公开(公告)号：EP4152744A1

公开(公告)日：2023-03-22

申请号：EP22195417.5

申请日：2022-09-13

Applicant: STMicroelectronics Ltd ,  STMicroelectronics S.r.l.

Inventor： DOMNITS, Alex ,  ROTH, Elan ,  TERZI, Davide ,  MOLINARI, Luca ,  BOSCHI, Marco

IPC: H04N9/31

Abstract: A scanning laser projector (40) includes an optical module (10) and projection engine (41). The optical module includes a laser generator outputting a laser beam, and a movable mirror (20, 24) scanning the laser beam across an exit window defined through the housing in a scanning pattern wider than the exit window such that the laser beam is directed through the exit window in a projection pattern that is smaller than and within the scanning pattern. A first light detector (18a, 18b) is positioned about a periphery of the exit window such that as the movable mirror scans the laser beam in the scan pattern, at a point in the scan pattern where the laser beam is scanned across an interior of the housing and not through the exit window, the laser beam impinges upon the first light detector. The projection engine (41) adjusts driving of the movable mirror based upon output from the first light detector (18a, 18b).

公开(公告)号：EP4075184A1

公开(公告)日：2022-10-19

申请号：EP22167952.5

申请日：2022-04-12

Applicant: STMicroelectronics S.r.l.

Inventor： CARMINATI, Roberto ,  BONI, Nicolò ,  BARBIERI, Andrea ,  ZAMPROGNO, Marco ,  MOLINARI, Luca

IPC: G02B26/08

Abstract: MEMS device (20) comprising: a semiconductor body (21) with a cavity (23) and forming an anchor portion (24'); a tiltable structure (22) elastically suspended on the cavity (23); a first and a second support arm (25A, 25B) to support the tiltable structure (22); a first and a second piezoelectric actuation structure (30A1, 30A2) biasable to deform mechanically, generating a rotation of the tiltable structure (22) around a rotation axis (A). The piezoelectric actuation structures (30A1, 30A2) carry a first (41A1) and, respectively, a second piezoelectric displacement sensor (41A2) of the MEMS device (20). When the tiltable structure (22) rotates around the rotation axis (A), the displacement sensors (41A1, 41A2) are subject to respective mechanical deformations and generate respective sensing signals in phase opposition to each other, indicative of the rotation of the tiltable structure (22). The sensing signals are configured to be acquired in a differential manner.

公开(公告)号：EP4215974A1

公开(公告)日：2023-07-26

申请号：EP23152162.6

申请日：2023-01-18

Applicant: STMicroelectronics S.r.l.

Inventor： FURCERI, Raffaele Enrico ,  MOLINARI, Luca

IPC: G02B26/10 ,  G02B26/08

Abstract: Techniques to be described herein are based upon the combination of a digital lockin amplifier approach with a numerical method to yield accurate estimations of the amplitude (Asense) and phase (ϕsense) of a sense signal (Sns) obtained from a movement sensor (13) associated with a resonant MEMS device (11), such as a MEMS mirror.
The techniques described herein are efficient from a computational point of view, in a manner which is suitable for applications in which the implementing hardware is to follow size and power consumption constraints.

公开(公告)号：EP4009312A1

公开(公告)日：2022-06-08

申请号：EP21208720.9

申请日：2021-11-17

Applicant: STMicroelectronics S.r.l.

Inventor： FRIGERIO, Paolo ,  LANGFELDER, Giacomo ,  MOLINARI, Luca ,  MAIOCCHI, Giuseppe ,  BARBIERI, Andrea

IPC: G09G3/02 ,  G02B26/08 ,  H04N9/31

Abstract: Disclosed herein is a control system (10) for a projection system (17), including a first subtractor (12) receiving an input drive signal (INPUT) and a feedback signal (FBK) and generating a first difference signal (DIFF1) therefrom, the feedback signal being indicative of position of a quasi-static micromirror (19b) of the projection system. A type-2 compensator (15a) receives the first difference signal (DIFF1) and generates therefrom a first output signal (OUT1). A derivative based controller (15b) receives the feedback signal (FBK) and generates therefrom a second output signal (OUT2) . A second subtractor (16) receives the first (OUT1) and second (OUT2) output signals and generates a second difference signal (DIFF2) therefrom. The second difference signal serves to control a mirror driver (19a) of the projection system. A higher order resonance equalization circuit (20) receives a pre-output signal from an analog front end (19c) of the projection system that is indicative of position of the quasi-static micromirror (19b), and generates the feedback signal (FBK) therefrom.