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    发明专利
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    公开(公告)号：DE69935664D1

    公开(公告)日：2007-05-10

    申请号：DE69935664

    申请日：1999-06-15

    Applicant: ST MICROELECTRONICS SRL

    Inventor： PATTI DAVIDE ,  VALVO GIUSEPPINA

    IPC: H01L31/118 ,  H01L25/04 ,  H01L31/115

    Abstract: A particle detector formed in a chip of semiconductor material comprises: a first layer (42) with a first type of conductivity (n) having a surface on the first major surface of the chip, a second layer (40) with the first type of conductivity (n) having a surface on the second major surface of the chip, a third layer (41) with the first type of conductivity (n) having a resistivity lower than those of the first and second layers and disposed between the first layer (42) and the second layer (40), a first region (46) with a second type of conductivity (p), extending from the first surface into the first layer (42), a second region (45) with the second type of conductivity (p), extending from the second major surface into the second layer (40), and first (48), second (50,51) and third (43,47) electrical connection means for connection with the first region (46) with the second region (45), and with the third layer (41), respectively. To produce a position detector which does not require a large number of connections, the second electrical connection means comprise two electrodes (50,51) arranged a predetermined distance apart on the surface of the second region (45).

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