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1.发明授权Process for manufacturing a micromechanical structure having a buried area provided with a filter 有权一种用于与带有滤波器的掩埋区制造微机械结构的方法
公开(公告)号：EP2412665B1
公开(公告)日：2013-06-19
申请号：EP11175428.9
申请日：2011-07-26
Applicant: STMicroelectronics Srl
Inventor： Ferrera, Marco , Perletti, Matteo , Varisco, Igor , Zanotti, Luca
CPC classification number: B81C1/00119 , B01D67/0062 , B01D71/02 , B01D2325/021 , B01D2325/028 , B01L3/502707 , B01L3/502753 , B01L2300/0681 , B81B2201/10 , B81C1/00071 , B81C1/00087 , B81C2201/0133 , B81C2201/0157 , F04B19/006
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