Laser annealing method and laser annealing apparatus
    1.
    发明专利
    Laser annealing method and laser annealing apparatus 有权
    激光退火方法和激光退火设备

    公开(公告)号:JP2010093159A

    公开(公告)日:2010-04-22

    申请号:JP2008263561

    申请日:2008-10-10

    CPC classification number: B23K26/03 H01L22/26

    Abstract: PROBLEM TO BE SOLVED: To provide a laser annealing method uniformly crystallizing an amorphous film in laser annealing which is carried out by radiating a laser beam while scanning. SOLUTION: The laser annealing method includes the steps of: radiating a laser beam to an amorphous film on a substrate 10 while scanning the laser beam, to crystallize the amorphous film; obtaining a scanning speed by detecting a light quantity of laser beam reflected from the substrate 10 by a reflected light quantity detector PD and a scanning position of the laser beam by a reflected light position detector PSD, while the radiation and the scanning of the laser beam are carried out; and controlling a radiation level and the scanning speed of the laser beam based on results of comparison of the light quantity of laser beam reflected and the scanning speed of the laser beam with respective preset references, in a control portion 30. COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题:提供在激光退火中均匀结晶非晶膜的激光退火方法,其通过在扫描时照射激光束来进行。 解决方案:激光退火方法包括以下步骤:在扫描激光束的同时将激光束照射到衬底10上的非晶膜上,使非晶膜结晶化; 通过反射光量检测器PD检测从基板10反射的激光束的光量和通过反射光位置检测器PSD的激光束的扫描位置来获得扫描速度,同时激光束的辐射和扫描 被执行 并且根据控制部分30中的激光束的反射光量与激光束的扫描速度与预先设定的参照值的比较结果来控制激光束的辐射水平和扫描速度。版权所有: (C)2010,JPO&INPIT

    OPTICAL PARTS, BIAXIAL ACTUATOR AND OPTICAL DISK DEVICE USING THE SAME

    公开(公告)号:JP2001023220A

    公开(公告)日:2001-01-26

    申请号:JP19070399

    申请日:1999-07-05

    Applicant: SONY CORP

    Abstract: PROBLEM TO BE SOLVED: To make it possible to prevent the deterioration of optical characteristics by double refraction without the deterioration of other optical characteristics, physical characteristics and mechanical performance, exclusive of the double refraction at the time of molding of optical parts by inclining the inclination of a gate at the time of injection molding with respect to a diametral direction of the optical parts. SOLUTION: An objective lens 1 consists of a lens part 2 and a flange part 3 formed on its outer periphery. The lens part 2 is a biconvex lens and both faces thereof are formed to aspherical surfaces. The flange part 3 forms a cylindrical shape projecting to an optical axis direction from the outer peripheral part of the flange lens part 2. A runner 8 is so formed that its extending direction of a runner 8 aligns to the diameter D direction of the lens part 2 of the objective lens 1 and passes the center of the lens part 2 of the objective lens 1. Also, the gate 9 is molded from the center at the front end of the runner 8 toward the outer peripheral surface of the flange part 3 of the objective lens 1. The gate 9 is so molded that its direction is aligned to the tangent T direction of the objective lens 1 and the direction of the gate 9 is inclined with the diameter D direction of the lens part 2.

    LENS WITH REFLECTION PREVENTIVE FILM AND REFLECTION PREVENTIVE FILM FORMING METHOD

    公开(公告)号:JPH10160906A

    公开(公告)日:1998-06-19

    申请号:JP32045896

    申请日:1996-11-29

    Applicant: SONY CORP

    Abstract: PROBLEM TO BE SOLVED: To make the best display of a reflection preventive effect by changing film thickness in a center part of a surface part of a reflection preventive film from the thickness of the peripheral part according to an incident angle of luminous flux for the surface part. SOLUTION: The reflection preventive films are formed on the surface part 1a and a rear surface part 1b of a lens 1 consisting of nitric material and transparent synthetic resin material. The film thickness are different from each other among the reflection preventive film formed on an incident first area A1 being the area of the central part of the surface part 1a, the reflection preventive film formed on an incident surface second area B1 being the circular area of the peripheral part of this incident surface first area A1 and the reflection preventive film formed on an incident surface third area C1 being the circular area ranging from the outer edge of this incident surface second area B1 to the peripheral part of the lens surface. Further, related to the rear surface part 1b also, the film thickness are different from each other. The differences in the film thickness in every area of these reflection preventive films are decided according to the incident angle (outgoing angle) shown by θ of the luminous flux for the lens surface in the area.

