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    METHOD FOR ACQUIRING SIMULTANEOUS AND OVERLAPPING OPTICAL AND CHARGED PARTICLE BEAM IMAGES
    1.
    发明申请
    METHOD FOR ACQUIRING SIMULTANEOUS AND OVERLAPPING OPTICAL AND CHARGED PARTICLE BEAM IMAGES 审中-公开
    获取同时和重叠光学和充电粒子束图像的方法

    公开(公告)号：WO2012018800A3

    公开(公告)日：2012-04-26

    申请号：PCT/US2011046247

    申请日：2011-08-02

    Applicant: MOORE THOMAS ,  HARTFIELD CHERYL ,  MAGEL GREGORY ,  OMNIPROBE INC

    Inventor： MOORE THOMAS ,  HARTFIELD CHERYL ,  MAGEL GREGORY

    IPC: G01B11/00 ,  G01B9/04 ,  H01J37/26

    CPC classification number: H01J37/28 ,  G01N23/2251 ,  G01N2223/10 ,  G01N2223/418 ,  G02B21/002 ,  G02B21/367 ,  H01J37/228 ,  H01J2237/2445

    Abstract: This disclosure relates to a method and apparatus for producing multiple pixel-by-pixel simultaneous and overlapping images of a sample (100) in a microscope (10) with multiple imaging beams (120, 130). A scanning electron microscope, a focused ion-beam microscope (10), or a microscope having both beams (120, 130), also has an optical microscope (140). A region of interest (210) on a sample (100) is scanned by both charged-particle (120) and optical (130) beams, either by moving the sample (100) beneath the beams (120, 130) by use of a mechanical stage (110), or by synchronized scanning of the stationary sample (100) by the imaging beams (120, 130), or by independently scanning the sample (100) with the imaging beams (120, 130) and recording imaging signals so as to form pixel-by-pixel simultaneous and overlapping images.

    Abstract translation: 本公开涉及一种用于在具有多个成像光束（120,130）的显微镜（10）中产生样品（100）的多个逐像素同时和重叠图像的方法和装置。 扫描电子显微镜，聚焦离子束显微镜（10）或具有两个光束（120,130）的显微镜也具有光学显微镜（140）。 无论是通过将样品（100）在梁（120,130）下方移动，通过两个带电粒子（120）和光学（130）两个光束来扫描样品（100）上的感兴趣区域（210） 或者通过成像光束（120,130）对固定样品（100）进行同步扫描，或者通过用成像光束（120,130）独立地扫描样品（100），并记录成像信号，从而 以形成逐像素同时和重叠的图像。

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