Abstract:
An infrared CO x sensor (10) is disclosed comprising an infrared source (14), an infrared detector (16) and an optical path between the infrared source and the infrared detector exposed to the environment of said sensor, wherein the optical path comprises a CO x -binding medium (20, 20'), said medium being substantially transparent to infrared radiation having a wave number in the range of 2,000-2,500 cm -1 .
Abstract translation:公开了一种红外CO x传感器(10),其包括红外源(14),红外检测器(16)和暴露于所述传感器的环境的红外源和红外检测器之间的光路,其中光路包括 CO x-结合介质(20,20'),所述介质对于波数在2,000-2,500cm -1范围内的红外辐射基本上是透明的。
Abstract:
A method of manufacturing a biosensor semiconductor device is disclosed, in which copper electrodes at the major surface of the semiconductor devices are modified to form Au-Cu alloy electrodes. The modification is effected by depositing, typically by sputtering, a gold layer over the device, and then thermally treating the device to promote interdiffusion between the gold and the electrode copper and to alloy them. The alloyed gold-copper is removed from the surface of the device typically by CMP, leaving the exposed electrodes. Since the gold-copper alloy is harder than gold, the CMP process window is wider than would be the case of pure gold; moreover, since the electrode copper has been converted to a gold-copper alloy, it is more corrosion resistant than a conventional copper electrode. The electrodes are thus better compatible with further processing into a biosensor device than is the case with conventional copper electrodes, and the process windows are wider than for gold capped copper electrodes. A biosensor semiconductor device having Au-Cu alloy electrodes is also disclosed.
Abstract:
Disclosed is an integrated circuit (100) comprising a semiconductor substrate (110) carrying a plurality of circuit elements (111); and a carbon dioxide sensor (120) over said semiconductor substrate, said sensor comprising a pair of electrodes (122, 124) laterally separated from each other; and a carbon dioxide (CO 2 ) permeable polymer matrix (128) at least partially covering the pair of electrodes, said matrix encapsulating a liquid (126) comprising an organic alcohol and an organic amidine or guanidine base. A composition for forming such a CO 2 sensor on the IC and a method of manufacturing such an IC are also disclosed.
Abstract:
There is disclosed an electrochemical sensor device (10) comprising: an integrated electrochemical sensor element (12) having: a substrate (20); first (16) and second (18) electrodes formed on the upper surface of the substrate (20); and an electrolyte layer (19) formed on the first (16) and second (18) electrodes so as to electrically contact both the first (16) and second (18) electrodes; and a sensor integrated circuit (14) electrically connected to the first (16) and second (18) electrodes of the integrated electrochemical sensor element (12). The integrated electrochemical sensor element (12) and the sensor integrated circuit (14) are provided in a single package.
Abstract:
An integrated circuit arrangement (100) is disclosed comprising a substrate (210); and a gas such as a CO 2 sensor comprising spatially separated electrodes including at least an excitation electrode (132) and a sensing electrode (142); a volume (120) in contact with said pair of electrodes, said volume including a chemical compound for forming a reaction product with said gas in an acid-base reaction; a signal generator (212) conductively coupled to the excitation electrode and adapted to provide the excitation electrode with a microwave signal; and a signal detector (214) conductively coupled to the sensing electrode and adapted to detect a change in said microwave signal caused by a permittivity change in said volume, said permittivity change being caused by said reaction product. A device comprising such an IC arrangement and a method of sensing the presence of a gas using such an IC arrangement are also disclosed.
Abstract:
One example discloses a combination sensor, comprising: a pressure sensor having an actuator which has a first resonant frequency; a cavity, coupled to the pressure sensor and able to receive a substance; wherein the cavity, in an absence of the substance, has a second resonant frequency in response to excitation by the actuator; wherein the cavity, in a presence of the substance, has a third resonant frequency in response to excitation by the actuator; wherein the first resonant frequency differs from the second and third resonant frequencies; and a sensor circuit which outputs a substance detected signal in response to the third resonant frequency in the cavity.
Abstract:
An electrochemical sensor for sensing a target substance is disclosed. In one example, the sensor discloses an electrolyte matrix, wherein the matrix reposits an electrolyte; a working electrode coupled to the electrolyte matrix at a first location; a counter electrode coupled to the electrolyte matrix at a second location; an electrical circuit, coupled to the working electrode and the counter electrode, and capable of generating an output signal in response to an electrical current which flows between the working electrode and the counter electrode in response to a presence of the target substance.
Abstract:
Disclosed is an integrated circuit (100) comprising a cavity (52) defined over a substrate (10) and a membrane (42, 50) arranged to be exposed to infrared radiation suspended over said cavity, said membrane comprising a conductive body (42) and an infrared radiation absorbing polymer (50) covering said conductive body such that the conductive body is shielded from said radiation by said polymer, said conductive body being conductively coupled to a pair of electrodes. A body detection system including such an IC and a method of manufacturing such an IC are also disclosed.