    MULTILENS FOR OPTICAL PICKUP MADE OF GLASS AND ITS PRODUCTION

    公开(公告)号:JPH10142404A

    公开(公告)日:1998-05-29

    申请号:JP30993396

    申请日:1996-11-07

    Applicant: SONY CORP

    Abstract: PROBLEM TO BE SOLVED: To accurately attach a multilens for an optical pickup made of glass to a lens holder and to reduce a manufacturing cost of the multilens. SOLUTION: Planes parallel to an optical axis X-X of the multilens 1 for the optical pickup made of glass form two planes (a first reference flank 4 and a second reference flank 5) which are respectively parallel to or orthogonally intersecting with a cylindrical generatrix 6 of a cylindrical surface 2 being a front surface of the lens. On one surface of a planar glass preform material, projecting lines 16 having cylindrical surfaces and stretching in cylindrical generatrix directions are formed by pressing. On another surface at a part opposed to the projecting line 16, plural spherical recessed parts 17 having recessed spherical surfaces are formed along the cylindrical generatrix directions and then respective spherical recessed parts are cut as a unit.

    OPTICAL PICKUP DEVICE AND OPTICAL DISK DEVICE, AND OPTICAL DEVICE AND COMPOSITE OPTICAL ELEMENT

    公开(公告)号:JP2003223738A

    公开(公告)日:2003-08-08

    申请号:JP2002226764

    申请日:2002-08-02

    Applicant: SONY CORP

    Abstract: PROBLEM TO BE SOLVED: To improve productivity, reduce production cost, and improve reliabil ity of a focusing error signal. SOLUTION: An optical pickup device is provided with a 1st diffraction grating 45 for dividing an output light beam emitted from the light reception/ emission integral type element 31 into a zero order light beam and ± 1st order light beams, a 2nd diffraction grating 46 for diffracting the optical path of a returned light beam from an optical disk 2, and a 3rd diffraction grating 47 for diffracting a + 1st order light beam diffracted by the 2nd diffraction grating 46 by being disposed at the location where the 1st order light beam is entered to correct variations in an optical path, wherein the light reception/ emission integral type element 31 is disposed at the location where the - 1st order light beam diffracted by the 3rd diffraction grating 47 is entered and receives the - 1st order light beam to generate a focusing error signal FE and also receives the returned light beams from the optical disk 2 of ± 1st order light beams divided by the 1st diffraction grating 45 to generate a tracking error signal. COPYRIGHT: (C)2003,JPO

    OPTICAL DEVICE, COMPOUND OPTICAL ELEMENT, OPTICAL PICKUP DEVICE AND OPTICAL DISK UNIT

    公开(公告)号:JP2003157550A

    公开(公告)日:2003-05-30

    申请号:JP2001358245

    申请日:2001-11-22

    Applicant: SONY CORP

    Abstract: PROBLEM TO BE SOLVED: To improve productivity, to reduce production costs and to improve reliability in a focusing error signal and a tracking error signal. SOLUTION: In an optical disk device 1, a beam emitted from a light source 31 is split to three of main and side beams by a first diffraction grating 45 in an optical pickup 3, an optical disk 2 is irradiated with the beams by an objective lens 34, +1st-order light is used as return light by diffracting the optical path of respective return beams from the optical disk 2 by a second diffraction grating 46, and -1st-order light is used as return light by diffracting the respective return beams diffracted by the second diffraction grating 46 by a third diffraction grating 46. Therefore, the fluctuation of the optical path in the second diffraction grating 46 is corrected by the wavelength fluctuation of light emitted from the light source 31 and the return beams diffracted by the third diffraction grating 47 are each split to a plurality of beams by a splitting prism 48. Besides, the main beams split by the splitting prism 48 are each received by a light receiving part 35. Therefore, a focusing error FE is acquired and the side beams transmitted through the splitting prism 48 are received so that the tracking error signal can be acquired.

    Positioning device of lens optical axis, manufacturing method of lens unit, and inspection method of lens unit
    7.
    发明专利
    Positioning device of lens optical axis, manufacturing method of lens unit, and inspection method of lens unit 审中-公开
    透镜光轴定位装置,透镜组件制造方法及镜头检测方法

    公开(公告)号:JP2012058536A

    公开(公告)日:2012-03-22

    申请号:JP2010202331

    申请日:2010-09-09

    Abstract: PROBLEM TO BE SOLVED: To provide a positioning device of a lens optical axis that coincides optical axes of two wafers on which lenses are formed.SOLUTION: A control part gives an instruction to move a first wafer 2 and/or a second wafer 3 in a vertical direction and/or an optical axis direction of an optical axis that extends from a light source to a wavefront sensor 6. The control part then adjusts the relative position and angle of the first wafer 2 and the second wafer 3 to coincide the optical axes of lenses formed on the first wafer 2 and the second wafer 3. The adjustment is performed so that the tilt aberration and the defocus aberration are to be predetermined values.

