公开(公告)号：EP0729640A4

公开(公告)日：1997-07-16

申请号：EP95901916

申请日：1994-11-16

Applicant: SANDIA CORP

Inventor： BLOOMQUIST DOUGLAS D ,  BUCHHEIT RUDY ,  GREENLY JOHN B ,  MCINTYRE DALE C ,  NEAU EUGENE L ,  STINNETT REGAN W

IPC: B29C35/08 ,  B29C59/16 ,  C23C8/36 ,  C23C14/48 ,  G21K5/04 ,  H01J3/04 ,  H01J27/00 ,  H01J27/08 ,  H01J27/14 ,  H01J37/08 ,  H01L21/48

CPC classification number: C08J7/123 ,  B29C59/16 ,  B29C2035/0872 ,  C23C8/36 ,  C23C14/48 ,  H01J27/14 ,  H01J2237/08 ,  H01J2237/31701

Abstract: A method and apparatus for treating material surfaces (13) using a repetitively pulsed ion beam (11). In particular, the treatment is tailored by adjusting treatment parameters of a pulsed ion beam (11) to a duration less than or equal to 1000 ns and a repetition rate of less than 1 Hz.

公开(公告)号：CA2176339A1

公开(公告)日：1995-05-26

申请号：CA2176339

申请日：1994-11-16

Applicant: SANDIA CORP

Inventor： BLOOMQUIST DOUGLAS D ,  BUCHHEIT RUDY ,  GREENLY JOHN B ,  MCINTYRE DALE C ,  NEAU EUGENE L ,  STINNETT REGAN W

IPC: B29C35/08 ,  B29C59/16 ,  C23C8/36 ,  C23C14/48 ,  G21K5/04 ,  H01J3/04 ,  H01J27/00 ,  H01J27/08 ,  H01J27/14 ,  H01J37/08 ,  H01L21/48

Abstract: A method and apparatus for treating material smfaces (13) using a repetitively pulsed ion beam (11). In particular, the treatment is tailored by adjusting treatment parameters of a pulsed iorl beam (11) to a duration less than or equal to 1000 ns and a repetition rate of less than 1 Hz.

公开(公告)号：ZA9409098B

公开(公告)日：1995-08-24

申请号：ZA9409098

申请日：1994-11-16

Applicant: SANDIA CORP

Inventor： BLOOMQUIST DOUGLAS D ,  BUCHHEIT RUDY ,  GREENLY JOHN B ,  MCINTYRE DALE C ,  NEAU EUGENE L ,  STINNETT REGAN W

IPC: B29C35/08 ,  B29C59/16 ,  C23C8/36 ,  C23C14/48 ,  G21K5/04 ,  H01J3/04 ,  H01J27/00 ,  H01J27/08 ,  H01J27/14 ,  H01J37/08 ,  H01L21/48 ,  C23C

CPC classification number: C08J7/123 ,  B29C59/16 ,  B29C2035/0872 ,  C23C8/36 ,  C23C14/48 ,  H01J27/14 ,  H01J2237/08 ,  H01J2237/31701

公开(公告)号：AU1098195A

公开(公告)日：1995-06-06

申请号：AU1098195

申请日：1994-11-16

Applicant: SANDIA CORP

Inventor： BLOOMQUIST DOUGLAS D ,  BUCHHEIT RUDY ,  GREENLY JOHN B ,  MCINTYRE DALE C ,  NEAU EUGENE L ,  STINNETT REGAN W

IPC: B29C35/08 ,  B29C59/16 ,  C23C8/36 ,  C23C14/48 ,  G21K5/04 ,  H01J3/04 ,  H01J27/00 ,  H01J27/08 ,  H01J27/14 ,  H01J37/08 ,  H01L21/48

公开(公告)号：AU677480B2

公开(公告)日：1997-04-24

申请号：AU1098195

申请日：1994-11-16

Applicant: SANDIA CORP

Inventor： BLOOMQUIST DOUGLAS D ,  BUCHHEIT RUDY ,  GREENLY JOHN B ,  MCINTYRE DALE C ,  NEAU EUGENE L ,  STINNETT REGAN W

IPC: B29C35/08 ,  B29C59/16 ,  C23C8/36 ,  C23C14/48 ,  G21K5/04 ,  H01J3/04 ,  H01J27/00 ,  H01J27/08 ,  H01J27/14 ,  H01J37/08 ,  H01L21/48

公开(公告)号：ZA949098B

公开(公告)日：1995-08-24

申请号：ZA949098

申请日：1994-11-16

Applicant: SANDIA CORP

Inventor： BLOOMQUIST DOUGLAS D ,  BUCHHEIT RUDY ,  GREENLY JOHN B ,  MCINTYRE DALE C ,  NEAU EUGENE L ,  STINNETT REGAN W

IPC: B29C35/08 ,  B29C59/16 ,  C23C8/36 ,  C23C14/48 ,  G21K5/04 ,  H01J3/04 ,  H01J27/00 ,  H01J27/08 ,  H01J27/14 ,  H01J37/08 ,  H01L21/48 ,  C23C

Abstract: Methods and apparatus for thermally altering the near surface characteristics of a material are described. In particular, a repetitively pulsed ion beam system comprising a high energy pulsed power source and an ion beam generator are described which are capable of producing single species high voltage ion beams (0.25-2.5 MeV) at 1-1000 kW average power and over extended operating cycles (108). Irradiating materials with such high energy, repetitively pulsed ion beams can yield surface treatments including localized high temperature anneals to melting, both followed by rapid thermal quenching to ambient temperatures to achieve both novel and heretofore commercially unachievable physical characteristics in a near surface layer of material.