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1.发明申请METHOD FOR HIGH RESOLUTION PATTERNING USING LOW-ENERGY ELECTRON BEAM, PROCESS FOR PREPARING NANO DEVICE USING THE METHOD 审中-公开使用低能电子束的高分辨率图案的方法，使用该方法制备纳米器件的方法
公开(公告)号：WO2003023518A1
公开(公告)日：2003-03-20
申请号：PCT/KR2002/001715
申请日：2002-09-12
Applicant: POSTECH FOUNDATION , PARK, Joon Won , LA, Young-Hye , KIM, Bongsoo , KANG, Tai-Hee , KIM, Ki-Jeong
Inventor： PARK, Joon Won , LA, Young-Hye , KIM, Bongsoo , KANG, Tai-Hee , KIM, Ki-Jeong
IPC: G03F7/00
CPC classification number: G03F7/2037 , B82Y30/00 , G03F7/0045 , G03F7/0755 , G03F7/165 , G03F7/2039
Abstract: A method for high resolution patterming using low-energy electron beam and a method for manufacturing a nano device using the high resolution pattern are provided. The method involves forming an aromatic imine molecular layer having a substituted or unsubstituted terminal ring on a substrate; selectively changing imine bonds structurally in the aromatic imine molecular layer, and hydrolyzing the aromatic imine molecular layer.
Abstract translation: 提供了一种使用低能电子束的高分辨率图案的方法和使用该高分辨率图案来制造纳米器件的方法。 该方法包括在基材上形成具有取代或未取代的末端环的芳族亚胺分子层; 在芳族亚胺分子层中结构地选择性地改变亚胺键，并水解芳族亚胺分子层。
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2.发明申请METHOD FOR HIGH RESOLUTION PATTERNING USING SOFT X-RAY, PROCESS FOR PREPARING NANO DEVICE USING THE METHOD 审中-公开使用软X射线的高分辨率图案的方法，使用该方法制备纳米器件的方法
公开(公告)号：WO2003023517A1
公开(公告)日：2003-03-20
申请号：PCT/KR2002/001714
申请日：2002-09-12
Applicant: POSTECH FOUNDATION , PARK, Joon Won , LA, Young-Hye , MOON, Joong Ho , KIM, Bongsoo , KANG, Tai-Hee , KIM, Ki-Jeong
Inventor： PARK, Joon Won , LA, Young-Hye , MOON, Joong Ho , KIM, Bongsoo , KANG, Tai-Hee , KIM, Ki-Jeong
IPC: G03F7/00
CPC classification number: G03F7/0045 , B81B2201/0214 , B81C1/00031 , B81C2201/0149 , B81C2201/0198 , B82Y10/00 , B82Y30/00 , G03F7/0755 , G03F7/165 , G03F7/2039 , H01L21/0337 , H01L21/312 , Y10S430/168 , Y10T428/261
Abstract: A method for nano-scale high resolution patterning of self-assembled monolayer using soft X-rays is provided. The method involves forming an aromatic imine molecular layer having substituents at its terminal rings on a substrate, selectively cleaving bonds to the subsituents of the aromatic imine molecular layer, and hydrolyzing the aromatic imine molecular layer.
Abstract translation: 提供了使用软X射线进行自组装单层纳米级高分辨率图案化的方法。 该方法包括在底物上的末端环上形成具有取代基的芳族亚胺分子层，选择性地切割与芳族亚胺分子层的取代基的键，并水解芳族亚胺分子层。
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3.发明公开METHOD FOR HIGH RESOLUTION PATTERNING USING LOW-ENERGY ELECTRON BEAM, PROCESS FOR PREPARING NANO DEVICE USING THE METHOD 审中-公开使用电子束低能量法对于高分辨率结构，工艺用于制造部件NANO有顺序
公开(公告)号：EP1428075A1
公开(公告)日：2004-06-16
申请号：EP02798055.6
申请日：2002-09-12
Applicant: Postech Foundation
Inventor： PARK, Joon Won , LA, Young-Hye , KIM, Bongsoo , KANG, Tai-Hee , KIM, Ki-Jeong
IPC: G03F7/00
CPC classification number: G03F7/2037 , B82Y30/00 , G03F7/0045 , G03F7/0755 , G03F7/165 , G03F7/2039
Abstract: A method for high resolution patterming using low-energy electron beam and a method for manufacturing a nano device using the high resolution pattern are provided. The method involves forming an aromatic imine molecular layer having a substituted or unsubstituted terminal ring on a substrate; selectively changing imine bonds structurally in the aromatic imine molecular layer, and hydrolyzing the aromatic imine molecular layer.
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4.发明公开METHOD FOR HIGH RESOLUTION PATTERNING USING SOFT X-RAY, PROCESS FOR PREPARING NANO DEVICE USING THE METHOD 审中-公开法与软X射线高分辨率结构，工艺用于制造部件nano采用的程序
公开(公告)号：EP1428074A1
公开(公告)日：2004-06-16
申请号：EP02798054.9
申请日：2002-09-12
Applicant: Postech Foundation
Inventor： PARK, Joon Won , LA, Young-Hye , MOON, Joong Ho , KIM, Bongsoo , KANG, Tai-Hee , KIM, Ki-Jeong
IPC: G03F7/00
CPC classification number: G03F7/0045 , B81B2201/0214 , B81C1/00031 , B81C2201/0149 , B81C2201/0198 , B82Y10/00 , B82Y30/00 , G03F7/0755 , G03F7/165 , G03F7/2039 , H01L21/0337 , H01L21/312 , Y10S430/168 , Y10T428/261
Abstract: A method for nano-scale high resolution patterning of self-assembled monolayer using soft X-rays is provided. The method involves forming an aromatic imine molecular layer having substituents at its terminal rings on a substrate, selectively cleaving bonds to the subsituents of the aromatic imine molecular layer, and hydrolyzing the aromatic imine molecular layer
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