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公开(公告)号：JPH11261015A
公开(公告)日：1999-09-24
申请号：JP702699
申请日：1999-01-13
Applicant: ST MICROELECTRONICS INC
Inventor： KALNITSKY ALEXANDER , KRAMER ALAN , FABBRIZIO VITO , GOZZINI GIOVANNI , GUPTA BHUSAN , SABARINI MARCO
IPC: H01G7/00 , G01B7/28 , G01L9/00 , G01P15/08 , G01P15/125 , H01L21/822 , H01L27/04
Abstract: PROBLEM TO BE SOLVED: To integrate a variable capacitor in a semiconductor device through the use of regular manufacturing technology and substance, by constructing a stacked constitution body having a dielectric membrane which can be moved in fixed plates that are mutually detached and in a space between the plates, namely, in a gap. SOLUTION: A variable capacitor has a flexible membrane 14 and it exists on a lower side containing a first conductor 18 which is parallel to a second conductor 20 and is detached from it. The flexible membrane 14 is dielectric substance and is composed of silicon nitride. The flexible membrane 14 has a peripheral part 32 and the peripheral part 32 is supported by a semiconductor substrate 24 through an intermediate layer. The membrane 14 has a beam 36 which partially extends into a gap 22 between the first and second conductors 18 and 20. The membrane 14 has flexibility and can freely move in the gap 22. The beam 36 extends downward in the gap 22 and it is abutted on the upper face of a nitride layer 30.
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2.发明专利
公开(公告)号：JPH11248665A
公开(公告)日：1999-09-17
申请号：JP35902298
申请日：1998-12-17
Applicant: ST MICROELECTRONICS INC
Inventor： TARTAGNI MARCO , GUPTA BHUSAN
Abstract: PROBLEM TO BE SOLVED: To make detectable foreign matter on a detection surface by outputting electric signals when a dielectric constant or a field form between two buried capacitor plates changes, by means of a physical matter on a sensor detection surface. SOLUTION: A plurality of sensor arrays are provided with semiconductor capacitive sensor cells respectively arranged in M×N pieces in directions X, Y. A dielectric layer 25 on the uppermost side of the capacitive sensor cells covers capacitor plates 23, 24 while a horizontal surface 125 on the upper side of the layer 25 serves as an array surface comes into contact with a foreigh matter to be detected. When a foreign matter physically stocks onto the surface 125, it changes the dielectric constant and field from together with the plates 23, 24, dreskulting in change in the capacitance value. By performing the connection in a negative feedback style from an output end of an amplifier 17 to an input end thereof, the arrays can generate an output indicating the existence of foreign matter 18.
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公开(公告)号：JPH11316105A
公开(公告)日：1999-11-16
申请号：JP6141299
申请日：1999-03-09
Applicant: ST MICROELECTRONICS INC
Inventor： GUPTA BHUSAN , TARTAGNI MARCO , KRAMER ALAN
Abstract: PROBLEM TO BE SOLVED: To attain the measurement and integration of a small distance between a capacitive distance sensor device and an object by providing a plurality of capacitor plates for forming different capacitance values between the capacitor plates and the object. SOLUTION: A sensor device 1 is arranged so as to form arrays 3, each of which has a number of cells 2 forming a basic sensor. The device 1 has horizontal and vertical scanning stages 5, 6 for enabling one of the cells 2 according to a prescribed scanning pattern, and a feed and logic stage 7 for feeding a power of the component of the device to control the sequence of the step. The feed and logic stage 7 particularly forms a voltage feed source 12 for generating a reference voltage ΔVR. A buffer 8 is connected to the output ends of all the cells 2 to successively supply the signal present in the output end of the cell 2 enabled by the stages 5, 6. According to this, a highly precise distance measurement and integration can be attained without requiring a complicated processing of output signal.
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公开(公告)号：JP2001249002A
公开(公告)日：2001-09-14
申请号：JP2000398759
申请日：2000-12-27
Applicant: ST MICROELECTRONICS INC
Inventor： GUPTA BHUSAN , KRAMER ALAN
IPC: E05B49/00 , B60R25/00 , E05B65/20 , G01B7/28 , G06F3/041 , G06K9/00 , G06T1/00 , G07C9/00 , G06F3/03
Abstract: PROBLEM TO BE SOLVED: To provide a finger print sensor capable of functioning as a command input. SOLUTION: The finger print detection system usable as a command interface by using finger movement is provided. The finger print pattern of a user is recognized and compared with A reference pattern previously contained. In the case the finger print pattern coincides with the contained pattern, the user is required to input a kind of command by way of the same interface system.
