公开(公告)号：EP4005972A1

公开(公告)日：2022-06-01

申请号：EP21211139.7

申请日：2021-11-29

Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics International N.V.

Inventor： DUQI, Enri ,  BALDO, Lorenzo ,  FERRARI, Paolo ,  VIGNA, Benedetto ,  VILLA, Flavio Francesco ,  CASTOLDI, Laura Maria ,  GELMI, Ilaria

IPC: B81C1/00 ,  H04R1/08

Abstract: A semiconductor device includes: a substrate (2); a transduction microstructure (3) integrated in the substrate (2); a cap (5) joined to the substrate (2) and having a first face (5a) adjacent to the substrate (2) and a second, outer, face (5b); and a channel (15) extending through the cap (5) from the second face (5b) to the first face (5a) and communicating with the transduction microstructure (3). A protective membrane (17) made of porous polycrystalline silicon permeable to aeriform substances is set across the channel (15).

公开(公告)号：EP4488224A1

公开(公告)日：2025-01-08

申请号：EP24181025.8

申请日：2024-06-10

Applicant: STMicroelectronics International N.V.

Inventor： ALLEGATO, Giorgio ,  FERRARI, Paolo ,  OGGIONI, Laura

IPC: B81B7/02

Abstract: Described herein is a microelectromechanical sensor device (100), comprising: a stack (1) of a first die (2) that integrates a pressure-detection structure (4) and a second die (6) that integrates an inertial detection structure (8), the first die (2) constituting a cap for the inertial detection structure (8) and being bonded to the second die (6) so as to define a hermetic cavity (28, 34). The first die (2) has a first substrate (20), having a front surface (20a) and a rear surface (20b) that is bonded to said second die (6), a buried cavity (22) being buried and entirely contained in the first substrate (20) and being arranged in a position corresponding to the front surface (20a), from which it is separated by a membrane (24). In particular, the aforesaid buried cavity (22) is distinct and separate from the hermetic cavity (28, 34).