ANCHORING CONDUCTIVE MATERIAL IN SEMICONDUCTOR DEVICES
    2.
    发明申请
    ANCHORING CONDUCTIVE MATERIAL IN SEMICONDUCTOR DEVICES 审中-公开
    半导体器件中的导电材料

    公开(公告)号:WO2017004316A3

    公开(公告)日:2017-02-16

    申请号:PCT/US2016040283

    申请日:2016-06-30

    Applicant: QUALCOMM INC

    CPC classification number: H01L28/60 H01L23/5223 H01L23/53228 H01L28/75

    Abstract: Copper (Cu) grain boundaries can move during a thermal cycle resulting in the Cu grain position being offset. Such Cu pumping can disturb the surface of a bottom metal, and can physically break a dielectric of a metal-insulator-metal (MIM) capacitor (410). By capping the bottom metal (420) under the MIM capacitor with an anchoring cap (425), Cu pumping is reduced or eliminated and the reliability of the MIM capacitor is improved.

    Abstract translation: 铜(Cu)晶界可以在热循环期间移动,导致Cu晶粒位置偏移。 这种Cu泵送可以干扰底部金属的表面,并且可以物理地破坏金属 - 绝缘体 - 金属(MIM)电容器(410)的电介质。 通过使用固定帽(425)将MIM电容器下方的底部金属(420)加盖,减少或消除了Cu泵浦,提高了MIM电容器的可靠性。

    VOLTAGE SWITCHABLE DIELECTRIC FOR DIE-LEVEL ELECTROSTATIC DISCHARGE (ESD) PROTECTION
    3.
    发明申请
    VOLTAGE SWITCHABLE DIELECTRIC FOR DIE-LEVEL ELECTROSTATIC DISCHARGE (ESD) PROTECTION 审中-公开
    用于模块级静电放电(ESD)保护的电压可切换介质

    公开(公告)号:WO2012135832A2

    公开(公告)日:2012-10-04

    申请号:PCT/US2012031861

    申请日:2012-04-02

    Abstract: A voltage-switchable dielectric layer may be employed on a die for electrostatic discharge (ESD) protection. The voltage-switchable dielectric layer functions as a dielectric layer between terminals of the die during normal operation of the die. When ESD events occur at the terminals of the die, a high voltage between the terminals switches the voltage-switchable dielectric layer into a conducting layer to allow current to discharge to a ground terminal of the die without the current passing through circuitry of the die. Thus, damage to the circuitry of the die is reduced or prevented during ESD events on dies with the voltage-switchable dielectric layer. The voltage-switchable dielectric layer may be deposited on the back side of a die for protection during stacking with a second die to form a stacked IC.

    Abstract translation: 可以在用于静电放电(ESD)保护的管芯上采用电压可切换介电层。 在模具的正常操作期间,电压可切换介电层用作裸片的端子之间的介电层。 当ESD事件发生在管芯的端子处时,端子之间的高电压将电压可切换介电层切换为导电层,以允许电流放电至管芯的接地端子,而电流不通过管芯的电路。 因此,在具有电压可切换电介质层的管芯上的ESD事件期间,减小或防止了管芯电路的损坏。 可以在用第二管芯堆叠期间将电压可切换介电层沉积在管芯的背侧以用于保护以形成堆叠式IC。

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