公开(公告)号：FR2844396A1

公开(公告)日：2004-03-12

申请号：FR0302772

申请日：2003-03-06

Applicant: ST MICROELECTRONICS SA ,  FRANCE TELECOM

Inventor： BUSTOS JESSY ,  CORONEL PHILIPPE ,  REGNIER CHRISTOPHE ,  WACQUANT FRANCOIS ,  TAVEL BRICE ,  SKOTNICKI THOMAS

IPC: H01L21/28 ,  H01L21/336 ,  H01L21/762 ,  H01L21/768 ,  H01L21/8238 ,  H01L29/423 ,  H01L29/49 ,  H01L29/51 ,  H01L29/78

Abstract: The production of an electronic component consists of: (a) covering the surface (S) of a substrate (100) with a portion (P) delimiting with the substrate a volume (V) filled at least partially with a temporary material; (b) evacuating the temporary material from the volume by a shaft (C) extending between the volume and an access surface; (c) introducing an electrical conducting filling material (7) into the volume from some precursors fed via the shaft. Independent claims are also included for: (1) a field effect transistor with a gate produced by this method; (2) an electronic device incorporating such a transistor.

公开(公告)号：FR2844396B1

公开(公告)日：2006-02-03

申请号：FR0302772

申请日：2003-03-06

Applicant: ST MICROELECTRONICS SA ,  FRANCE TELECOM

Inventor： BUSTOS JESSY ,  CORONEL PHILIPPE ,  REGNIER CHRISTOPHE ,  WACQUANT FRANCOIS ,  TAVEL BRICE ,  SKOTNICKI THOMAS

IPC: H01L21/336 ,  H01L21/28 ,  H01L21/762 ,  H01L21/768 ,  H01L21/8238 ,  H01L29/423 ,  H01L29/49 ,  H01L29/51 ,  H01L29/78

Abstract: The production of an electronic component consists of: (a) covering the surface (S) of a substrate (100) with a portion (P) delimiting with the substrate a volume (V) filled at least partially with a temporary material; (b) evacuating the temporary material from the volume by a shaft (C) extending between the volume and an access surface; (c) introducing an electrical conducting filling material (7) into the volume from some precursors fed via the shaft. Independent claims are also included for: (1) a field effect transistor with a gate produced by this method; (2) an electronic device incorporating such a transistor.