NEGATIVE RESISTANCE DIODE AND PROCESS FOR MAKING SAME

    公开(公告)号:CA1066429A

    公开(公告)日:1979-11-13

    申请号:CA256973

    申请日:1976-07-14

    Applicant: RAYTHEON CO

    Abstract: NEGATIVE RESISTANCE DIODE AND PROCESS FOR MAKING SAME A modified Read-type diode having an extremely thin doping spike and with the electric field in the drift region terminated before the buffer zone. The buffer zone and a drift region are first grown upon a doped semiconductor substrate using epitaxial vapor deposition growth techniques employing a furnace tube within a multiple temperature zone reaction furnace. The doping spike is produced by injecting under pressure a fixed predetermined volume of dopant into the furnace tube. An avalanche region is grown over the doping spike and a Schottky barrier contact or semiconducting material of the opposite conductivity type grown over the avalanche region. Avalanche regions having a length less than 15% of the total active length of the device and doping spikes having a width of 500.ANG. or less are disclosed in a high-efficiency device.

Patent Agency Ranking