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公开(公告)号：DE69133178D1
公开(公告)日：2003-01-30
申请号：DE69133178
申请日：1991-03-07
Applicant: ST MICROELECTRONICS SRL
Inventor： CAPPELLETTI PAOLO , VAJANA BRUNO , LUCHERINI SILVIA
IPC: H01L21/8247 , H01L21/8246 , H01L27/112 , H01L27/115
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