公开(公告)号：JP2005099793A

公开(公告)日：2005-04-14

申请号：JP2004257715

申请日：2004-09-03

Applicant: Reflectivity Inc ,  リフレクティヴィティー, インク.

Inventor： HUIBERS ANDREW G ,  ILKOV FEDOR ,  PATEL SATYADEV ,  RICHARDS PETER W ,  STOCKTON JOHN

IPC: B81B3/00 ,  B81B7/02 ,  B81B7/04 ,  B81C1/00 ,  G02B26/08 ,  G02B27/18 ,  G03B21/00 ,  G03B21/10 ,  H04N3/08 ,  H04N5/74

CPC classification number: G02B26/0841 ,  B81B7/0067 ,  G02B26/0833 ,  G03B21/28 ,  G03F7/70291 ,  H04N5/7458

Abstract: PROBLEM TO BE SOLVED: To minimize diffracted light in a switching direction with respect to a mobile micromirror and a micromirror array in a projection display device or the like. SOLUTION: A micromirror being not rectangular is adopted in order to minimize diffraction of light in the switching direction, namely, diffraction of light to a light receiving cone of a light condensing system. In order to minimize the cost of an irradiation system and the size of a display unit, a light source is arranged perpendicularly to rows (or columns) of an array or perpendicularly to a side of a frame demarcating an effective area of the array. Incident light is not practically perpendicular to side surfaces of individual micromirrors in the array. Perpendicular side surfaces diffract incident light in the direction of micromirror switching. This light diffraction decreases the contrast ratio of the micromirror, and thus an improved and more compact system is obtained. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：为了使相对于投影显示装置等中的移动微镜和微镜阵列的切换方向的衍射光最小化。 解决方案：采用不是矩形的微镜，以便使切换方向上的光的衍射最小化，即将光衍射到聚光系统的光接收锥。 为了最小化照射系统的成本和显示单元的尺寸，光源垂直于阵列的行（或列）布置或垂直于框架边界排列阵列的有效区域。 入射光实际上并不垂直于阵列中各个微镜的侧表面。 垂直侧面沿微镜切换方向衍射入射光。 该光衍射降低了微反射镜的对比度，从而获得了改进的和更紧凑的系统。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2005122145A

公开(公告)日：2005-05-12

申请号：JP2004272332

申请日：2004-09-17

Applicant: Reflectivity Inc ,  リフレクティヴィティー, インク.

Inventor： HUIBERS ANDREW G ,  ILKOV FEDOR ,  PATEL SATYADEV ,  RICHARDS PETER W ,  STOCKTON JOHN

IPC: B81B3/00 ,  B81B7/02 ,  B81B7/04 ,  B81C1/00 ,  G02B26/08 ,  G02B27/18 ,  G03B21/00 ,  G03B21/10 ,  H04N3/08 ,  H04N5/74

CPC classification number: G02B26/0841 ,  B81B7/0067 ,  G02B26/0833 ,  G03B21/28 ,  G03F7/70291 ,  H04N5/7458

Abstract: PROBLEM TO BE SOLVED: To provide micromirrors to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of a collection optics. SOLUTION: In the present invention, a light source is placed orthogonal to the rows (or columns) of an array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. An incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in minimum light leakage into 'on' state even if the micromirrors are in the 'off' state to thereby improve a contrast ratio. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供微镜以使沿着切换方向的光衍射最小化，更具体地说，是将光衍射最小化到收集光学器件的接收锥中。 解决方案：在本发明中，将光源放置成与阵列的行（或列）正交，和/或将光源正交于限定阵列的有源区域的框架的侧面。 然而，入射光束虽然正交于有源区域的侧面，但是不是与阵列中的各个微镜的任何相当大部分的侧面正交。 正交侧使得入射光沿着微镜切换的方向衍射，即使微镜处于“关”状态，导致最小的光泄漏到“开”状态，从而提高对比度。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2006178447A

公开(公告)日：2006-07-06

申请号：JP2005353848

申请日：2005-12-07

Applicant: Reflectivity Inc ,  リフレクティヴィティー, インク.

