够接收物质的空腔; 其中在不存在所述物质的情况下,所述空腔响应于致动器的激励而具有第二谐振频率; 其中在所述物质存在的情况下,所述空腔响应于致动器的激励而具有第三共振频率; 其中所述第一谐振频率与所述第二和第三谐振频率不同; 以及传感器电路,其响应于腔中的第三谐振频率输出物质检测信号。

    Electrochemical sensor
    8.
    发明公开
    Electrochemical sensor 审中-公开
    Elektrochemischer传感器

    公开(公告)号:EP2913667A1

    公开(公告)日:2015-09-02

    申请号:EP15151261.3

    申请日:2015-01-15

    Applicant: NXP B.V.

    Abstract: An electrochemical sensor for sensing a target substance is disclosed. In one example, the sensor discloses an electrolyte matrix, wherein the matrix reposits an electrolyte; a working electrode coupled to the electrolyte matrix at a first location; a counter electrode coupled to the electrolyte matrix at a second location; an electrical circuit, coupled to the working electrode and the counter electrode, and capable of generating an output signal in response to an electrical current which flows between the working electrode and the counter electrode in response to a presence of the target substance.

    Abstract translation: 公开了一种用于感测目标物质的电化学传感器。 在一个示例中,传感器公开了一种电解质基质,其中基质储存电解质; 在第一位置处耦合到所述电解质基质的工作电极; 在第二位置处耦合到电解质基质的对电极; 耦合到工作电极和对电极的电路,并响应于目标物质的存在而响应于在工作电极和对电极之间流动的电流产生输出信号。

    Integrated circuit, system and manufacturing method
    9.
    发明公开
    Integrated circuit, system and manufacturing method 审中-公开
    Integrierte Schaltung,系统和Herstellungsverfahren

    公开(公告)号:EP2840369A1

    公开(公告)日:2015-02-25

    申请号:EP13180893.3

    申请日:2013-08-19

    Applicant: NXP B.V.

    CPC classification number: H01L27/14649 G01J5/024 G01J5/20

    Abstract: Disclosed is an integrated circuit (100) comprising a cavity (52) defined over a substrate (10) and a membrane (42, 50) arranged to be exposed to infrared radiation suspended over said cavity, said membrane comprising a conductive body (42) and an infrared radiation absorbing polymer (50) covering said conductive body such that the conductive body is shielded from said radiation by said polymer, said conductive body being conductively coupled to a pair of electrodes. A body detection system including such an IC and a method of manufacturing such an IC are also disclosed.

    Abstract translation: 公开了一种集成电路(100),其包括限定在衬底(10)上的空腔(52)和布置成暴露于悬挂在所述空腔上的红外辐射的膜(42,50),所述膜包括导电体(42) 以及覆盖所述导电体的红外辐射吸收聚合物(50),使得所述导电体被所述聚合物屏蔽所述辐射,所述导电体与一对电极导电耦合。 还公开了一种包括这种IC的身体检测系统及其制造方法。

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