    Abstract translation: 要解决的问题:提供一种使形成有透镜的两个晶片的光轴重合的透镜光轴的定位装置。 解决方案:控制部分给出了在从光源延伸到波前传感器6的光轴的垂直方向和/或光轴方向上移动第一晶片2和/或第二晶片3的指令 然后,控制部分调整第一晶片2和第二晶片3的相对位置和角度,使形成在第一晶片2和第二晶片3上的透镜的光轴重合。进行调整,使得倾斜像差和 散焦像差为预定值。 版权所有(C)2012,JPO&INPIT

    Image projection device and image projection method
    8.
    发明专利
    Image projection device and image projection method 审中-公开
    图像投影设备和图像投影方法

    公开(公告)号:JP2007206359A

    公开(公告)日:2007-08-16

    申请号:JP2006024933

    申请日:2006-02-01

    Abstract: PROBLEM TO BE SOLVED: To provide an image projection device and an image projection method that can project images over a wide color region.
    SOLUTION: The image projecting device has at least a light source comprising a solid light source and a discharge lamp; a light compositing part compositing the light emitted from the solid light source and light emitted from the discharge lamp; an optical modulation part for modulating the light emitted from the light compositing part, according to information; and a projection optical part projecting the light emitted from the optical modulation part. The solid light source is constituted of a plurality of laser diodes, having different wavelengths respectively, and the light source is equipped with a condensing lens that shapes the light emitted from the plurality of laser diodes.
    COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题:提供可以在宽的颜色区域投影图像的图像投影装置和图像投影方法。 解决方案:图像投影装置至少具有包括固体光源和放电灯的光源; 合成从固体光源发射的光和从放电灯发射的光的光合成部分; 根据信息调制从光合成部发射的光的光调制部; 以及投影光学部件,其投射从所述光调制部件发射的光。 固体光源由分别具有不同波长的多个激光二极管构成,并且光源配备有聚焦透镜,其对从多个激光二极管发出的光进行整形。 版权所有(C)2007,JPO&INPIT

    Optical device and image projecting device using the same
    9.
    发明专利
    Optical device and image projecting device using the same 审中-公开
    光学装置和使用该光学装置的图像投影装置

    公开(公告)号:JP2007047393A

    公开(公告)日:2007-02-22

    申请号:JP2005230945

    申请日:2005-08-09

    Abstract: PROBLEM TO BE SOLVED: To provide an optical device capable of introducing light from a light source to an optical spatial modulation part such as a liquid crystal panel for which unification of polarization directions is required without spoiling efficiency of using light when using the optical spatial modulation part such as the liquid crystal panel; and to provide an image projecting device using the same.
    SOLUTION: The optical device is equipped with the light sources 41 to 43, and optical systems guiding the light beams emitted from the light sources 41 to 43 to the spatial optical modulation parts 53a to 55a. The light beams emitted from the light sources 41 to 43 have the specified polarization directions 41d to 43d. The polarization directions 41d to 43d are aligned with the polarization directions 53b to 55b of the optical spatial modulation parts.
    COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 解决的问题:提供一种能够将来自光源的光引入到诸如液晶面板的光学空间调制部件的光学装置,其中在需要使用偏振方向的同时不损害使用光的效率 光学空间调制部分如液晶面板; 并提供使用该图像投影装置的图像投影装置。 解决方案:光学装置配备有光源41至43,以及将从光源41至43发射的光束引导到空间光调制部分53a至55a的光学系统。 从光源41至43发射的光束具有指定的偏振方向41d至43d。 偏振方向41d〜43d与光学空间调制部的偏振方向53b〜55b对准。 版权所有(C)2007,JPO&INPIT

    METHOD AND APPARATUS FOR MANUFACTURING PLASTIC LENS

    公开(公告)号:JP2000025120A

    公开(公告)日:2000-01-25

    申请号:JP19605298

    申请日:1998-07-10

    Applicant: SONY CORP

    Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a plastic lens capable of obtaining the plastic lens excellent in face properties. SOLUTION: In a method for manufacturing a plastic lens, plastic 1 introduced in a molding die is heated to a predetermined temperature. After holding it at a predetermined temperature for a predetermined period, the plastic 1 is then molded. While the molded plastic 1 is pressurized for a predetermined period by a lower cavity pressurizing rod 13, the plastic 1 is then gradually cooled to around the glass transition point.

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