Inventor： HUIBERS ANDREW G ,  ILKOV FEDOR ,  PATEL SATYADEV ,  RICHARDS PETER W ,  STOCKTON JOHN

IPC: G02B26/08 ,  B81B3/00 ,  B81B7/02 ,  B81B7/04 ,  B81C1/00 ,  G02B27/18 ,  G03B21/00 ,  G03B21/10 ,  H04N3/08 ,  H04N5/74

CPC classification number: G02B26/0841 ,  B81B7/0067 ,  G02B26/0833 ,  G03B21/28 ,  G03F7/70291 ,  H04N5/7458

Abstract: PROBLEM TO BE SOLVED: To provide micromirrors which are not rectangular to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of a collection optics. SOLUTION: A light source 114 is placed orthogonal to the rows (or columns) of the array, and/or the light source 114 is placed orthogonal to a side of the frame defining the active area 94 of the array. An incident light beam 116, though orthogonal to the sides of the active area, is not substantially orthogonal to any side surface of the individual micromirrors in the array. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供不是矩形的微镜，以使沿着切换方向的光衍射最小化，更具体地说，是将光学衍射更好地聚集到收集光学器件的接收锥体中。 解决方案：将光源114放置成与阵列的行（或列）正交，和/或将光源114正交于限定阵列的有源区域94的框架的侧面。 入射光束116虽然与有源区域的侧面正交，但基本上不与阵列中的各个微镜的任何侧表面正交。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005122146A

公开(公告)日：2005-05-12

申请号：JP2004272333

申请日：2004-09-17

Applicant: Reflectivity Inc ,  リフレクティヴィティー, インク.

Inventor： HUIBERS ANDREW G ,  ILKOV FEDOR ,  PATEL SATYADEV ,  RICHARDS PETER W ,  STOCKTON JOHN

IPC: B81B3/00 ,  B81B7/02 ,  B81B7/04 ,  B81C1/00 ,  G02B26/08 ,  G02B27/18 ,  G03B21/00 ,  G03B21/10 ,  H04N3/08 ,  H04N5/74

CPC classification number: G02B26/0841 ,  B81B7/0067 ,  G02B26/0833 ,  G03B21/28 ,  G03F7/70291 ,  H04N5/7458

Abstract: PROBLEM TO BE SOLVED: To provide micromirrors which are not rectangular to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of a collection optics. SOLUTION: A light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. An incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. This structure and design suppress the light diffraction and improve contrast ratio, and the arrangement of the light source to micromirror array results in a more compact system. The micromirrors pivot in opposite direction to on and off positions, where the movement to the on position is greater than movement to the off position. A package has a window that is not parallel to the substrate upon which the micromirrors are formed. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供不是矩形的微镜，以使沿着切换方向的光衍射最小化，更具体地说，是将光学衍射更好地聚集到收集光学器件的接收锥体中。 解决方案：将光源放置成与阵列的行（或列）正交，和/或将光源正交于限定阵列的有效区域的框架的侧面。 然而，入射光束虽然正交于有源区域的侧面，但是不是与阵列中的各个微镜的任何相当大部分的侧面正交。 这种结构和设计抑制了光衍射并提高了对比度，并且光源与微镜阵列的配置导致了更紧凑的系统。 微反射镜以相对于打开和关闭位置的方向枢转，其中到打开位置的移动大于移动到关闭位置。 封装具有不平行于形成微反射镜的基板的窗口。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：AU3298701A

公开(公告)日：2001-08-07

申请号：AU3298701

申请日：2001-01-25

Applicant: REFLECTIVITY INC

Inventor： TRUE RANDALL J ,  HUIBERS ANDREW G

IPC: B81B3/00 ,  G02B26/08 ,  H01L21/00 ,  G02B26/00

Abstract: A method is disclosed for forming a micromechanical device. The method includes providing a sacrificial layer on a substrate, providing a first structural layer on the sacrificial layer and removing a portion of the first structural layer in an area intended for a hinge. Then, a second structural layer is provided over the first layer and in the removed area for the hinge. The second layer is preferably deposited directly on the sacrificial layer in this area. Last, a metal layer is deposited and the various layers are patterned to define a micromechanical device having one portion (e.g. a mirror plate) more stiff than another portion (e.g. hinge). Because a portion of the reinforcing layer is removed, there is no overetching into the hinge material. Also, because the metal layer is provided last, materials can be provided at higher temperatures, and the method can be performed in accordance with CMOS foundry rules and thus can be performed in a CMOS foundry.

