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公开(公告)号：WO0006983A9
公开(公告)日：2000-05-25
申请号：PCT/US9916900
申请日：1999-07-27
Applicant: ROSEMOUNT AEROSPACE INC , BOGGS BRADLEY J , JUST MARCUS S , BANG CHRISTOPHER A , STARK KEVIN C
Inventor： BOGGS BRADLEY J , JUST MARCUS S , BANG CHRISTOPHER A , STARK KEVIN C
CPC classification number: G01L1/2293 , G01L1/18 , G01L9/0055
Abstract: A generally flexible strain gage comprising a strain sensing element, and a generally flexible substrate supporting the strain sensing element. The strain sensing element is made of single crystal or polycrystalline semiconducting material. The invention also includes a method for forming a generally flexible strain gage comprising the step of selecting a wafer having a portion of a base material and portion of a single crystal or polycrystalline semiconducting material located thereon. The method further comprises the steps of etching a strain sensing element out of the semiconducting material and forming a generally flexible substrate onto said sensing element.
Abstract translation: 包括应变感测元件的普通柔性应变计和支撑应变感测元件的大体柔性基底。 应变传感元件由单晶或多晶半导体材料制成。 本发明还包括一种用于形成大体柔性应变计的方法，包括选择具有一部分基材的晶片和位于其上的单晶或多晶半导体材料的部分的步骤。 该方法还包括以下步骤：从半导体材料中蚀刻应变感测元件，并将基本上柔性的衬底形成在所述感测元件上。
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公开(公告)号：WO9932865A3
公开(公告)日：1999-11-04
申请号：PCT/US9827388
申请日：1998-12-22
Applicant: ROSEMOUNT AEROSPACE INC , BANG CHRISTOPHER , NAGY MICHAEL L , YANG XIAOFENG , JUST MARCUS S
Inventor： BANG CHRISTOPHER , NAGY MICHAEL L , YANG XIAOFENG , JUST MARCUS S
CPC classification number: G01L19/143 , G01L19/0038 , G01L19/0645
Abstract: A media compatible package (100) for a pressure sensing device is made from a non-corrosive, highly chemical resistant material. The package includes a base (105) which holds a printed circuit board (115) having a pressure sensor (18) mounted thereon. A sealing member (45) is placed on the circuit board encircling the pressure sensor and a diaphragm (30) is disposed on the sealing member. A fluid port (130) is attached to the base and compressingly engages the diaphragm creating a sealed chamber around the pressure sensor. The sealed chamber is filled with a pressure transmissive fluid (21) such as oil through a fill hole (140) provided in the printed circuit board. This configuration allows the sensor package to be easily assembled with ordinary components and provides a design where all exposed surfaces of the package can be made from a highly non-corrosive material.
Abstract translation: 用于压力感测装置的介质兼容包（100）由非腐蚀性，高耐化学性的材料制成。 该包装件包括一个保持印刷电路板（115）的基座（105），该印刷电路板具有安装在其上的压力传感器（18）。 密封构件（45）被放置在环绕压力传感器的电路板上，并且隔膜（30）设置在密封构件上。 流体端口（130）附接到基座并且压缩地接合隔膜，从而产生围绕压力传感器的密封室。 该密封室通过设置在印刷电路板中的填充孔（140）填充有诸如油的压力传递流体（21）。 该配置允许传感器封装件容易地与普通部件组装，并且提供了一种设计，其中封装的所有暴露表面可以由高度非腐蚀性的材料制成。
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Patent Agency Ranking
公开(公告)号：AU5544699A
公开(公告)日：2000-02-21
申请号：AU5544699
申请日：1999-07-27
Applicant: ROSEMOUNT AEROSPACE INC
Inventor： BOGGS BRADLEY J , JUST MARCUS S , BANG CHRISTOPHER A , STARK KEVIN C
Abstract: A generally flexible strain gage comprising a strain sensing element, and a generally flexible substrate supporting the strain sensing element. The strain sensing element is made of single crystal or polycrystalline semiconducting material. The invention also includes a method for forming a generally flexible strain gage comprising the step of selecting a wafer having a portion of a base material and portion of a single crystal or polycrystalline semiconducting material located thereon. The method further comprises the steps of etching a strain sensing element out of the semiconducting material and forming a generally flexible substrate onto said sensing element.
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公开(公告)号：CA2315642A1
公开(公告)日：1999-07-01
申请号：CA2315642
申请日：1998-12-22
Applicant: ROSEMOUNT AEROSPACE INC
Inventor： BANG CHRISTOPHER , NAGY MICHAEL L , YANG XIAOFENG , JUST MARCUS S
Abstract: A media compatible package (100) for a pressure sensing device is made from a non-corrosive, highly chemical resistant material. The package includes a base (105) which holds a printed circuit board (115) having a pressure sensor (18) mounted thereon. A sealing member (45) is placed on the circuit board encircling the pressure sensor and a diaphragm (30) is disposed on the sealing member. A fluid port (130) is attached to the base and compressingly engages the diaphragm creating a sealed chamber around the pressure sensor. The sealed chamber is filled with a pressure transmissive fluid (21) such as oil through a fill hole (140) provided in the printed circuit board. This configuration allows the sensor package to be easily assembled with ordinary components and provides a design where all exposed surfaces of the package can be made from a highly non-corrosive material.
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公开(公告)号：DE69909099D1
公开(公告)日：2003-07-31
申请号：DE69909099
申请日：1999-07-27
Applicant: ROSEMOUNT AEROSPACE INC
Inventor： BOGGS BRADLEY J , JUST MARCUS S , BANG CHRISTOPHER A , STARK KEVIN C
Abstract: A generally flexible strain gage comprising a strain sensing element, and a generally flexible substrate supporting the strain sensing element. The strain sensing element is made of single crystal or polycrystalline semiconducting material. The invention also includes a method for forming a generally flexible strain gage comprising the step of selecting a wafer having a portion of a base material and portion of a single crystal or polycrystalline semiconducting material located thereon. The method further comprises the steps of etching a strain sensing element out of the semiconducting material and forming a generally flexible substrate onto said sensing element.
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公开(公告)号：AU3585200A
公开(公告)日：2000-08-18
申请号：AU3585200
申请日：2000-01-28
Applicant: ROSEMOUNT AEROSPACE INC
Inventor： BANG CHRISTOPHER A , JUST MARCUS S , YANG XIAOFENG , NAGY MICHAEL L
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公开(公告)号：CA2338744A1
公开(公告)日：2000-02-10
申请号：CA2338744
申请日：1999-07-27
Applicant: ROSEMOUNT AEROSPACE INC
Inventor： BOGGS BRADLEY J , BANG CHRISTOPHER A , JUST MARCUS S , STARK KEVIN C
Abstract: A generally flexible strain gage comprising a strain sensing element, and a generally flexible substrate supporting the strain sensing element. The stra in sensing element is made of single crystal or polycrystalline semiconducting material. The invention also includes a method for forming a generally flexible strain gage comprising the step of selecting a wafer having a porti on of a base material and portion of a single crystal or polycrystalline semiconducting material located thereon. The method further comprises the steps of etching a strain sensing element out of the semiconducting material and forming a generally flexible substrate onto said sensing element.
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