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1.发明公开METHODS AND SYSTEMS FOR FABRICATING PLATELETS OF A MONOCHROMATOR FOR X-RAY PHOTOELECTRON SPECTROSCOPY 审中-公开方法和系统血小板从单色X射线光电子能谱的生产
公开(公告)号：EP3036533A4
公开(公告)日：2017-03-15
申请号：EP14837703
申请日：2014-08-19
Applicant: REVERA INCORPORATED
Inventor： FANTON JEFFREY T , SMEDT RODNEY , SCHUELER BRUNO W , REED DAVID A
IPC: G01N23/22 , G01N23/227 , H01J37/256 , H01J49/48
CPC classification number: G01N23/20 , B23Q17/20 , G01N23/2273 , G21K1/06 , G21K2201/064 , H01J37/256 , Y10T29/49764 , Y10T29/49769 , Y10T29/49771 , Y10T29/53022
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2.发明公开METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-ANGLE X-RAY REFLECTANCE SCATTEROMETRY (XRS) 审中-公开VERFAHREN UND SYSTEME ZUR MESSUNG PERIODISCHER STRUKTUREN MIT MEHRFACHWINKEL-RÖNTGENREFLEXIONSSCATTEROMETRIE
公开(公告)号：EP3097383A4
公开(公告)日：2017-08-02
申请号：EP15739786
申请日：2015-01-16
Applicant: REVERA INCORPORATED
Inventor： POIS HEATH A , REED DAVID A , SCHUELER BRUNO W , SMEDT RODNEY , FANTON JEFFREY T
IPC: G01N23/201 , H01L21/66
CPC classification number: G01N23/201 , G01N2223/054 , H01L22/12
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