SEMICONDUCTOR VARIABLE CAPACITOR AND ITS MANUFACTURE

    公开(公告)号:JPH11261015A

    公开(公告)日:1999-09-24

    申请号:JP702699

    申请日:1999-01-13

    Abstract: PROBLEM TO BE SOLVED: To integrate a variable capacitor in a semiconductor device through the use of regular manufacturing technology and substance, by constructing a stacked constitution body having a dielectric membrane which can be moved in fixed plates that are mutually detached and in a space between the plates, namely, in a gap. SOLUTION: A variable capacitor has a flexible membrane 14 and it exists on a lower side containing a first conductor 18 which is parallel to a second conductor 20 and is detached from it. The flexible membrane 14 is dielectric substance and is composed of silicon nitride. The flexible membrane 14 has a peripheral part 32 and the peripheral part 32 is supported by a semiconductor substrate 24 through an intermediate layer. The membrane 14 has a beam 36 which partially extends into a gap 22 between the first and second conductors 18 and 20. The membrane 14 has flexibility and can freely move in the gap 22. The beam 36 extends downward in the gap 22 and it is abutted on the upper face of a nitride layer 30.

    DETECTING RESISTIVE FINGER FOR FINGERPRINT SENSOR

    公开(公告)号:JP2002162204A

    公开(公告)日:2002-06-07

    申请号:JP2001257940

    申请日:2001-08-28

    Inventor: GOZZINI GIOVANNI

    Abstract: PROBLEM TO BE SOLVED: To provide an equipment of fingerprint sensor for detecting fingerprints by counteraction of fingers capable of improving guardianship for an unauthorized use of fingerprint with an equipment for detecting fingerprints. SOLUTION: In a capacitive equipment for detecting fingerprint, fingers are detected by plural resistive grids on an electrode of the fingerprint sensor for detecting the resistance of fingers arranged on the face of sensor. Fingers arranged on the face of sensor joins up with resistive grids and make it possible to detect the resistance of skin. The resistance detected is judged whether it corresponds to predicted biological characteristic of alive skin structure or not. Therefore, the technology for detecting fingers gives guardianship of prevention against deceptions to the equipment for detecting fingerprint.

    CAPACITANCE TYPE PIXEL FOR FINGERPRINT SENSOR

    公开(公告)号:JP2003207306A

    公开(公告)日:2003-07-25

    申请号:JP2002320918

    申请日:2002-11-05

    Inventor: GOZZINI GIOVANNI

    Abstract: PROBLEM TO BE SOLVED: To provide a improved fingerprint sensor. SOLUTION: An electrically floating capacitor plate defines a sensing capacitor with a fingerprint sensing surface thereabove. Reference voltage pulse is selectively applied to a pixel input node that is capacitively coupled to the floating plate, which in turn is capacitively coupled to the input node of a charge integrator. During the sensing operation, the charge integrator generates a pixel output signal that is a function of the variable capacitance of the sensing capacitor, which corresponds to crests or valleys of fingerprint characteristics that appears directly above the floating plate. COPYRIGHT: (C)2003,JPO

    IMPROVED SENSING ELEMENT ARRAY FOR FINGERPRINT SENSOR

    公开(公告)号:JP2003262503A

    公开(公告)日:2003-09-19

    申请号:JP2002344328

    申请日:2002-11-27

    Inventor: GOZZINI GIOVANNI

    Abstract: PROBLEM TO BE SOLVED: To provide an improved capacitive fingerprint sensor and an improved sensing element (device) used for the sensor. SOLUTION: A fingerprint capacitor is demarcated to each pixel in the pixel array of a fingerprint sensor by the fingerprint-bearing skin of a finger of a user brought nearer to the upper exposed surface of the sensing plate of the pixel. First and second plates are buried in a dielectric material on the bottom side of the sensing plate and, in addition, demarcate the first and second capacitors of the sensing element together with the dielectric material. The capacitance of the fingerprint capacitor is coupled with an amplifier through the sensing element. During a sensing operation, the amplifier generates a pixel output signal which is the function of the variable capacitance of the fingerprint capacitor. The pixel output signal varies in accordance with the presence of crests or valleys in the fingerprint appearing immediately above the sensing plate when the finger of the user is in contact with the fingerprint sensor. COPYRIGHT: (C)2003,JPO