公开(公告)号：AU2003295983A8

公开(公告)日：2004-06-18

申请号：AU2003295983

申请日：2003-11-25

Applicant: REFLECTIVITY INC

Inventor： PATEL SATYADEV R ,  DUBOC ROBERT M ,  HUIBERS ANDREW G

IPC: B81B3/00 ,  B81B7/04 ,  G02B26/08 ,  G02B26/00

公开(公告)号：AU2002303842A1

公开(公告)日：2002-12-03

申请号：AU2002303842

申请日：2002-05-22

Applicant: REFLECTIVITY INC

Inventor： PATEL SATYADEV R ,  SCHAADT GREGORY P ,  HUIBERS ANDREW G ,  HEUREUX PETER J

IPC: B81B3/00 ,  C23F1/00 ,  H01L21/00 ,  H01L21/302 ,  H01L21/306 ,  H01L21/461 ,  B81C5/00 ,  G02B26/08

Abstract: An etching method, such as for forming a micromechanical device, is disclosed. One embodiment of the method is for releasing a micromechanical structure, comprising, providing a substrate; providing a sacrificial layer directly or indirectly on the substrate; providing one or more micromechanical structural layers on the sacrificial layer; performing a first etch to remove a portion of the sacrificial layer, the first etch comprising providing an etchant gas and energizing the etchant gas so as to allow the etchant gas to physically, or chemically and physically, remove the portion of the sacrificial layer; performing a second etch to remove additional sacrificial material in the sacrificial layer, the second etch comprising providing a gas that chemically but not physically etches the additional sacrificial material. Another embodiment of the method is for etching a silicon material on or within a substrate, comprising: performing a first etch to remove a portion of the silicon, the first etch comprising providing an etchant gas and energizing the etchant gas so as to allow the etchant gas to physically, or chemically and physically, remove the portion of silicon; performing a second etch to remove additional silicon, the second etch comprising providing an etchant gas that chemically but not physically etches the additional silicon.

公开(公告)号：AT339704T

公开(公告)日：2006-10-15

申请号：AT01905068

申请日：2001-01-25

Applicant: REFLECTIVITY INC

Inventor： HUIBERS ANDREW G ,  HEUREUX PETER J

IPC: B81B3/00 ,  B81B7/04 ,  G02B26/08

Abstract: A spatial light modulator having a substrate holding an array of deflectable (e.g. mirror) elements. The deflectable elements are deflectably coupled to the substrate via corresponding hinges, each hinge being disposed on a side of the deflectable element opposite to the side on which the substrate is disposed. By placing the hinge in this way the fill factor of the array is improved. The hinge can be provided flush against the deflectable element, or it can be provided with a gap between the deflectable element and the hinge. The hinge can be attached via one or more posts or walls connecting to the substrate, and with a flexible or deformable portion that is substantially or entirely hidden from view when viewed through the substrate (e.g. a glass substrate). In one embodiment, the hinge is connected to the undersides of both the substrate and the deflectable element, and connects towards a center part of the deflectable element. In this way, a longer hinge is provided thus reducing strain on any one part of the hinge. Advantages of the present invention include: (1) increased fill factor as the torsion hinge is hidden behind the reflective plate; (2) increased contrast due to fewer scattering optical surfaces exposed, and due to a greater ability to control their angle and geometry; and (3) increased geometric flexibility to optimize electro-mechanical performance and robustness with respect to manufacturing.

公开(公告)号：AU3298601A

公开(公告)日：2001-08-07

申请号：AU3298601

申请日：2001-01-25

Applicant: REFLECTIVITY INC

Inventor： HUIBERS ANDREW G ,  HEUREUX PETER J

IPC: B81B3/00 ,  B81B7/04 ,  G02B26/08

Abstract: A spatial light modulator having a substrate holding an array of deflectable (e.g. mirror) elements. The deflectable elements are deflectably coupled to the substrate via corresponding hinges, each hinge being disposed on a side of the deflectable element opposite to the side on which the substrate is disposed. By placing the hinge in this way the fill factor of the array is improved. The hinge can be provided flush against the deflectable element, or it can be provided with a gap between the deflectable element and the hinge. The hinge can be attached via one or more posts or walls connecting to the substrate, and with a flexible or deformable portion that is substantially or entirely hidden from view when viewed through the substrate (e.g. a glass substrate). In one embodiment, the hinge is connected to the undersides of both the substrate and the deflectable element, and connects towards a center part of the deflectable element. In this way, a longer hinge is provided thus reducing strain on any one part of the hinge. Advantages of the present invention include: (1) increased fill factor as the torsion hinge is hidden behind the reflective plate; (2) increased contrast due to fewer scattering optical surfaces exposed, and due to a greater ability to control their angle and geometry; and (3) increased geometric flexibility to optimize electro-mechanical performance and robustness with respect to manufacturing.

公开(公告)号：AU2003295983A1

公开(公告)日：2004-06-18

申请号：AU2003295983

申请日：2003-11-25

Applicant: REFLECTIVITY INC

Inventor： HUIBERS ANDREW G ,  PATEL SATYADEV R ,  DUBOC ROBERT M

IPC: B81B3/00 ,  B81B7/04 ,  G02B26/08