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Patent Agency Ranking
公开(公告)号：WO0006983A9
公开(公告)日：2000-05-25
申请号：PCT/US9916900
申请日：1999-07-27
Applicant: ROSEMOUNT AEROSPACE INC , BOGGS BRADLEY J , JUST MARCUS S , BANG CHRISTOPHER A , STARK KEVIN C
Inventor： BOGGS BRADLEY J , JUST MARCUS S , BANG CHRISTOPHER A , STARK KEVIN C
CPC classification number: G01L1/2293 , G01L1/18 , G01L9/0055
Abstract: A generally flexible strain gage comprising a strain sensing element, and a generally flexible substrate supporting the strain sensing element. The strain sensing element is made of single crystal or polycrystalline semiconducting material. The invention also includes a method for forming a generally flexible strain gage comprising the step of selecting a wafer having a portion of a base material and portion of a single crystal or polycrystalline semiconducting material located thereon. The method further comprises the steps of etching a strain sensing element out of the semiconducting material and forming a generally flexible substrate onto said sensing element.
Abstract translation: 包括应变感测元件的普通柔性应变计和支撑应变感测元件的大体柔性基底。 应变传感元件由单晶或多晶半导体材料制成。 本发明还包括一种用于形成大体柔性应变计的方法，包括选择具有一部分基材的晶片和位于其上的单晶或多晶半导体材料的部分的步骤。 该方法还包括以下步骤：从半导体材料中蚀刻应变感测元件，并将基本上柔性的衬底形成在所述感测元件上。
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公开(公告)号：AU5544699A
公开(公告)日：2000-02-21
申请号：AU5544699
申请日：1999-07-27
Applicant: ROSEMOUNT AEROSPACE INC
Inventor： BOGGS BRADLEY J , JUST MARCUS S , BANG CHRISTOPHER A , STARK KEVIN C
Abstract: A generally flexible strain gage comprising a strain sensing element, and a generally flexible substrate supporting the strain sensing element. The strain sensing element is made of single crystal or polycrystalline semiconducting material. The invention also includes a method for forming a generally flexible strain gage comprising the step of selecting a wafer having a portion of a base material and portion of a single crystal or polycrystalline semiconducting material located thereon. The method further comprises the steps of etching a strain sensing element out of the semiconducting material and forming a generally flexible substrate onto said sensing element.
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公开(公告)号：DE69909099D1
公开(公告)日：2003-07-31
申请号：DE69909099
申请日：1999-07-27
Applicant: ROSEMOUNT AEROSPACE INC
Inventor： BOGGS BRADLEY J , JUST MARCUS S , BANG CHRISTOPHER A , STARK KEVIN C
Abstract: A generally flexible strain gage comprising a strain sensing element, and a generally flexible substrate supporting the strain sensing element. The strain sensing element is made of single crystal or polycrystalline semiconducting material. The invention also includes a method for forming a generally flexible strain gage comprising the step of selecting a wafer having a portion of a base material and portion of a single crystal or polycrystalline semiconducting material located thereon. The method further comprises the steps of etching a strain sensing element out of the semiconducting material and forming a generally flexible substrate onto said sensing element.
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公开(公告)号：AU3585200A
公开(公告)日：2000-08-18
申请号：AU3585200
申请日：2000-01-28
Applicant: ROSEMOUNT AEROSPACE INC
Inventor： BANG CHRISTOPHER A , JUST MARCUS S , YANG XIAOFENG , NAGY MICHAEL L
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公开(公告)号：CA2338744A1
公开(公告)日：2000-02-10
申请号：CA2338744
申请日：1999-07-27
Applicant: ROSEMOUNT AEROSPACE INC
Inventor： BOGGS BRADLEY J , BANG CHRISTOPHER A , JUST MARCUS S , STARK KEVIN C
Abstract: A generally flexible strain gage comprising a strain sensing element, and a generally flexible substrate supporting the strain sensing element. The stra in sensing element is made of single crystal or polycrystalline semiconducting material. The invention also includes a method for forming a generally flexible strain gage comprising the step of selecting a wafer having a porti on of a base material and portion of a single crystal or polycrystalline semiconducting material located thereon. The method further comprises the steps of etching a strain sensing element out of the semiconducting material and forming a generally flexible substrate onto said sensing element.
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