    CAPACITIVE FINGERPRINT SENSOR HAVING PROTECTION COATING CONTAINING CONDUCTIVE SUSPENSION

    公开(公告)号:JP2003254707A

    公开(公告)日:2003-09-10

    申请号:JP2002350078

    申请日:2002-12-02

    Abstract: PROBLEM TO BE SOLVED: To provide an improved protection coating for a fingerprint sensor. SOLUTION: The capacitive fingerprint sensor partitions a sensing surface, and has the polymer protection coating containing conductive particles suspended therein. The conductive particles act as parallel strings of series capacitors to couple the capacitance of the skin bearing the fingerprint of a user's finger applied to the sensing surface to capacitive sensing elements. A polymer material of the coating is durable and scratch-resistant. The conductive particles enable use of a protection coating of 10-20 μ in thickness, while providing a high degree of sensitivity and image resolution. COPYRIGHT: (C)2003,JPO

    CAPACITIVE FINGER DETECTION FOR FINGERPRINT SENSOR

    公开(公告)号:JP2002112980A

    公开(公告)日:2002-04-16

    申请号:JP2001257286

    申请日:2001-08-28

    Inventor: GOZZINI GIOVANNI

    Abstract: PROBLEM TO BE SOLVED: To provide a technique that improves safety in fingerprint detection. SOLUTION: In a capacitive fingerprint detector, fingers are detected by a capacitive grid positioned in the upper side of a fingerprint sensor electrode for measuring the absolute capacitance of the fingers arranged on the surface of the sensor. The capacitance measurement is converted into a representative frequency, and subsequently compared with a reference frequency or frequency range and it is determined whether the capacitance measured agrees with predicted biological characteristics of live skin tissue. Therefore, this fingerprint detection protects against a cheat in a fingerprint detector.

    8.
    发明专利
    未知

    公开(公告)号:DE60108678T2

    公开(公告)日:2006-04-13

    申请号:DE60108678

    申请日:2001-04-02

    Abstract: A fingerprint sensor includes an array comprising a plurality of capacitive pixel cells. Each of the capacitive pixel cells includes a pair of metal plates and a reset transistor. The reset transistor includes a gate, a source connected to one of the metal plates and a drain connected to the other of the metal plates. A reset buffer generates a reset signal. A regenerator is associated with each reset transistor of each capacitive pixel cell. The regenerator regenerates the reset signal received from the reset buffer to eliminate injection gradient over the array.

    9.
    发明专利
    未知

    公开(公告)号:DE60108678D1

    公开(公告)日:2005-03-10

    申请号:DE60108678

    申请日:2001-04-02

    Abstract: A fingerprint sensor includes an array comprising a plurality of capacitive pixel cells. Each of the capacitive pixel cells includes a pair of metal plates and a reset transistor. The reset transistor includes a gate, a source connected to one of the metal plates and a drain connected to the other of the metal plates. A reset buffer generates a reset signal. A regenerator is associated with each reset transistor of each capacitive pixel cell. The regenerator regenerates the reset signal received from the reset buffer to eliminate injection gradient over the array.

    10.
    发明专利
    未知

    公开(公告)号:DE69919235D1

    公开(公告)日:2004-09-16

    申请号:DE69919235

    申请日:1999-01-12

    Abstract: A variable capacitor in a semiconductor device is described in which the capacitance is varied by the movement of a dielectric material in the space between the plates of the capacitor in response to an external stimulus. A method of making such a variable capacitor is also described in which the capacitor is built in a layered structure with the top layer including a portion of dielectric material extending into the space between the capacitor plates. After formation of the top layer, an intermediate layer is etched away to render the top layer flexible to facilitate movement of the dielectric material in the space between the capacitor plates.

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