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公开(公告)号：JPH11345468A
公开(公告)日：1999-12-14
申请号：JP12604599
申请日：1999-05-06
Applicant: ST MICROELECTRONICS SRL
Inventor： MASTROMATTEO UBALDO , MURARI BRUNO , VIGNA BENEDETTO , ZERBINI SARAH
Abstract: PROBLEM TO BE SOLVED: To manufacture a read/write unit without generating offset and residual stress as much as possible. SOLUTION: An integrated device 54 having a micro-actuator 10 is formed on a semiconductor material wafer 29, and immovable structures 45, 47 consisting of organic material are formed on the wafer 29, a fixing flange 51 integrated with the micro-actuator 10 and an electric connection part for connecting the integrated device 54 to a read/write head are formed simultaneously, a converter 6 supporting the read/write head is connected to the fixing flange 51, the electric connection part is connected to the read/write head, and the wafer is cut to a dice, an actuator unit is connected to a suspension, and the immovable structures 45, 47 are removed.
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2.发明专利
公开(公告)号：JPH11183518A
公开(公告)日：1999-07-09
申请号：JP21582598
申请日：1998-07-30
Applicant: ST MICROELECTRONICS SRL
Inventor： FERRARI PAOLO , VIGNA BENEDETTO , MONTANINI PIETRO , FERRERA MARCO
IPC: G01P9/04 , B81B3/00 , G01C19/56 , G01P15/08 , G01P15/125 , H01L21/762 , H01L21/764 , H01L41/08
Abstract: PROBLEM TO BE SOLVED: To enhance the sensitivity of a sensor furthermore by providing a weighted region containing tungsten in a movable mass. SOLUTION: A sacrifice region whose both sides and lower side are surrounded by a buried conductive region 3 is etched and removed, and an air gap 38 is formed in a semiconductor substrate 1. In its bottom part, a movable mass 40 is separated from the other parts of the substrate 1, and supported only by a fixed zone 42. This movable mass 40 is H-shaped, and a cross wall partitioning a movable electrode is inserted like a comb into the cross wall of a stationary mass 41 partitioning a stationary electrode. Since the movable and stationary electrodes are polarized through a contact region and buried conductive regions, the change of the distance between the movable electrode and the stationary electrode to be produced when the movable mass 40 is accelerated, is detected as a capacity change. Since tungsten is deposited on the movable mass 40 in a manufacturing stage to a thickness of about 1 μm for example, to form a tungsten weighted region 26C, the sensitivity of detection of the sensor increases furthermore.
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3.发明专利
公开(公告)号：JP2000113616A
公开(公告)日：2000-04-21
申请号：JP27840799
申请日：1999-09-30
Applicant: ST MICROELECTRONICS SRL
Inventor： VIGNA BENEDETTO
Abstract: PROBLEM TO BE SOLVED: To effectively damp sedimentation vibrations (ringing) in the vicinity of read position without using a complicated closed loop control circuit by a method wherein a mechanical damping structure for restricting vibrations of a rotor element is inserted into between a part of a stator element and a part of the rotor element. SOLUTION: An integrated micro-actuator 9' connects a stator element 17' to a fixed bias region 30 where two fixed damping arms 18a", 18b" are biased at the same reference potential as a rotor element 11' via a connection part 25, and the fixed damping arms 18a", 18b" are respectively connected to fixed arms (bias regions) 20a, 20b to bias first and second drive potentials. As the results, a movable arm of the rotor element 11' arranged between the fixed damping arms 18a", 18b" is a movable damping arm 13". The fixed damping arms 18a", 18b" and the movable damping arm 13" structure as a whole a damping structure 32 for sedimentation vibrations of the rotor element 11".
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公开(公告)号：JP2000024964A
公开(公告)日：2000-01-25
申请号：JP30722498
申请日：1998-10-28
Applicant: ST MICROELECTRONICS SRL
Inventor： FERRARI PAOLO , VIGNA BENEDETTO
Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method of a semiconductor material integrated micro-actuator as well as to provide electrostatic force having sufficient rigidity in the vertical direction to a disk and having sufficient acceleration to a head in a microactuator. SOLUTION: This micro-actuator has an inside rotor 4 and an outside stator 3 having the circular extension part for accompanying a radial directional arm for supporting electrodes sandwiching each other by extending in the almost circumferential direction. For manufacture, first of all, a sacrificial area is formed on a base board, an epitaxial layer is grown in the next place, an electronic part and a bias conductive area are formed, a part of a lower side base board of the sacrificial area is removed thereafter, an aperture extending through the whole base board is formed, and the epitaxial layer is drilled to constitute the inside rotor 4 and the outside stator 3. These are mutually separated, the sacrificial area is finally removed, and a movable structure is released from the residual part of a chip.
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公开(公告)号：JPH11150278A
公开(公告)日：1999-06-02
申请号：JP19549898
申请日：1998-07-10
Applicant: ST MICROELECTRONICS SRL
Inventor： VIGNA BENEDETTO , FERRARI PAOLO , FERRERA MARCO , MONTANINI PIETRO
IPC: B81B3/00 , G01C19/56 , G01P15/00 , G01P15/08 , G01P15/125 , H01L21/762 , H01L21/764 , H01L29/84 , G01P9/04
Abstract: PROBLEM TO BE SOLVED: To provide a high-sensitivity integrated sensor which is manufactured by the surface micromachining technique, and a manufacture thereof. SOLUTION: This manufacturing method comprises the steps of forming a silicon oxide sacrificial layer 21, polycrystalline Si layer 24, W layer 26 and Si carbide layer 28 on a single-crystal S main body 1, selectively removing the Si carbide layer 28, W layer 26 and Si layer 24 to form an outline of a suspension structure 40, forming Si carbide spacers 30' covering the exposed ends of the W layer 26, and removing the sacrificial layer 21.