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公开(公告)号：DE69824377T2
公开(公告)日：2005-06-16
申请号：DE69824377
申请日：1998-11-06
Applicant: ST MICROELECTRONICS INC
Inventor： TARTAGNI MARCO , GUPTA BHUSAN
IPC: G01V3/00 , G01B7/004 , G01N27/22 , G01B101/50
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Patent Agency Ranking
公开(公告)号：DE69921712T2
公开(公告)日：2005-03-17
申请号：DE69921712
申请日：1999-03-05
Applicant: ST MICROELECTRONICS INC
Inventor： TARTAGNI MARCO , GUPTA BHUSAN , KRAMER ALAN
Abstract: A distance sensor has a capacitive element in turn having a first capacitor plate which is positioned facing a second capacitor plate whose distance is to be measured. In the case of fingerprinting, the second capacitor plate is defined directly by the skin surface of the finger being printed. The sensor comprises an inverting amplifier, between the input and output of which the capacitive element is connected to form a negative feedback branch. By supplying an electric charge step to the input of the inverting amplifier, a voltage step directly proportional to the distance being measured is obtained at the output.
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公开(公告)号：DE69919235D1
公开(公告)日：2004-09-16
申请号：DE69919235
申请日：1999-01-12
Applicant: ST MICROELECTRONICS INC
Inventor： KALNITSKY ALEXANDER , KRAMER ALAN , FABBRIZIO VITO , GOZZINI GIOVANNI , GUPTA BHUSAN , SABARINI MARCO
IPC: H01G7/00 , G01B7/28 , G01L9/00 , G01P15/08 , G01P15/125 , H01L21/822 , H01L27/04 , G01L9/12
Abstract: A variable capacitor in a semiconductor device is described in which the capacitance is varied by the movement of a dielectric material in the space between the plates of the capacitor in response to an external stimulus. A method of making such a variable capacitor is also described in which the capacitor is built in a layered structure with the top layer including a portion of dielectric material extending into the space between the capacitor plates. After formation of the top layer, an intermediate layer is etched away to render the top layer flexible to facilitate movement of the dielectric material in the space between the capacitor plates.
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公开(公告)号：DE69919235T2
公开(公告)日：2005-09-08
申请号：DE69919235
申请日：1999-01-12
Applicant: ST MICROELECTRONICS INC
Inventor： KALNITSKY ALEXANDER , KRAMER ALAN , FABBRIZIO VITO , GOZZINI GIOVANNI , GUPTA BHUSAN , SABARINI MARCO
IPC: H01G7/00 , G01B7/28 , G01L9/00 , G01P15/08 , G01P15/125 , H01L21/822 , H01L27/04 , G01L9/12
Abstract: A variable capacitor in a semiconductor device is described in which the capacitance is varied by the movement of a dielectric material in the space between the plates of the capacitor in response to an external stimulus. A method of making such a variable capacitor is also described in which the capacitor is built in a layered structure with the top layer including a portion of dielectric material extending into the space between the capacitor plates. After formation of the top layer, an intermediate layer is etched away to render the top layer flexible to facilitate movement of the dielectric material in the space between the capacitor plates.
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公开(公告)号：DE69921712D1
公开(公告)日：2004-12-16
申请号：DE69921712
申请日：1999-03-05
Applicant: ST MICROELECTRONICS INC
Inventor： TARTAGNI MARCO , GUPTA BHUSAN , KRAMER ALAN
Abstract: A distance sensor has a capacitive element in turn having a first capacitor plate which is positioned facing a second capacitor plate whose distance is to be measured. In the case of fingerprinting, the second capacitor plate is defined directly by the skin surface of the finger being printed. The sensor comprises an inverting amplifier, between the input and output of which the capacitive element is connected to form a negative feedback branch. By supplying an electric charge step to the input of the inverting amplifier, a voltage step directly proportional to the distance being measured is obtained at the output.
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公开(公告)号：DE69824377D1
公开(公告)日：2004-07-15
申请号：DE69824377
申请日：1998-11-06
Applicant: ST MICROELECTRONICS INC
Inventor： TARTAGNI MARCO , GUPTA BHUSAN
IPC: G01V3/00 , G01B7/004 , G01N27/22 , G01B101/50
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