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1.发明授权ELECTRONIC DEVICE COMPRISING DIFFERENTIAL SENSOR MEMS DEVICES AND DRILLED SUBSTRATES 有权与差动传感器MEMS器件和电子元件的钻SUBSTRATES
公开(公告)号：EP2121513B1
公开(公告)日：2015-01-21
申请号：EP08707208.8
申请日：2008-01-23
Applicant: STMicroelectronics Srl
Inventor： BALDO, Lorenzo , COMBI, Chantal , CORTESE, Mario, Francesco
CPC classification number: B81B7/0061 , B81B2201/0257 , B81B2201/0264 , B81C2203/0154 , G01L19/141 , G01L19/147 , G01L19/148 , H01L2224/48091 , H01L2224/48247 , H01L2924/10253 , H01L2924/1461 , H01L2924/00014 , H01L2924/00
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