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Patent Agency Ranking
公开(公告)号：JPH1183418A
公开(公告)日：1999-03-26
申请号：JP14780098
申请日：1998-05-28
Applicant: ST MICROELECTRONICS SRL
Inventor： SAX HERBERT , MURARI BRUNO , VILLA FLAVIO , VIGNA BENEDETTO , FERRARI PAOLO
Abstract: PROBLEM TO BE SOLVED: To provide a two dimensional sensor particularly for car, which comprises a permanent magnet moving while facing plural sensor elements to detect a magnetic field. SOLUTION: A permanent magnet 3 is freely movable on a plane along the first and second directions, which do not coincide with each other, and is fixed to a control lever so as to freely rotate around the third direction perpendicular to the plane as the center. The permanent magnet 3 is freely movable relative to an accumulation device 2 composed of the first group partitioned along the first direction, the second group partitioned along the second direction and a sensor element 10 of the third group to detect an angle position of the permanent magnet 3. An electronic equipment integrated with the sensor unit 10 produces a code relative to a position movement of the permanent magnet 3, and generates a control signal corresponding to a required function.
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公开(公告)号：JPH1173613A
公开(公告)日：1999-03-16
申请号：JP19083098
申请日：1998-07-06
Applicant: ST MICROELECTRONICS SRL
Inventor： MURARI BRUNO , VIGNA BENEDETTO , FERRARI PAOLO
Abstract: PROBLEM TO BE SOLVED: To provide an electromagnetic head formed by using a magnetoresistance element having a relatively simple structure in which a magnetic flux change is sufficiently interlinked with the magnetoresistance element and having high sensitivity. SOLUTION: This electromagnetic head has a magnetic core 205 constituting a magnetic circuit shielded by a first gap 230 for magnetical coupling to the memory cell of a memory device and a second gap 235 for separating the first and second magnetic poles 240, 245 of the magnetic core 205 and a magnetoresistance means 250 arranged in the region of the second gap 235 for the purpose of reading the memory cell. The magnetic reluctance means 250 is connected to the magnetic core 205 corresponding to the first magnetic pole 240 and the second magnetic pole 245 so as to be connected into the magnetic circuit.
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公开(公告)号：JP2001135446A
公开(公告)日：2001-05-18
申请号：JP2000279887
申请日：2000-09-14
Applicant: ST MICROELECTRONICS SRL
Inventor： MURARI BRUNO , MASTROMATTEO UBALDO , VIGNA BENEDETTO
Abstract: PROBLEM TO BE SOLVED: To provide a method of electrically and/or mechanically connecting components of a microminiature electronic system to one another easily. SOLUTION: A method of mechanically and/or electrically connecting components of a microminiature electronic system to one another which comprises at least one first component (5a, 5b, 50a-50d; 70) and one second component (2; 70), the method comprising the steps of : forming at least one local Joule effect microheater (R) at each soldering point between the first component and the second component in one component of said first and second components; and supplying said microheater with electric energy (V, 13a, 13b; 78, 79) and soldering the first and second components at the soldering point by using heat generated due to Joule effect with the microheater.
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公开(公告)号：JP2000057551A
公开(公告)日：2000-02-25
申请号：JP21477999
申请日：1999-07-29
Applicant: ST MICROELECTRONICS SRL
Inventor： SASSOLINI SIMONE , ZERBINI SARAH , VIGNA BENEDETTO , MASTROMATTEO UBALDO
Abstract: PROBLEM TO BE SOLVED: To make a micro-actuator to function sufficiently by connecting the micro-actuator to a first surface of a suspension plate so that an R/W converter is projected from a second surface opposite to the first surface of the suspension plate. SOLUTION: A assembly body to be finally assembled is provided with a gimbal 8, the R/W converter and a die 25. The gimbal 8 (forming a thin layer of a suspension) is provided with a first surface 43 facing to the die 25 and a second surface 44 opposite to this surface, and the R/W converter 6 is projected from the second surface 44. A central circular hole 41 provided on the gimbal 8 has a diameter sufficient to allow the R/W converter 6 beforehand stuck to a rotor to passes through. An adhesive material member 42 is arranged between a member 12 to be suspended and the R/W converter 6. A strip 40 is stuck to the first surface 43 of the gimbal 8, and the die 25 is connected solidly with the R/W converter 6.
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公开(公告)号：JPH1170659A
公开(公告)日：1999-03-16
申请号：JP18305098
申请日：1998-06-29
Applicant: ST MICROELECTRONICS SRL
Inventor： VIGNA BENEDETTO , MAGGI RICCARDO
Abstract: PROBLEM TO BE SOLVED: To reduce power consumption and the stress received by a heater element to extend the life of the heater element and to check the function of the constitutional elements thereof. SOLUTION: An ink jet printing head 30 has a mini-gun and a sensor integrated on a single crystal silicon wafer 1 and the mini-gun is formed of an ink chamber 21 and an orifice 23 communicating with the ink chamber 21 and the sensor includes a resistance element 4 provided under the ink chamber 21. The resistance element 4 depends on the pressure acting on the element, 4 and receives repulsive motion when the mini-gun ejects ink droplets to be changed in its pressure and resistance and this resistance change is detected by a proper circuit for specifying the presence of the ejection of ink droplets and the ejection time of ink droplets.
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