Abstract:
The present invention relates to a memory device and specifically the multilevel type with error check and correction function and having a data input (DI), a data output (DO) and an address input (AI) and being of the type comprising first memory means (DM) designed to be accessed by means of address for containing user data, second memory means (EM) for containing error data concerning said user data, a control logic (CL) designed to receive in the writing phase from said address input (AI) and said data input (DI) a writing address and user data respectively and to generate error data and to write said data in said first means (DM) and second means (EM) respectively and designed to receive in the reading phase from said address input (AI) a reading address and extract corresponding user data and error data and combine them to correct any errors and supply them to said data output (DO) and characterised in that said second means (EM) are the type designed to be accessed by means of content and said content for access corresponding to addresses of said first means (DM).
Abstract:
This invention relates to a method for manufacturing isolation structures with different depths in a monolithically integrated semiconductor electronic device. The inventive method comprises a first step of defining active areas on a semiconductor material substrate, a second step of forming isolation structures by realising trenches in said substrate and then filling them with field oxide, a third step of defining lithographically at least a first device area, and a fourth step of reducing the vertical height of the substrate and of the field oxide of said first device area.
Abstract:
A non-volatile memory cell (1) is described, being integrated on a semiconductor substrate (2) and comprising:
a floating gate transistor including a source region (S) and a drain region (G), a gate region projecting from the substrate (2) and comprised between the source and drain regions (S, D), the gate region having a predetermined length (L) and width (W) and comprising a first floating gate region (FG) and a control gate region (CG), in which the floating gate region (FG) is insulated laterally, along the width (W) direction, by a dielectric layer (9) with low dielectric constant value (K). A process for manufacturing non-volatile memory cells (1) on a semiconductor substrate (2) is also described, comprising the following steps:
form active areas in the semiconductor substrate (2) bounded by an insulating layer (FOX), deposit a first conductor material layer (5) on active areas, define through a standard photolithographic technique a plurality of floating gate regions (FG), form a dielectric layer (9) with low dielectric constant value (K) on the floating gate regions (FG).
Abstract:
A method for forming structures self-aligned with each other on a semiconductor substrate (1), comprising the following steps:
forming, on the semiconductor substrate (1), first regions (3,12) of a first material projecting from the semiconductor substrate (1); forming, over the whole of the semiconductor substrate (1), a protective layer (7,16) of a second material selective with respect to the first material; removing the protective layer (7,16) to expose said first regions (3,12) through a planarizing step; etching said first regions (3,12) to expose said semiconductor substrate (1), and forming second regions (7a,16a) projecting from the substrate (1) of said protective layer.
Advantageously, spacers are formed on the sidewalls of the first regions.