公开(公告)号：JP2001133477A

公开(公告)日：2001-05-18

申请号：JP2000272251

申请日：2000-09-07

Applicant: ST MICROELECTRONICS SRL

Inventor： ZERBINI SARAH ,  VIGNA BENEDETTO ,  GARAVAGLIA MASSIMO ,  TOMESI GIANLUCA

IPC: B81B3/00 ,  G01P15/00 ,  G01P15/097 ,  G01P15/10 ,  G01P15/125 ,  G01P21/00 ,  H01L29/84

Abstract: PROBLEM TO BE SOLVED: To form an integrated semiconductor inertia sensor having a calibration microactuator. SOLUTION: An inertia sensor of this invention is a sensor integrated inside a body of semiconductor material, and comprises a stator element and a rotor element united into one electrostatically. The rotor element of the inertia sensor comprises a moving body and a microactuator means integrated inside the body of semiconductor material. The microactuator means is connected to the moving element of the rotor element, or is on the same plane.

公开(公告)号：DE69932516D1

公开(公告)日：2006-09-07

申请号：DE69932516

申请日：1999-09-10

Applicant: ST MICROELECTRONICS SRL

Inventor： ZERBINI SARAH ,  VIGNA BENEDETTO ,  GARAVAGLIA MASSIMO ,  TOMESI GIANLUCA

IPC: G01P15/10 ,  B81B3/00 ,  G01P15/00 ,  G01P15/097 ,  G01P15/125 ,  G01P21/00 ,  H01L29/84

Abstract: The inertial sensor (1) comprises an inner stator (2) and an outer rotor (3) which are electrostatically coupled together by means of mobile sensor arms (5) and fixed sensor arms (9a, 9b). The rotor (3) is connected to a calibration microactuator (12) comprising four sets (27) of actuator elements (13) arranged one for each quadrant of the inertial sensor. There are two actuator elements (13) making up each set, which are identical to each other, are angularly equidistant, and each of which comprises a mobile actuator arm (15) connected to the rotor (3) and bearing a plurality of mobile actuator electrodes (16), and a pair of fixed actuator arms (17a, 17b) which are set on opposite sides with respect to the corresponding mobile actuator arm and bear a plurality of fixed actuator electrodes (19a, 19b). The mobile actuator electrodes (16) and fixed actuator electrodes (19a, 19b) are connected to a driving unit (20) which biases them so as to cause a preset motion of the rotor (3), the motion being detected by a sensing unit (24) connected to the fixed sensor arms (9a, 9b).

公开(公告)号：DE69932516T2

公开(公告)日：2007-02-15

申请号：DE69932516

申请日：1999-09-10

Applicant: ST MICROELECTRONICS SRL

Inventor： ZERBINI SARAH ,  VIGNA BENEDETTO ,  GARAVAGLIA MASSIMO ,  TOMESI GIANLUCA

IPC: G01P15/10 ,  B81B3/00 ,  G01P15/00 ,  G01P15/097 ,  G01P15/125 ,  G01P21/00 ,  H01L29/84

Abstract: The inertial sensor (1) comprises an inner stator (2) and an outer rotor (3) which are electrostatically coupled together by means of mobile sensor arms (5) and fixed sensor arms (9a, 9b). The rotor (3) is connected to a calibration microactuator (12) comprising four sets (27) of actuator elements (13) arranged one for each quadrant of the inertial sensor. There are two actuator elements (13) making up each set, which are identical to each other, are angularly equidistant, and each of which comprises a mobile actuator arm (15) connected to the rotor (3) and bearing a plurality of mobile actuator electrodes (16), and a pair of fixed actuator arms (17a, 17b) which are set on opposite sides with respect to the corresponding mobile actuator arm and bear a plurality of fixed actuator electrodes (19a, 19b). The mobile actuator electrodes (16) and fixed actuator electrodes (19a, 19b) are connected to a driving unit (20) which biases them so as to cause a preset motion of the rotor (3), the motion being detected by a sensing unit (24) connected to the fixed sensor arms (9a, 9b).