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1.发明公开REFERENCE LEAK GENERATING DEVICE AND ULTRA-FINE LEAK TESTING DEVICE USING SAME 有权REFERENZLECKERZEUGUNGSVORRICHTUNG VORRICHTUNG ZURÜBERPRÜFUNGULTRAFEINER LECKS DAMIT
公开(公告)号：EP2924411A1
公开(公告)日：2015-09-30
申请号：EP13857007.2
申请日：2013-11-12
Inventor： YOSHIDA Hajime , ARAI Kenta , KOBATA Tokihiko
CPC classification number: G01L27/002 , B81B7/0009 , B81B2201/05 , G01M3/007 , G01M3/207 , G01M3/26
Abstract: There is provided a reference leak generating device capable of precisely generating an ultra-fine reference leak. The reference leak generating device adapted to be connected to an upstream side of a measurement chamber includes a chamber connected to the measurement chamber through an orifice or a porous plug having a molecular flow conductance C and a pressure to establish molecular flow conditions which are known in advance, and is characterized in that a pressure p 1 of testing gas to be introduced into the chamber is precisely determined by using a static expansion method once or more times, and a leak rate of a reference leak at the pressure p 1 is obtained in accordance with a product of C and P 1 .
Abstract translation: 提供了能够精确地产生超细参考泄漏的参考泄漏产生装置。 适于连接到测量室的上游侧的参考泄漏产生装置包括通过孔或具有分子流导电C和压力的孔的多孔塞连接到测量室的室，以建立分子流动条件 并且其特征在于，通过使用静态膨胀法一次或多次精确地确定要引入室中的测试气体的压力p 1，并且获得在压力p 1处的参考泄漏的泄漏率 符合C和P 1的产品。
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2.发明授权REFERENCE LEAK GENERATING DEVICE AND ULTRA-FINE LEAK TESTING DEVICE USING SAME 有权参考泄漏产生装置和使用该装置的超细泄漏测试装置
公开(公告)号：EP2924411B1
公开(公告)日：2017-12-27
申请号：EP13857007.2
申请日：2013-11-12
Inventor： YOSHIDA Hajime , ARAI Kenta , KOBATA Tokihiko
CPC classification number: G01L27/002 , B81B7/0009 , B81B2201/05 , G01M3/007 , G01M3/207 , G01M3/26
Abstract: There is provided a reference leak generating device capable of precisely generating an ultra-fine reference leak. The reference leak generating device adapted to be connected to an upstream side of a measurement chamber includes a chamber connected to the measurement chamber through an orifice or a porous plug having a molecular flow conductance C and a pressure to establish molecular flow conditions which are known in advance, and is characterized in that a pressure p 1 of testing gas to be introduced into the chamber is precisely determined by using a static expansion method once or more times, and a leak rate of a reference leak at the pressure p 1 is obtained in accordance with a product of C and P 1 .
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